晶圓廠內設施規劃之研究

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姓名

林世涵(Shih-Han Lin) 查詢紙本館藏

畢業系所

工業管理研究所

論文名稱

晶圓廠內設施規劃之研究
(A Study For Semiconductor Fab Facility Layout)

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摘要(中)

目前國內半導體業者正積極投入設立12 吋晶圓廠，而半導體產業是屬於高資本投資的產業，興建一座半導體晶圓製造廠往往需要至少五至七佰億新台幣，且隨著新製程的改善，其所需的投資成本亦會隨著增加；再加上台灣土地狹小，價格昂貴，取得越來越不容易，以及晶圓廠本身的一些特性如廠房地板下需埋設管線設備以及晶圓製造的加工途程，具有高度的迴流（Reentrant），造成物料搬運活動非常頻繁，如果以傳統人工搬運車搬運晶圓，則效率必然低落等特性，使得晶圓廠一旦完工後，日後若想更改原始佈置顯得困難重重。因此，晶圓製造廠的佈置方式以及自動化搬運系統的配置在初期規劃階段就顯得格外的重要。
半導體產業中物流最佳化設計的目的是在於減少晶圓搬運損傷、提高良率及生產量、降低cycle time、減低在製品存量及縮短交期，因此，如何規劃出更有效率的廠房佈置，將有限的空間做最有效率的運用，進而提高生產績效、降低成本，成為現代製造系統中重要的一環，也成為企業獲益的重要因素。
本研究的主要動機在於運用設施規劃的方式，針對現有晶圓廠設施佈置及自動化物料搬運系統配置進行佈置改善，並透過啟發式演算法與數學模型來縮短晶圓間的搬運距離用以解決晶圓廠中Interbay系統的物料搬運問題，希望在考慮求解時間及解答品質下，得到一個最佳的佈置方案。同時更可以因為減少晶圓搬運距離而提高機器設備的使用率，並且降低晶圓的製造以及搬運成本。

摘要(英)

In recent years, semiconductor manufacturing (SM) companies enthusiastically establish 300-mm fabs. However, establishing a new SM facility needs at least multi-billion US dollars. With the limited area in Taiwan, large footprints not only pose constraints for the facility designer but present challenge in the design of automatic material handling system (AMHS). SM is a highly sophiscated operation with various processes to be performed, and SM factories typically have reentrant flow to introduce the incresed number of process steps. In response to such challenge, it has become necessary to eliminate the manual handling of the wafers. As a result, facility layout design and AMHS are two major aspects to achieve a sucessful 300-mm fab.
The purpose of the optimazation of material transport is to reduce cycle time, work in process (WIP), delivery time, and increase yield. Therefore, the approach attepmpted to incorporate facility layout and AMHS simulataneously has become a critical factor on factory operation.
This paper focuses on using the integrated fab layout to achieve a short transportation distance of interbay by employing heuristic algorithm and mathematical programming model. In addition, this paper proposes this two-stage procedure can obtain a good quality solution. Based on this analysis, effective facility layout is shown to reduce tansportation distance of wafer lots, and increase equipment utility.

關鍵字(中)

★ 自動物料搬運系統
★ 300mm晶圓廠
★ 晶圓製造
★ 設施規劃

關鍵字(英)

★ automatic material handling system (AMHS)
★ 300-mm fabs
★ facility layout
★ semiconductor manufacturing (SM)

論文目次

目錄
圖目錄 iv
表目錄 vi
第一章緒綸 1
1.1 研究背景 1
1.2 研究動機 2
1.3 研究目的 3
1.4 研究範圍與假設 4
1.5 研究方法與進行步驟 4
第二章文獻探討 6
2.1 設施規劃文獻探討 6
2.2 晶圓基本介紹 11
2.3 晶圓製造流程 12
2.4 晶圓製造特性 13
2.5 晶圓廠佈置規劃探討 14
2.5.1 工廠佈置 14
2.5.2 軌道佈置 15
2.5.3 Bay之排列 16
2.5.4 Stocker的設置 18
2.6 晶圓廠內設施規劃相關文獻 20
第三章研究方法 23
3.1 方法架構與流程 23
3.2 單向迴圈上之Bay的排列順序 26
3.2.1 評估標準 26
3.2.2 行走距離之計算 27
3.2.3 Bay間的最小安全距離計算 27
3.2.4 Bay排列順序的階段建立 29
3.2.5 第一階段- FLA method (使用於單向迴圈型態) 29
3.2.6 第二階段- 模擬退火法﹝Simulated Annealing; SA﹞ 32
3.3 將單向迴圈上的Bay調整成上下兩列之佈置方法 36
3.3.1 第一階段-使用篩選方法找出適合調整線段 37
3.3.2 第二階段-計算額外增加成本找出最適之調整佈置 39
3.4 建立調整單向迴圈上各Bay最佳位置之數學模式 42
3.5 在單向迴圈下Bay的Stocker之最佳位置設置 44
3.6 建立單向迴圈上Bay間的捷徑(shortcut)最佳位置方法 45
3.6.1 釋例說明 47
3.7 在雙向迴圈下Bay排列順序的階段 54
3.7.1 第一階段- FLA method (使用於雙向迴圈型態) 54
3.7.2 第二階段- 模擬退火法﹝Simulated Annealing; SA﹞ 56
3.8 將位於雙向迴圈上的Bay調整成上下兩列之佈置方法 57
3.8.1 第一階段-使用篩選方法找出適合調整線段 58
3.8.2 第二階段-計算額外增加成本找出最適之調整佈置 58
3.9 建立一調整雙向迴圈下各Bay最佳位置之數學模式 62
3.10 建立各雙向Bay之Stocker最佳位置之數學模式 64
3.11 建立雙向迴圈上Bay間的捷徑(shortcut)最佳位置方法 65
3.11.1釋例說明 68
第四章實驗結果與分析 76
4.1 實驗目的與方法 76
4.2 實驗環境假設 76
4.3 單向迴圈下之設施佈置 77
4.3.1 實驗資料 77
4.3.2 Bay順序排列 79
4.3.3 將單向迴圈上的Bay調整成上下兩列之佈置 81
4.3.4 調整單向迴圈上各Bay之最佳位置 85
4.3.5 在單向迴圈下Bay的Stocker之最佳位置 86
4.3.6 建立單向迴圈上Bay間的捷徑(Shortcut)最佳位置 88
4.4 雙向迴圈下之設施佈置 90
4.4.1 實驗資料 90
4.4.2 Bay順序排列 90
4.4.3將雙向迴圈上的Bay調整成上下兩列之佈置 93
4.4.4調整雙向迴圈上各Bay之最佳位置 97
4.4.5在雙向迴圈下Bay的Stocker之最佳位置 98
4.4.6建立單向迴圈上Bay間的捷徑(Shortcut)最佳位置 100
第五章結論與後續研究 103
5.1結論 103
5.2後續研究及相關建議 104
參考文獻 106

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指導教授

何應欽(Ying-Chin Ho)

審核日期

2006-7-20

推文