 |
|
|
|
以作者查詢圖書館館藏 、以作者查詢臺灣博碩士 、以作者查詢全國書目 、勘誤回報 、線上人數：60 、訪客IP：3.147.86.246
姓名 張兆宇(Chao-yu Chang) 查詢紙本館藏 畢業系所 機械工程學系 論文名稱 鋯鈦酸鉛超音波微噴墨頭之分析與製作
(Analysis and Fabrication of PZT Ultrasonic Micro Inkjet Ejector)相關論文 檔案 [Endnote RIS 格式]
[相關文章]
[文章引用]
[完整記錄]
[館藏目錄]
[檢視]
- 本電子論文使用權限為同意立即開放。
- 已達開放權限電子全文僅授權使用者為學術研究之目的，進行個人非營利性質之檢索、閱讀、列印。
- 請遵守中華民國著作權法之相關規定，切勿任意重製、散佈、改作、轉貼、播送，以免觸法。
摘要(中) 聲波噴墨法不同於熱氣泡式和壓電致動式，可改善噴墨阻塞、墨滴方向性與衛星點等問題，為一新興噴墨列印技術，藉由供應高頻弦波電能於壓電換能器使其產生超音波，平面波通過聚焦透鏡後匯聚成超音波束，推動液面墨水而達到噴墨效果。
本研究主要分為聚焦透鏡與壓電換能器兩部份，聚焦透鏡依據超音波噴墨相關理論設計 100 MHz 及 200 MHz 之微尺寸聚焦透鏡，規劃微機電製程，成功製作出四階層結構；選用鋯鈦酸鉛作為壓電換能器，自行調配溶膠凝膠溶液後，以旋鍍法製作不同厚度之試片，X 光繞射儀觀察壓電膜隨厚度增加其晶格結構越佳，藉由電容與電壓關係驗證鋯鈦酸鉛具備壓電效應，並且利用阻抗分析儀確認換能器之共振頻率，目前已經成功製作出共振頻率為 800 MHz、820 MHz 和 1.05 GHz 之 PZT 壓電換能器。實驗已個別驗證微尺寸聚焦透鏡與壓電換能器之製作與特性，並累積相關微機電製程上經驗，以利未來噴墨頭改良。
摘要(英) Ultrasonic inkjet method is different from the thermal bubble and piezoelectric actuating methods; it is a new inkjet printing technology. This method can improve some drawbacks arising from thermal-bubble and piezoelectric actuating printing such as, blocked printing head, droplet-directionality and satellite problems. The piezoelectric transducer can generate ultrasound through supplying high-frequency sinusoid voltage. After the plane wave translates through the focusing lens, focused ultrasonic energy on the ink surface is able to inkjet.
This research is mainly divided into the focusing lens and piezoelectric transducer. According to the ultrasonic inkjet theory, the micro focusing lens is designed 100 and 200 MHz. The MEMS process is planned, and the focusing lens which is four steps structure is successfully fabricated. PZT is a material which is used for the piezoelectric transducer. After producing the sol-gel solution, the samples of different thickness PZT films are made by spin-coater. The crystalline grain structure is observed by the XRD instrument, the structure of thicker film is better. The piezoelectric effect of PZT is proved by the capacity and voltage relation, and the resonance frequency of the piezoelectric transducer is confirmed by the impedance analysis instrument. The PZT piezoelectric transducer which resonance frequency are 800 MHz, 820 MHz and 1.05 GHz have already been manufacture. This study has completed the fabrication and verified the characteristics of the focusing lens and piezoelectric transducer, respectively. The obtained MEMS design and fabrication experiences are helpful to the improvement of printing head study in the future.
關鍵字(中) ★ 菲涅爾聚焦透鏡
★ 壓電換能器
★ 鋯鈦酸鉛
★ 超音波噴墨關鍵字(英) ★ Piezoelectric transducer
★ PZT
★ Ultrasonic ejector
★ Fresnel focusing lens論文目次 中文摘要.....................................................i
英文摘要.....................................................ii
誌謝.............................................................iii
目錄.............................................................iv
圖目錄.........................................................vi
表目錄.........................................................viii
第一章 緒論.............................................1
1.1 研究背景與動機................................1
1.2 文獻回顧............................................4
1.2.1 聚焦透鏡原理.................................4
1.2.2 壓電材料製程與原理.....................5
1.2.3 聲能噴墨法.....................................6
1.3 研究範疇............................................7
第二章 超音波噴墨理論基礎.................8
2.1 超音波聚焦透鏡之原理....................8
2.1.1 超音波透鏡簡介.............................8
2.1.2 繞射透鏡原理.................................10
2.1.3 繞射聚焦模擬.................................12
2.2 超音波壓電薄膜之原理....................15
2.2.1 壓電現象與壓電效應.....................15
2.2.2 壓電材料本構方程式.....................16
2.2.3 壓電共振關係式.............................19
2.3 超音波噴墨裝置................................27
2.3.1 超音波噴墨原理.............................27
2.3.2 超音波噴墨模型.............................31
2.3.3 超音波噴墨系統.............................34
第三章 超音波噴墨頭設計及分析.........41
3.1 超音波噴墨裝置設計流程................41
3.2 聚焦透鏡設計及分析........................44
3.2.1 聚焦透鏡設計.................................44
3.2.2 製程規劃.........................................46
3.3 壓電換能器設計及分析....................52
3.3.1 溶膠凝膠溶液製備.........................52
3.3.2 壓電膜製程規劃.............................54
第四章 超音波噴墨裝置製作及驗證.....59
4.1 聚焦透鏡製作及驗證........................59
4.1.1 表面輪廓量測.................................59
4.1.2 掃描式電子顯微鏡量測.................63
4.2 壓電換能器製作及驗證....................67
4.2.1 晶相結構量測.................................68
4.2.2 電性量測.........................................69
4.2.3 阻抗量測.........................................71
第五章 結論與未來展望.........................75
5.1 結論....................................................75
5.2 未來展望............................................75
文獻回顧.....................................................76
附錄.............................................................78
參考文獻 Brünahl, J., Physics of Piezoelectric Shear Mode Inkjet Actuators, Universitetsservice US-AB, Stockholm, ISBN 9162856758 (2003).
Chan, S. C., Mina, M., Udpa, S. S., Udpa, L., and Lord, W., “Finite Element Analvsis of Multilevel Acousttc Fresnel Lenses,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 43, No. 4, pp. 670-677 (1996).
Chu, B. T. and Apfel, R. E., “Acoustic Radiation Pressure Produced by a Beam of Sound,” Journal of the Acoustical Society of America, Vol. 72, No.6, pp. 1673-1687 (1982).
Chien, Y. N., “Analysis and Design of a Micro-droplet Inkjet Ejector Using New-designed Fresnel Lenses Focusing Acoustic Energy,” Master Thesis, Department of Mechanical Engineering, National Central University, Jhongli, Taiwan (2005).
Demirci, U., “Acoustic Picoliter Droplets for Emerging Applications in Semiconductor Industry and Biotechnology,” Journal of Microelectromechanical Systems, Vol. 15, No. 4, pp. 957-966 (2006).
Elrod, S. A., Hadimioglu, B., Khuri-Yakub, B. T., Rawson, E. G., Richley, E., and Quate, C. F., “Nozzleless Droplet Formation with Focused Acoustic Beams,” Journal of Applied Physics, Vol. 65, No. 9, pp. 3441-3447 (1989).
Guo, Y. J., Barton, S. K., and Wright, T. M., “Design of High Efficiency Fresnel Zone Plate Antennas,” Antennas and Propagation Society International Symposium, Vol. 1, pp. 182-185 (1991).
Hadimioglu, B., Rawson, E. G., Lujan, R., Lim, M., Zesch, J. C., Khuri-Yakub, B. T., and Quate, C. F., “High-Efficiency Fresnel Acoustic Lenses,” 1993 Ultraoniscs Symposium, pp. 579-582 (1993).
Hadimioglu, B., Elrod, S. A., Steinmetz, D. L., Lim, M., Zesch, J. C., Khuri-Yakub, B. T., Rawson, E. G., and Quate, C. F., “Acoustic Ink Printing,” 1992 Ultrasonics Symposium, pp. 929-935 (1992).
Huang, O., Bandyopadhyay, A., and Bose, S., “Influence of processing parameters on PZT thick films,” Materials Science and Engineering B, Vol. 116, pp. 19-24 (2004).
Han, F. and Nuutinen, J., “Analysis of Spurious Spectrum due to RF Bursting Signals in TDMA-based Wireless Communications Systems,” 1998 IEEE Electromagnetic Compatibility, Vol. 1, pp. 393-398 (1998).
Huang, D. and Kim, E. S., “Micromachined Acoustic-Wave Liquid Ejector,” Journal of Microelectromechanical Systems, Vol. 10, No. 3, pp. 442-449 (2001).
Kino, G.. S., Acoustic Waves: Devices, Imaging, and Analog Signal Processing, Prentice-Hall, ISBN 0130030473 (1987).
Kim, C. H. and Kim, Y. K., “Integration of a micro 2N-level quantized binary Fresnel lens on a micro XY-stage,” 1999 Lasers and Electro-Optics, Vol. 2, pp. 268-269 (1999).
Kim, S., Yang, J., Yand, C., Kim, Y., Sim, W., and Oh, Y., “The Fabrication of Monolithic Micro Droplet Ejector using MEMS,” Proceeding of the 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp. 877-881 (2006).
Kang, D. H., Kim, K. W., Lee, S. Y., Kim, Y. H., and Gil, S. K., “Influencing factors on the pyroelectric properties of Pb(Zr,Ti)O3 thin film for uncooled infrared detector,” Materials Chemistry and Physics, Vol. 90, No. 2-3, pp. 411-416 (2005).
Li, T., Zawadzki, P., Stall, R. A., and Kroll, W. J., “Ferroelectric PbZr1-xTixO3 Thin Films Made by Various Metalorganic Chemical Vapor Deposition Techniques,” SPIE, Vol. 3008, pp. 359-364 (1997).
Lovelady, K. T. and Toye, L. F., “Liquid Drop Emitter,” Publication No. 4308547 of US patent (1981).
Pandey, S. K., James, A. R., Prakash, C., Goel, T. C., and Zimik, K., “Electrical properties of PZT thin films grown by sol-gel and PLD using a seed layer,” Materials Science & Engineering B, Vol. 112, pp. 96-100 (2004).
Sleva, M. Z. and Hunt, W. D., “Design and construction of a PVDF fresnel lens,” 1990 Ultrasonics Symposium Proceedings (1990).
Tsuchiya, K., Kitagawa, T., and Nakamachi, E., “Study for piezoelectricity characterization of PZT actuators deposited by RF magnetron sputtering for MEMS,” Proc. Of SPIE, Vol. 4936, pp. 225-233 (2002).
Wang, Y., “Switch-mode ultrasound wave RF burst emission circuit,” 1993 acoustic sensing and image, pp. 172-177 (1993).
Wood, R. W., and Loomis, A. L., “The Physical and Biological Effects of High-Frequency Sound-Waves of Great Intensity,” Philosophical Magazine, Ser. 7, Vol. 4, No. 22, pp. 417-436 (1927).
Xiao, H., Introduction to Semiconductor Manufacturing Technology, Prentice Hall, New Jersy (2001).
Xing, F., Dong, B., and Li, Z., “Impedance spectroscopic studies of cement-based piezoelectric ceramic composites,” Composites Science and Technology, Vol. 68, No. 12, pp. 2456-2460 (2008).
白明憲，「聲學理論與應用」，全華科技圖書，ISBN 9572125311 (1999)。
李幸峰、余志成，「壓電薄膜加速度微感測元件之製程規劃與研究」，中國機械工程學會第十八屆全國學術研討會，新興工程技術論文集，第 1-9 頁 (2001)。
周卓明，「壓電力學」，全華科技圖書，ISBN 9572142402 (2003)。
殷孟雲，「噴墨印表機設計原理」，全華科技圖書，ISBN 9572134280 (2001)。
鄭士康，「電磁波」，全華科技圖書，ISBN 9572153552 (2006)。
指導教授 潘敏俊(Min-Chun Pan) 審核日期 2009-7-29 推文 plurk
funp
live
udn
HD
myshare
netvibes
friend
youpush
delicious
baidu
網路書籤 Google bookmarks
del.icio.us
hemidemi
facebook
twitter
google
reddit