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中文部份:
1. 王昭志,1997,「晶圓廠設施規劃改善方法之研究」,中原大學工業工程研究所,碩士論文。
2. 古美玉,1999,「應用模擬退火法於椎脊式設施規劃之研究—以半導體廠為例」,元智大學工業工程研究所,碩士論文。
3. 李雨庭,2001,「半導體晶圓廠自動物料搬運系統設計」,中原大學工業工程研究所,碩士論文。
4. 洪瑞鴻,1998,「整合定性與定量因子在晶圓廠設施佈置之研究」,中原大學工業工程研究所,碩士論文。
5. 陳昭吉,2003,「應用遺傳基因演算法於晶圓製造廠之設施佈置問題」,元智大學工業工程與管理研究所,碩士論文。
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7. 鄒少雄,1998,「使用雙向天車下晶圓廠設施佈置之研究」,中原大學工業工程研究所,碩士論文。
8. 彭國銘,2001,「晶圓製造廠設施規劃改善之研究」,中原大學工業工程研究所,碩士論文。
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12. 簡志勝,2004,「應用多感測器及多重畫面以最佳概率比檢驗做影像的移動檢測」,元智大學實業計劃研究所工學組,碩士論文。
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