850nm光脈衝激發次兆赫波發射器

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姓名

黃丞宇(Cheng-yu Huang) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

850nm光脈衝激發次兆赫波發射器
(Sub-THz Photonic-Transmitters by 850nm Wavelengths Optical Pulse Pumping)

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摘要(中)

在本論文的研究中我們展示了兩個新穎的光電發射器，一個是利用低溫成長砷化鎵(LTG-GaAs)為基材的分離式傳輸複合光二極體(STR-PD) ，另一者是以砷化鎵/砷化鋁鎵(GaAs/AlGaAs)為基材的單載子傳輸光二極體(UTC-PD)。此兩種元件結合槽孔式的單極圓碟微波天線，其具有無需要整合在Si-lens的優點。藉由中心波長為800nm超快速飛秒光脈衝光訊號的激發下，我們的光電發射器可幅射出一個強而有力的次兆赫波脈衝訊號(最大功率20mW)和一個較寬的頻帶(100GHz到250GHz)。並由兆赫波時域光譜(TDS)系統量測並轉換成頻域訊號，此頻域訊號可應用在兆赫波資料連結系統內。而當元件操作在逆偏下，此光電發射器的峰值功率（峰值電場平方）隨著外加偏壓有顯著的變化，並經由訊號歸一化分析後，我們可以清楚的看到峰值功率與外加逆偏壓呈現一線性關係，此線性現象對於我們調制光次兆赫波的傳輸資料，有很大的益助。

摘要(英)

In this paper, we demonstrated two novel photonic transmitters; one is composed of low-temperature-grown GaAs (LTG-GaAs) based separated-transport-recombination photodiode (STR-PD) and the other is GaAs/AlGaAs based Uni-traveling-carrier photodiode (UTC-PD). Both devices are integrated with broadband micromachined monopole antennas but without the integration with Si-lens. Under femto-second optical pulse illumination which the wavelength of around 800nm, the photonic-transmitter can radiate strong sub-THz pulses (20mW peak-power) with a wide bandwidth (100~250GHz). Such result was directly measured by a THz-TDS system, which could be used as a THz UWB data link system. The bias dependent high-peak-power performance of our device implies its application of photonic emitter and data modulator in photonic sub-THz UWB system.

關鍵字(中)

★ THz
★ 光發射器
★ 單極圓碟天線
★ 分離-傳輸-複合光二極體
★ 單載子傳輸光二極體

關鍵字(英)

★ photonic-transmitters
★ THz

論文目次

第一章簡介 1
1-1 兆赫波之應用 1
1-2 兆赫波產生之方式 3
1-3論文架構 5
第二章光檢測器原理 7
2-1光二極體介紹 7
2-2行波式光二極體原理與頻率限制 9
2-2-1行波式光二極體等效電路 9
2-2-2行波式光二極體頻寬限制 11
2-3傳統光二極體的磊晶結構原理與問題 14
2-3-1傳統PIN砷化鎵光二極體 14
2-3-2傳統PIN低溫砷化鎵光二極體 15
2-4分離式傳輸復合行波光二極體 17
圖2-11 分離式傳輸復合行波式光二極體在加大電場操作下之電場分佈改變示意圖 19
2-5吸光層最佳化設計之單載子傳輸行波式光二極體 20
2-6與之整合的天線結構與模擬 23
第三章光檢測器設計與製作 27
3-1 磊晶設計 27
3-2 製作流程 30
3-2-1曝光顯影製程簡介 30
3-2-2 P-contact金屬化製程 31
3-3-2主動區蝕刻 32
3-2-3 N-contact金屬化製程 34
3-2-4快速熱回火 35
3-2-5元件區蝕刻 35
3-2-6平坦化與絕緣 36
3-2-7金屬導線連接線 38
3-2-8試片研磨與背部蝕刻 39
3-2-9元件切割 40
第四章量測討論 45
4-1 直流量測 45
4-2 脈衝量測系統 47
4-3 脈衝量測結果與討論 49
4-3-1 脈衝量測結果分析及說明 49
4-3-2 Pulse量測頻譜分析及說明 55
第五章結論 61
5-1 總結 61
5-2 未來方向 61
參考資料 62

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指導教授

許晉瑋(Jin-wei Shi)

審核日期

2008-7-22

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