300mm晶圓廠自動倉儲(stocker)之晶舟選取運送法則的研究

以作者查詢圖書館館藏

、以作者查詢臺灣博碩士

、以作者查詢全國書目

、勘誤回報

、線上人數：44

、訪客IP：18.118.253.171

姓名

梁國鋒(Guo-Feng Liang) 查詢紙本館藏

畢業系所

工業管理研究所

論文名稱

300mm晶圓廠自動倉儲(stocker)之晶舟選取運送法則的研究
(A Study on the Load-Selection Problem of Inter-Bay OHSs in a 300mm Wafer Fab)

相關論文

★ 佈置變更專案工程的執行研究－以H公司研發單位為例	★ MIL-STD-1916、MIL-STD-105E與結合製程能力指標之抽樣檢驗計畫
★ 建構客戶導向的製造品質資訊系統--以某筆記型電腦專業代工廠商為例	★ GMP藥廠設施佈置規劃的探討--以E公司為研究對象
★ 應用Fuzzy c-Means演算法之物流中心位址決策模式研究	★ 品質資訊系統之規劃與建構 -- 以某光碟製造公司為研究對象
★ 從製程特性的觀點探討生產過程中SPC管制圖監控運用的適切性 -- 以Wafer Level 封裝公司為例	★ 六標準差之應用個案研究-以光學薄膜包裝流程改善為例
★ 利用六標準差管理提昇中小企業之製程品質-以錦絲線添加防銹蠟改善為例	★ 專業半導體測試廠MES 系統導入狀況、成果及問題之探討-以A 公司為例
★ 以RFID技術為基礎進行安全管理導入－以A公司為例	★ 如何提昇產品品質及降低成本—以光碟壓片廠A公司為例
★ ERP導入專案個案分析—以半導體封裝廠A公司為例	★ 石英元件製造業之延遲策略應用— 以T公司為研究對象
★ 十二吋晶圓廠自動化搬運系統規劃與導入—以A公司為例	★ 半導體封裝產業之生產革新改善活動-A半導體股份有限公司導入經驗探討-

檔案

[Endnote RIS 格式]

[Bibtex 格式]

[相關文章]

[文章引用]

[完整記錄]

[館藏目錄]

至系統瀏覽論文 ( 永不開放)

摘要(中)

根據Meyersdof and Taghizadeh在1998研究指出有效的晶圓廠佈置規劃可以的提升晶舟搬運效率，另外也可以降低製造成本10%~30%。所以近年來學者也紛紛投入如何有效提升晶圓廠晶舟搬運效率的相關研究，在探討晶圓廠的物料搬運方面，以往學者大都著墨在：（1）增加車輛數（2）增加車速（3）增加車的載量（4）增加軌道圈數等四種方式來提升物料搬運的效率。也有某些研究在探討晶圓廠自動倉儲（stocker）的相關議題，而自動倉儲（stocker）的設立在晶圓廠扮演著舉足輕重的角色，不但具有晶舟的暫存功能，尚有轉運的功能。過去研究者在探討stocker的研究大抵可分為以下幾點：（1）stocker內的設計（2）stocker的佈置規劃（layout design）（3）stocker的設立數目（4）有無設立stocker等問題，反而較少著墨於晶舟如何揀取的問題。故不論stocker如何設立若沒有一個好的控制機制，反而會使公司花費龐大的設備投資成本而不見相對的報酬，也因此一但公司花了一筆投資成本在stocker的設置時，若有好的設計、良好的規劃、恰當的設立數目時，沒有設計好的揀取運送法則，則這些設備的投資無疑對公司的利潤不增反減。由此可知控制機制做得好的話，公司或許可以不必平白花費這些冤枉錢，而能得到與購買設備同樣的績效。
有薦於在晶圓廠的自動倉儲(stocker)如何去有效的選取運送方面悉有學者著墨。本論文廣羅晶圓廠方面相關的知識如：晶圓廠自動化物料搬運系統、晶圓廠佈置規劃並採用無人搬運車系統的設計概念，試著以Arena4.0建構出利用stocker來連結各加工中心間（interbay）具有雙軌道每個軌道依循單方向及具有雙載量的車輛（Overhead Shuttle；OHS）來載取晶舟的晶圓廠封閉式系統製造環境，以探討晶舟如何更有效的在加工系統中被車輛揀取。　
當搬運車來到各加工區域(Bay)的stocker時，而在stocker等待搬運車載取的眾多晶舟中要選取那個工件上車，故本研究分別探討系統中不同忙碌程度，也就是在執行晶舟的加工時，將系統的在製品數（WIP）固定一個定值，待一個工件完成加工作業後另一個工件才能再進入，這也是上述所提的封閉式系統概念。本研究利用六種系統忙碌的程度，其分別為：20、30、50、100、150、250，並在不同忙碌程度下比較所提八種晶舟選取運送法則，搭配Lin等人於2001所提出最佳的車輛控制方法：先遇到先服務法（First encounter first served；FEFS），再利用Arena4.0模擬工具進行系統模擬，進而驗証出那些法則在本研究的環境假設下對所提的五種績效指標有較好的績效。

摘要(英)

According to Meyersdof and Taghizadeh in 1998 to bring up the efficiency of cassette moving through efficient layout design which can decrease the cost of manufacturing 10%~30%. Recently there are some scholars to research the related issues of improving Wafer Fab material handling system which focus on increasing vehicle numbers, increasing vehicle speed, increasing vehicle capacities and increasing the number of tracks and some scholars to research the issues of stocker in Fab. The stocker which provides cassette to temporarily stock and transfers to another bay is playing an important role in Fab. In the past about the researches of stocker, the mostly researchers focus on the design of stockers, the layout of stockers, the number of stockers, has established stockers. On the contrary the problems of what is the order to pick up the cassettes in stocker are lack of. Whatever the company sets up stockers, it has not fluent controlling-dispatching may lead to invest fund but not to achieve an objective of company.
The paper adopts the concepts of AGV（Automated Guided Vehicle） to design automated material handling system in Fab which has double tracks to link interbay and double capacities in OHS（Overhead Shuttle）. We develop picking up rules to improve the efficiency of cassette moving in closed system and we also control different WIP levels in this system. To collocate eight picking up rules and six WIP levels can acquire forty-eight combinations. Finally we exploit simulation tool Arena4.0 to find out which combination is better in measurement criterion and exploit Little’s Law principle to verification our results.

關鍵字(中)

★ 自動化物料搬運系統
★ 加工中心
★ 晶舟
★ 無人搬運車
★ 自動化倉儲

關鍵字(英)

★ AMHS
★ interbay
★ intrabay
★ cassette
★ OHS（Overhea

論文目次

論文中文摘要 Ⅰ
論文英文摘要 Ⅲ
誌謝 Ⅳ
目錄 Ⅴ
圖目錄 Ⅷ
表目錄 Ⅸ
第一章緒論 1
1.1 研究背景與機1
1.2 研究目的2
1.3 實驗環境與假設2
1.4 研究架構3
第二章文獻探討 5
2.1 晶圓基本介紹5
2.2 晶圓處理步驟5
2.3 晶圓廠自動化物料搬運系統探討12
2.3.1 晶圓廠自動化物料搬運發展變遷12
2.3.2 搬運設備介紹14
2.3.3 搬運車數量及管理問題16
2.4 晶圓廠佈置規劃探討18
2.4.1 軌道佈置18
2.4.2 Bay的位置的決定23
2.4.3自動化倉儲（stocker）的設置24
2.5 無人搬運車系統相關文獻26
2.5.1 AGV路徑規劃與佈置問題26
2.5.2 AGV車輛數量的評估30
2.5.3 AGV派車法則31
第三章自動化倉儲的晶舟選取運送模擬研究35
3.1 問題分析35
3.2 系統環境35
3.3 雙載量OHS承載作業程序36
3.4 雙載量OHS之車輛控制及stocker內晶舟盒選擇方法37
3.4.1 OHS服務法則38
3.4.2 cassette selection(stocker內晶舟盒選擇法則)39
第四章模擬實驗設計與分析42
4.1 實驗環境與假設42
4.2 決定暖機時間與重覆實驗次數46
4.3 模擬實驗分析49
4.4 統計ANOVA分析與實驗結果51
4.4.1 ANOVA前提假設51
4.4.2 工件平均流程時間統計分析53
4.4.3 工件產出量統計分析60
4.4.4 提早工件之平均提早完成時間67
4.4.5 延遲工件之平均延遲完成時間73
4.4.6 總平均Lateness時間80
4.5 本章結果整理86
第五章結論與建議89
5.1 結論89
5.2 後續研究建議90
參考文獻91
附錄一模擬結果的驗証98
附錄二實驗數據100

參考文獻

1.李雨庭，2001，”半導體晶圓廠自動物料搬運系統設計”，中原大學工業工程研究所碩士論文。
2.林則孟、吳俊寬、楊景如，2002，”晶圓廠連接式自動化物料搬運系統之搬運車管理架構解析”，Journal of the Chinese Institute of Industrial Engineers, Vol. 19, No.4, pp.1-10。
3.張原銘，2003， ”晶圓廠之自動化物料搬運系統模擬研究-以黃光區與爐管區
為例”，清華大學工業工程研究所碩士論文。
4.楊青峰，2003，「多載量無人搬運車(AGV)運送派車法則的探討」，國立中央大學工業管理研究所碩士學位論文。
5.劉顥程，2003，「在封閉式系統下多載量AGV之載取派車法則與負載揀取法則的研究」，國立中央大學工業管理研究所碩士學位論文。
6.簡四華，2004，「在封閉式系統下多載量AGV」，國立中央大學工業管理研究所碩士學位論文。
7.顏柄榮，2000，”半導體晶圓廠自動化物枓搬運系統之模擬分析”，清華大學
工業工程研究所碩士論文。
8.Bartholdi, J. and Platzman, L.K., 1989, “Decentralized control of automated guided vehicles on a simple loop”, IIE Transactions, Vo. 21, No. 1,pp.76-81.
9.Bilge U. and Tanchoco J. M. A., 1997, “AGV systems with muti-load carriers:Basic issues and potential benefits”, Journal of Manufacturing Systems, Vol.16, No.3, pp.159-171.
10.Binder H. and Honold A., 1999,“Automation and fab concepts for 300 mm wafer manufacturing”, Microelectronic Engineering ,Vol.45 ,pp. 91–100.
11.Bozer Y. A. and Srinivasan, M. M., 1989 ,“Tandem configurations for AGV systems offer simplicity and flexibility”, Material Handling System, Vol. 21, No. 2, pp.23-27.
12.Brett A. Peters and Taho Yang, AUGUST 1997, ”Integrated Facility Layout and Material Handling System Design in Semiconductor Fabrication Facilities”, IEEE Transactions on semiconductor manufacturing, Vol. 10, No. 3.
13.Cardarelli G., Marcello P., February 1995,“Simulation tool for design and management optimization of automated interbay material handling storage systems for large wafer fab”, IEEE Transactions on Semiconductor Manufacturing, Vol.8, No.1.
14.Cardarelli G., Marcello P. and Granito A., 1996 ,“Performance
analysis of automated interbay material handling and storage systems
for large wafer fab”, Robotics & Computer-Integrated Manufacturing,
Vol.12, No.3, pp.227-234.
15.Chick S., Sánchez P. J., Ferrin D., and Morrice D. J., 2003, “A Simulation-based design framework for automated material handling systems in 300mm fabrication facilities”, Proceedings of the 2003 Winter Simulation Conference.
16.Egbelu, P. J. and Tanchoco, J. M. A., 1984, “Characterization of automatic
guided vehicle dispatching rules,”International Journal of Production
Research, Vol.22, No.3, pp.359-374.
17.Egbelu, P. J., 1987, “The use of non-simulation approaches in estimating
vehicle requirements in an automated guided vehicle based transport
System,” Material Flow, Vol. 4, pp.17-32.
18.Ho, Y. C., and Shaw, H. C., 1998 ,“The performance of multiple-load
AGV systems under different guide path configurations and vehicle
control strategies,”the Joint Conference of the Fifth International
Conference on Automation Technology and 1998 International Conference
of Production Research（Asia Meeting） , July 20-22, Grand Hotel, Taipei,
Taiwan, R.O.C., 1998.
19.Hopp J. and Spearman L. ,1996 “Factory physics - Foundations of manufacturing magement ”, pp218-245.
20.John P. Schroeder, 1997,”Automation-centric processing bay layout”,Semiconductor International, Vol. 20, pp. 209-213.
21.Joines J. A., Barton R. R., Kang K., and Fishwick P. A., 2000, “Simulation based decision support for future 300mm automated material
handling”, Proceedings of the 2000 Winter Simulation Conference, pp.1518-1522.
22.Joines J. A., Barton R. R., Kang K. and Fishwick P. A., 2000, “Simulation based comparison of semiconductor AMHS alternatives: continuous flow
vs. overhead monorail”, Proceedings of the 2000 Winter Simulation Conference, p1333-1338.
23.J300E, 1999, ” 300 mm Integrated Vision for Semiconductor Factories”, Japan 300mm Semiconductor Technology Conference / EIAJ .
24.Kim, C. W. and Tanchoco, J.M.A., 1991, ”Conflict-free shortest path
bi-directional AGV routing”, International Journal of Production Research,
Vol. 29, No. 12, pp.2377-2391.
25. Law M., Kelton W. ,1982,” Simulation Modeling And Analysis”, New York McGraw-Hill.
26.Lee, J., Tangjarukij, M. and Zhu, Z., 1996, “Load selection of automated
guided vehicles in flexible manufacturing systems”, International Journal
of Production Research, Vol.34, No. 12, pp.3388-3400.
27.Lin J. T. , Wang Fu-Kwun and Yen Ping-Yung, 2001 ,“Simulation analysis of dispatching rules for an automated interbay material handling system in wafer fab” International Journal of Production Research, Vol. 39, No. 6, p1221-1238.
28.Lin J. T., Wang F. K. and Wu C. K., 2003, “Connecting transport AMHS in a wafer fab”, International Journal of Production Research, Vol. 41, No. 3, pp.529–544.
29.Lin J. T., Wang F. K. and Yen P. Y., 2004,“The maximum loading and the optimum number of vehicles in a double-loop of an interbay material handling system”, Production Planning & Control, Vol. 15, No. 3, pp.247–255.
30.Maxwell, W. L. and Muckstadt, J. A., 1982, “Design of automatic guided vehicle systems,” IIE Transactions, Vol.14, No.2, pp.114-124.
31.Meyersdorf D. and Taghizadeh A. 1998 ,“Fab Layout Design Methodology: Case of the 300mm Fabs”, Semiconductor International, pp.187-196.
32.Nayyar., P. and Khator, S. K., 1993, “Operational Control of multi-load vehicles in an automated guided vehicle system,” Computers and Industrial Engineering, Vol.25, No.1-4, pp.503-506.
33.Newton, D., 1985, “Simulation model calculates how many automated guided vehicle are needed”, Industrial Engineering, Vol.8, No.2, pp.68-78.
34. Pierce N. G. and Stafford R., 1994, “Modeling and simulation of material handling for semiconductor wafer fabrication”, Proceedings of the 1994 Winter Simulation Conference, pp.900-906.
35.Occena, L.G. and Yokota. T.,1991, ”Modeling of an automated guided vehicle system(AGVs) in a just-in-time(JIT) nvironment ”
International Journal of Production Research, Vol.29, No.3, pp.495-511.
36.Ozden, Mufit, 1988,“A simulation study of multiple-load-carrying automated guided vehicles in a flexible manufacturing system”, International Journal of Production Research, Vol. 26, No. 8. pp.1353-1366.
37.Plata, J. 1997. “300 mm Fab Design – A Total Factory Perspective”.
IEEE/SEMI Advanced Semiconductor Manufacturing Conference: A5-A8.
38.Rajotia, S., Shanker, K., and Batra, J. L., 1998, “Determination of optimal AGV fleet size for an FMS,” International Journal of Production Research, Vol.36, No.5, pp.1177-1198.
39.Sinriech, D. and Tanchoco, J. M. A., 1991, “Intersection graph method for AGV flow path design”, International Journal of Production Research, Vol. 29, No.9, pp.1725-1732.
40.Sinriech, D. and Tanchoco, J. M. A., 1995, “An introduction to the segmented flow approach for discrete material flow systems”, International Journal of Production Research , Vol. 33, No. 12.
41.Sinriech, D. and Tanchoco, J. M. A., 1996 , “The segmented bi-directional single-loop topology for material flow systems” IIE Transactions, Vol.28, No. 1, pp.40-55.
42.Tanchoco, J. M. A. and Co, C. G.,1994, “Real-time control strategies for multiple-load AGVs”, Material Flow Systems in Manufacturing, edit by Tanchoco, J. M. A.(Chapman & Hall), pp.300-331.
43. International SEMATECH, Inc., 2000, “300 mm Factory Layout and
Material Handling Modeling: Phase II Report”, International SEMATECH,
Inc..
44.Welch P.D. ,1983, “Simulation run length control in the presence of an initial transiet,” Operation Research,Vol31,No.6.
45.Weiss, M. 1997. 300 mm Fab Automation Technology Options and Selection Criteria. 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference:373-378.

指導教授

何應欽(Ying-Chin Ho)

審核日期

2005-7-11

推文