電化學放電加工硼矽玻璃之微流道成形技術研究

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姓名

鄭偉欣(Wei-Hsin Cheng) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

電化學放電加工硼矽玻璃之微流道成形技術研究
(A Study on the Microchannel Machinability of Pyrex Glass by Using Electrochemical Discharge Machining)

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摘要(中)

近年來電化學放電加工(Electrochemical Discharge Machining, ECDM)被運用於加工非導體脆硬材料，而且已經證實可對Pyrex玻璃進行三維微結構的加工。不過，現今利用電化學放電進行微銑削加工卻無法有效的控制加工精度。因此本文以脈衝電壓取代直流電壓、電極轉速與水平加工進給率為參數，在Pyrex玻璃上進行微流道的加工，並探討加工後微流道的形狀及尺寸精度及其對於加工特性之影響。
實驗結果顯示，將直流波形能量加工改以脈衝能量輸入(40 V，Ton：Toff = 2ms：2ms)，並結合電極的旋轉(1500 rpm)，能使加工後的微溝槽具有最佳的改善效果。最後利用掃描式銑削加工法進行高深寬比之微溝槽與複雜三維微結構加工的可行性探討，結果發現加工後之微溝槽與三維結構具有極高的尺寸精度，並證明了電化學放電加工可真實應用於Pyrex玻璃上製作三維微結構之可行性。

摘要(英)

Electrochemical discharge machining (ECDM) is demonstrated to be a potential process for 3D-microstructuring of Pyrex glass. However, it is difficult to obtain an accurate machining shape with a good surface quality because it is difficult to control the discharge characteristics near the tool tip. To improve the machining quality of the ECDM micromilling process, microgroove machining experiments were conducted in this study. Three factors affecting ECDM micromillimg performance, pulse voltage, rotational rate of tool and feed velocity of tool were taken up as machining parameters to investigate their influences on machining performance.
The results indicate that optimum combinations of both pulse voltage (40V, Ton：Toff = 2 ms：2 ms) and rotational speed (1500 rpm) will realize better machining accuracy. The feasibility of 3-dimensional microstructure machining was demonstrated by a layer-by-layer ECDM micromilling machining. Complex structures were made to demonstrate the great potential for the 3D microstructuring of Pyrex glass of the ECDM micromilling process.

關鍵字(中)

★ 三維微結構
★ 脈衝電壓
★ 微流道
★ Pyrex玻璃
★ 電化學放電加工

關鍵字(英)

★ microgroove
★ pulse voltage
★ Pyrex glass
★ 3D-microstructuring
★ ECDM

論文目次

摘要 I
Abstract II
總目錄 III
圖目錄 V
表目錄 VII
第一章緒論 1
1-1 研究動機 1
1-2 文獻回顧 4
1-2-1電化學放電加工機制文獻 4
1-2-1電化學放電加工特性文獻 4
1-3 研究目的 7
第二章基本原理 8
2-1 ECDM系統基本配置 8
2-2 ECDM的電化學反應[3] 10
2-3 ECDM的放電火花形成過程[4] 12
2-4 ECDM的材料去除機制 14
2-5 線放電研磨加工原理 17
第三章實驗材料、設備與步驟 21
3-1 實驗材料 21
3-2 實驗設備 25
3-3 實驗流程 36
3-4 實驗參數設定 37
3-5 實驗步驟 38
3-5-1 碳化鎢電極整修 38
3-5-2 電解液之調配 41
3-5-3 ECDM機構設備的調整 41
3-5-4 微流道加工方法 41
3-5-5 輸入不同實驗參數值 42
3-5-6 三維結構應用 42
3-5-7 試片清洗 42
3-5-8 微流道形態之觀察與測量 42
第四章結果與討論 43
4-1 脈衝型態能量輸入對ECDM微流道加工的影響 45
4-2 不同電極轉速對ECDM微流道加工的影響 52
4-3 不同進給速率對ECDM微流道加工的影響 56
4-4 加工不同深度對ECDM微流道的影響 61
4-4-1 深切加工微流道 61
4-4-2 掃描進給加工微流道 64
4-5 3D微結構應用 69
第五章結論 71
第六章參考文獻 72
個人簡歷 75

參考文獻

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指導教授

顏炳華(Biing-Hwa yan)

審核日期

2007-7-2

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