雷射修整之高速檢測-於修整TFT-LCD SHORTING BAR電路上之應用

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姓名

曾君華(Tseng Chun) 查詢紙本館藏

畢業系所

光機電工程研究所

論文名稱

雷射修整之高速檢測-於修整TFT-LCD SHORTING BAR電路上之應用
(High Speed Inspection for Laser Trimming- Application for LCD SHORTING BAR Circuit)

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摘要(中)

處理規則排列的金屬線經過加工(修整)後的切割寬度，本論文提出一種透過一維離散傅立葉轉換以及反離散傅立葉轉換，搭配影像統計法的處理方式，利用工業用CCD取得之影像，達到高速、準確的判斷加工結果(是否切斷)以及回報加工寬度的資訊。透過研究中所提之模糊度評價函數的使用，可針對某些因素(乘載平台機構的不穩定、CCD模組的晃動)導致的影像模糊情況加以剔除，進而提高處理影像的正確性以及可靠度。搭配雷射修整設備，可以即時反應修整結果，免除因修整錯誤而導致生產成本增加。進而提升雷射修整設備競爭力。

摘要(英)

For the laser trimming width of thick film resistor (circuit), the image processing method combined with one dimension discrete Fourier transform and with image statistics is proposed. Via captured image from industrial CCD, the trimmed result and trimmed width are inspected with high speed and high accuracy. With the blur evaluation function, the blurred images are inspected and eliminated from normal cases, and the validity and accuracy can be increased. The blurred image is caused by unstable loading mechanism or vibration of CCD module. With the inspection method introduced in this research, the trimming error could be avoided, and the competitiveness of the laser trimmer could be significantly improved.

關鍵字(中)

★ 離散傅立葉
★ 雷射修整
★ 電路
★ 高速檢測
★ 影像模糊度
★ 影像處理

關鍵字(英)

★ Discrete Fourier Transf
★ Circuit
★ Laser trimming

論文目次

摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VIII
表目錄 XV
符號說明 XVI
第一章緒論 1
1.1. 研究背景 1
1.2. 研究動機與目的 2
1.3. 文獻回顧 3
1.4. 論文架構 6
1.5. 實驗系統說明 7
第二章影像處理技術的介紹 10
2.0. 前言 10
2.1. 影像相減法 12
2.2. 對比度檢測 14
2.3. 轉動公式 16
2.4. 二維內插法 18
2.4.1. 近鄰內插法(Nearest neighbor interpolation) 18
2.4.2. 雙線性內插法(bilinear interpolation) 18
2.4.3. 雙立方內插法(bicubic interpolation) 19
2.4.4. 結果比較 20
2.5. 影像二值化 23
2.6. 空間域平滑化與濾除雜訊 26
2.7. Hough轉換(Hough transform) 31
2.8. 最小平方逼近法(Least Square Fitting,，LSF) 34
2.9. 離散傅立葉轉換( Discrete Fourier Transform，DFT) 37
2.9.1. 一維傅立葉轉換 37
2.9.2. 一維的離散傅立葉轉換(Discrete Fourier Transform，DFT) 37
2.9.3. 快速傅立葉轉換(Fast Fourier Transform，FFT) 38
2.10. 小結 38
第三章實驗架構 39
3.0. 研究變革 39
3.1. 空間域-利用Hough轉換求切割/修整線寬 41
3.2. 空間域-利用最小平方法求切割/修整線寬 50
3.3. 空間域-利用掃描線求切割/修整線寬 54
3.4. 空間域檢測法小結 62
3.5. Hybrid -空間域與頻率域組合方式使用求切割/修整線寬 63
第四章結果與討論 72
4.0. 前言 72
4.1. 利用Hough 轉換檢查加工寬度的測試結果 73
4.1.1. 測試結果分析 73
4.1.2. 討論 74
4.2. 利用最小平方逼近線法找加工寬度的測試結果 77
4.2.1. 測試結果分析(低模糊度評價值) 77
4.2.2. 取得加工後的影像(正常切割完畢) 80
4.2.3. 取得加工後的影像(未切割完畢) 83
4.2.4. 討論 85
4.3. 利用掃描線法找加工寬度的測試結果 87
4.3.1. 測試結果分析 87
4.3.2. 取得加工後的影像(取得的影像品質良好) 87
4.3.3. 取得加工後的影像(對焦的高度有落差) 90
4.3.4. 取得加工後的影像(中央凸起) 93
4.3.5. 取得加工後的影像(對焦問題導致金屬線為暗線狀況) 96
4.3.6. 取得加工後的影像(動態模糊) 99
4.3.7. 取得加工後的影像(低模糊度評價值) 102
4.3.8. 討論 104
4.4. 空間域檢測方法之結論 106
4.5. 利用Hybrid(空間域混合頻率域DFT分析)法找加工寬度的測試結果 108
4.5.1. 測試結果分析 108
4.5.2. 取得加工後的影像(取得的影像品質良好) 108
4.5.3. 取得加工後的影像(對焦的高度有落差) 110
4.5.4. 取得加工後的影像(中央凸起) 112
4.5.5. 取得加工後的影像(因對焦問題導致金屬線為暗線狀況) 114
4.5.6. 取得加工後的影像(低對比度) 116
4.5.7. 取得加工後的影像(動態模糊) 118
4.5.8. 討論 119
4.6. Hybrid分析法的結論 122
4.7. 光源的實驗與選擇 123
4.7.1. 上光源以及下光源(背光源)的測試 123
4.7.2. 不同色光的測試(下光源) 125
4.7.3. 較低倍率下的上光源以及下光源的打光測試 127
4.7.4. 測邊打光測試 129
4.7.5. 不同色光的上光源打光測試 132
4.7.6. 討論 133
4.8. 對焦深度的影響 134
4.9. 機械震動、快門的影響 136
4.10. 時間成本的討論 138
第五章結論 139
第六章未來展望 141
參考文獻 142

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指導教授

李朱育(Ju-Yi Lee)

審核日期

2009-7-15

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