雙階式漸耦合光波導之單載子傳輸光檢測器

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姓名

邱柏豪(Pao-Hao Chiu) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

雙階式漸耦合光波導之單載子傳輸光檢測器
(Dual Stage Evanescently Coupled Waveguide Uni -Traveling Carrier Photodiode)

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摘要(中)

在本論文中我們提出了一個新的光波導結構，先利用Beamprop模擬軟體設計一個單一模態傳輸的光波導。傳統漸耦合光波導由於在崩裂手續時會有相當高的難度，因為它需要很準確的20μm光波導長度才能達到最好的響應度，在新的雙階式漸耦合光波導利用光纖波導和耦合波導不一樣的長度則可以避免這個問題。
　　在元件方面我們利用了電荷補償式單載子光檢測器，由於在collector layer利用了漸變式摻雜，可以使元件的飽和電流有更好表現，另外一個優點是因為漸變式摻雜會有較高的崩潰電壓表現。
　　利用上面所說的光波導結構與電荷補償式單載子光檢測器，我們可以完成一個應用在１.55μm波長以磷化銦為基板的光檢測器達到響應度為0.9A/W頻寬表現為60GHz。

摘要(英)

In this thesis, we demonstrated a high performance charge compensated uni-traveling carrier photodiode (CCUTC-PD) with novel dual-step optical waveguide. The passive dual-step optical waveguide was designed to obtain signal mode propagation in the fiber guide region, and high cleaving tolerance. The optical design and simulation of our demonstrated structure were achieved by using the three-dimensional beam propagation method software. In the aspect of active region, we incorporate the traditional charge-compensated UTC-PD with grading n-doped collector layer to release the trade off between saturation current and breakdown voltage. By way of the combination of dual-step optical waveguide and grading n-doped CCUTC-PD, we can achieve extremely high responsivity 0.9A/W, and high speed performance 60GHz.

關鍵字(中)

★ 雙階式
★ 光檢測器

關鍵字(英)

★ Photodiode
★ Dual stage

論文目次

目錄
摘要...............................................................Ⅰ
致謝.............................................................. Ⅲ
目錄...............................................................V
圖目錄............................................... .............Ⅶ
表目錄..............................................................X
第一章、序論
? 1.1前言...................................................... 1
? 1.2光纖通訊的應用.............................................5
? 1.3論文動機與架構.............................................6
第二章、電荷補償式單載子光偵測器設計...................................7
? 2.1 傳統P-I-N光偵測器工作原理.................................7
? 2.2 單載子傳輸光偵測器工作原理...............................10
? 2.3電荷補償式單載子光偵測器..................................14
? 2.4單載子光偵測器之幾何結構..................................17
? 2.5 光波導之模擬與設計.......................................20
第三章、彈道傳輸單載子光偵測器之製作..................................30
? 3.1電荷補償式單載子光偵測器之製程............................30
? 3.2晶片研磨與劈裂............................................44
第四章、量測成果說明..................................................45
? 4.1 Heterodyne-Beating 量測系統之架設........................45
? 4.2 光響應度量測結果.........................................47
? 4.3 頻寬量測結果.............................................49
? 4.4 高功率產生量測結果.......................................55
第五章、結論..........................................................57
參考文獻..............................................................59
著作列表..............................................................63

參考文獻

參考文獻
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指導教授

許晉瑋(JIN-WEI SHI)

審核日期

2006-7-14

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