結合直通軌道之脊椎式晶圓廠規劃

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姓名

潘羽恩(Yu-En Pan) 查詢紙本館藏

畢業系所

工業管理研究所

論文名稱

結合直通軌道之脊椎式晶圓廠規劃
(A research of blend spine-configuration with direct transport track facility layout problem.)

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摘要(中)

半導體產業中，最主要目的就是如何在最小的成本中發輝到最大的績效，像是減少晶圓的碰撞、避免發生晶舟或是OHT阻塞、減少晶圓的搬運距離以及週期時間等等，都會攸關到晶圓生產的績效，所以如何將績效發輝到最大就是最主要的問題。而又以廠房的規劃最為重要，如何在有限的空間做最有效的運用，如果能掌握到這一點，相信在企業上占有一席之地。
本研究的主要動機在於一般晶圓廠主要是以脊椎式為主的佈置，往往在Bay裡面加工完之後，又必須運送到最外部的Stocker才能夠再進行加工，如果可以在Bay與Bay之間設置一條相通的軌道，那麼在Bay裡面加工完成之後就能直接經由這條軌道進行運送，相信會節省不少的搬運時間。因此，如何規劃出這條軌道，使它發輝的效率最大，是個很重要的關鍵。
本研究將針對『晶圓廠內設施規劃』中的『脊椎式』做有系統的規劃與佈置：本研究和一般不同的是在於同時考慮IntraBay與InterBay的規劃，因此會先就Bay內的機台來做規劃，根據流量分析法、模擬退火法與額外增加成本來做實驗分析。而Bay之間的排列則會運用到數學模型來求解。吾人利用Visual C++來找出迴圈的排列佈置，以及CPLEX7.0進行實驗，以最小化總流量距離為目標函數。然後針對演算法作說明，進而對未來研究的建議，希望能作為晶圓廠設施佈置的參考指標。

摘要(英)

In semiconductor manufacturing, getting high performance in low cost such as reducing work in process, delivery distance or delivery time, cycle time and increase yield is the most important purpose. How to get the high performance is the question. The facility layout design and AMHS, doing the best in finite space, are the questions to achieve a successful 300mm fab.
The purpose on this paper is that the products to process of the Bay must pass through the Stocker, it is almost cost a lot of time. If we can set up a Direct Transport Track within Bays to make the products pass through without Stocker. We trust that set up a Direct Transport Track can reduce transportation distance and save a lot of time. For this reason to plan the best Direct Transport Track, we must consider the IntraBay and InterBay layout.
The paper focuses on spine configuration in fab layout, and in different of other papers, it considers the IntraBay and InterBay defined. To achieve a short transportation distance both in IntraBay and InterBay, we using heuristic algorithm and mathematical model. First, we defined the machine layout of Bay by FLA method, Simulated Annealing, and Extra cost. Second, we defined the Bay layout by Visual C++ and mathematical model using CPLEX 7.0. Final, we find the Direct Transport Track also by mathematical model. Based on this analysis, we expect that the facility layout will reduce transportation distance of wafer lots, and increase equipment utility.

關鍵字(中)

★ 數學模型
★ 設施規劃
★ 流量分析法
★ 啟發式演算法
★ 模擬退火法

關鍵字(英)

★ Mathematical Programming Model
★ Heuristic Algorithm
★ Flow Line Analysis
★ Facility Layout
★ InterBay
★ IntraBay

論文目次

目錄
圖目錄
表目錄
第一章緒論
1.1 研究背景
1.2 研究動機
1.3 研究目的
1.4 研究假設
1.5 研究方法與步驟
第二章文獻探討
2.1 設施規劃文獻探討
2.2 晶圓廠佈置規劃探討
2.2.1 機台相關文獻
2.2.2 IntraBay相關文獻
2.2.3 Bay的佈置相關文獻
2.2.4 Bay的軌道相關文獻
2.2.5 Stocker設置相關文獻
第三章研究方法
3.1 方法架構與流程
3.2 IntraBay的佈置
3.2.1 設定評估標準、行走距離計算與機台間的最小安全距離
3.2.1.1 行走距離之計算
3.2.1.2 機台間的最小安全距離計算
3.2.2 流量表的建立
3.2.3 機台排列順序的建立(FLA method與模擬退火法)
3.2.3.1 FLA method
3.2.3.2 模擬退火法
3.2.3.3 目標函數、初始溫度及降溫係數設定
3.2.3.4 降溫策略之選擇
3.2.4 切割為左右端與評估標準之計算
3.2.4.1 第一階段-使用篩選方法找出適合調整線段
3.2.4.2 第二階段-計算額外增加成本找出最適之調整佈置
3.2.5 Bay的寬度之計算
3.3 確定Bay的相對位置與切割成上下兩列
3.4 Bay之Loop軌道最佳I/O點
3.4.1 直通軌道型式
3.4.2 分配比率並直通軌道流量表
3.4.3 Input與Output之流量關係與行走距離
3.4.4 Loop軌道最佳I/O點
3.5 直通軌道設置點
3.6 建立調整單向迴圈上個Bay最佳位置之數學模式
第四章實驗結果與分析
4.1實驗目的與方法
4.2實驗環境假設
4.3 IntraBay之設施佈置
4.3.1 實驗資料
4.3.2 Bay內部機台順序排列
4.3.2.1 Bay1機台順序排列
4.3.2.2 Bay2機台順序排列
4.3.2.3 Bay3機台順序排列
4.3.2.4 Bay4機台順序排列
4.3.2.5 Bay5機台順序排列
4.3.2.6 Bay6機台順序排列
4.3.2.7 Bay7機台順序排列
4.3.3 Bay內部機台佈置
4.3.3.1 Bay1內部機台佈置
4.3.3.2 Bay2內部機台佈置
4.3.3.3 Bay3內部機台佈置
4.3.3.4 Bay4內部機台佈置
4.3.3.5 Bay5內部機台佈置
4.3.3.6 Bay6內部機台佈置
4.3.3.7 Bay7內部機台佈置
4.3.4 Bay的寬度
4.4 Bay在單向迴圈下之設施佈置
4.4.1 實驗資料
4.4.2 Bay的順序排列與改善
4.4.3 Bay與Bay的佈置
4.5 Bay內Loop軌道之最佳I/O點
4.5.1 依分配比例之機台流量
4.5.2 Bay內Loop軌道之最佳I/O點
4.6 直通軌道最佳設置點
4.6.1 直通軌道設置範圍
4.6.2 直通軌道最佳設置點
4.7 調整Bay的最佳位置
4.8 結果分析
4.8.1 考慮內部機台之總流量距離
4.8.2 不考慮內部機台之總流量距離
第五章結論與未來研究
5.1 結論
5.2 後續研究及相關建議
參考文獻

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指導教授

何應欽(Ying-Chin Ho)

審核日期

2008-7-1

推文