陣列MiM電容的平衡接點之通道繞線法

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姓名

黃盟元(Meng-yuan Huang) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

陣列MiM電容的平衡接點之通道繞線法
(Balanced-Via Channel Routing for Array-type MiM Capacitors)

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至系統瀏覽論文 ( 永不開放)

摘要(中)

隨著半導體製程的縮小，製程變動的問題造成元件之間不匹配是日益嚴重。本論文提出Balanced-Via Channel Routing (BVCR)的繞線佈局法，可實現相關性電容的良率評估器所得到最佳佈局擺放，並依據既定的繞線方式達到所要求的元件匹配。BVCR遵照設計規則(Design rule)且著重於每個元件間的繞線的長度平衡。除此之外，BVCR的自動繞線機制可大幅降低佈局時間及人力成本，以加速產品上市的時效。

摘要(英)

Devices mismatch is usually caused by the process variation. The uncontrollable process variation has become a severe problem as the semiconductor technology continues to shrink. We proposed the Balanced-Via Channel Routing (BVCR) to implement the optimum placement which generated by yield evaluator. Based on routing style of BVCR and design rules, the routing wires between devices can be balanced. Furthermore, the automatic system of BVCR can reduce the design costs and speed-up the time to market.

關鍵字(中)

★ 平衡接點之通道繞線法
★ 良率評估器
★ 空間相關性
★ 共質心

關鍵字(英)

★ yield evaluator
★ Balanced-Via Channel Routing
★ Common -Centroid
★ Spatial Correlation

論文目次

第一章簡介 1
1-1前言 1
1-2論文組織 2
第二章前置工作 3
2-1 電容基本概念 3
2-1-1 電容簡介 3
2-2 電容不匹配的原因和電容匹配規則 5
2-3共質心(COMMON CENTROID) 9
第三章空間相關性和元件不匹配 12
3-1空間相關性(SPATIAL CORRELATION) 12
3-2相關性(CORRELATION)與元件不匹配(MISMATCH) 15
3-3電容比值(RATIO)的相關性(CORRELATION)與變異數(VARIANCE)16
第四章電容擺置(CAPACITOR PLACEMENT) 20
4-1交換式電容(SWITCH CAPACITOR) 20
4-2三角積分調變器(SIGMA-DELTA MODULATOR) 22
4-3交換電容式濾波器(SWITCHED-CAPACITOR BIQUAD FILTER) 25
第五章繞線 29
5-1電容佈局( CAPACITOR LAYOUT) 29
5-1-1 Design Rule 29
5-1-2 Balanced-Via Chanel Routing (BVCR) 29
5-2實驗流程 32
5-3 模擬結果 35
第六章結論與未來工作 43
6-1結論 43
6-2未來工作 43
參考文獻 44

參考文獻

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指導教授

陳竹一(Jwu-E Chen)

審核日期

2009-7-22

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