微電化學模擬加工與成果分析

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姓名

黃偉庭(Wei-Ting Huang) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

微電化學模擬加工與成果分析
(Electrochemical micro machining for micro-manufacturing.)

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摘要(中)

微電化學加工(Electrochemical Micro-Machining,簡稱 EMM)，在未來各種細微加工技術的應用中，佔有極大的優勢。此篇文章指主要在介紹微電化學加工設備的架設，包含了加工主機、電極裝置及電解液循環系統..等。本文以0.2~0.5mm的銅針，及改變相關電場，及進給速度、電解液溫度等參數，來實際模擬微電化學加工情形。實驗中，以硝酸鈉水溶液作為電解液，藉由分析各參數對於加工工件的影響。
由實驗結果顯示，輸出電壓、進給速度與電解液的流動方式，佔很重要的因素，直接影響到加工成果。而且電解液的循環系統，亦是重要的課題。必須使用過濾裝置，才能使加工鈑件不產生二次放電影響加工精度。實驗結果亦顯示，由於電極針過於細小，導致加入高電流時，會產生銅離子解離的現象，流轉堆積在電極針前端，導致加工時孔徑的精度遭到破壞。

摘要(英)

Electrochemical micro machining (EMM) appears to be very promising as a future micro-machining technique since in many areas of applications it offers several advantages. The paper highlights the design and development of an EMM system set-up, which includes various components such as mechanical machining components, electrical systems and an electrolyte flow system, etc. Copper electrode tubes ranging from 0.2mm to 0.5mm are used as tools. Different parameters, such as the working voltage, the feed speed and the electrolyte flow temperature are used to get the aperture’s sizes of different alloys. Sodium nitrate solution is used as the electrolyte.
The result shows that working voltage, the feed speed and the electrolyte flowing direction play an important part in the EMM proceeding. In EMM set-up, the electrolyte flow circulating system is essential and must be considered carefully, otherwise the dirty electrolyte will flow into the machining chamber again and cause second discharging of the work piece and infect the aperture’s sizes.
Because the copper electrode tube is too small, a use current passing will destroy the copper electrode tube. The copper ion will pile up at the top of the copper electrode tube. The copper form shape will change that will infect the aperture’s sizes as well.

關鍵字(中)

★ 微電化學加工

關鍵字(英)

★ Electrochemical micro-machining
★ EMM

論文目次

摘要............................................................. i
目錄............................................................. iii
圖表目錄......................................................... vi
第一章緒論........................................................1
1-1 前言......................................................... 1
1-2 文獻回顧..................................................... 2
1-3 研究目的..................................................... 6
第二章實驗原理
2-1 法拉第定律及歐姆定律
2-1-1 法拉第定律................................................. 7
2-1-2 歐姆定律................................................... 7
2-2 電流密度，導電度及空隙分數................................... 8
2-2-1 電流密度................................................... 8
2-2-2 導電度..................................................... 8
2-2-3 空隙分數................................................... 8
2-3 電化學反應式................................................. 9
2-4 導電度與濃度之關係式......................................... 9
2-5 柏努力定律................................................... 10
2-6 熱流場分析................................................... 11
2-7 兩極間電壓探討............................................... 11
第三章實驗裝置與實驗步驟......................................... 13
3-1 機台本體..................................................... 13
3-1-1 機台本體架設............................................... 13
3-1-2 刀具進給系統............................................... 14
3-1-3 工件夾具系統及加工室....................................... 15
3-1-4 加工平台................................................... 15
3-2 電源供應器................................................... 16
3-3 電解液循環系統............................................... 16
3-4 步進馬達..................................................... 17
3-5 工件及刀具材料............................................... 18
3-5-1 工件材料................................................... 18
3-5-2 刀具材料................................................... 18
3-6 沉水馬達..................................................... 19
3-7 實驗步驟及注意事項........................................... 19
3-7-1 實驗步驟................................................... 19
3-7-2 實驗注意事項............................................... 20
第四章結果與討論................................................. 21
4-1 不同進給速度微電化學加工孔徑分析
(電解液溫度24 oC )............................................... 21
4-2 不同進給速度微電化學加工孔徑分析
(電解液溫度30 oC )............................................... 22
4-3 不同電壓下微電化學加工孔徑分析............................... 22
4-4 微電化學與放電加工孔隙及表面分析............................. 23
4-5 刀具和電流間的關係........................................... 24
第五章結論....................................................... 25
參考文獻......................................................... 26
表............................................................... 32
圖............................................................... 38
附錄
A Similarity Theory ............................................. 55

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指導教授

洪勵吾(Lih-Wu Hourng)

審核日期

2003-7-17

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