週期性銀奈米粒子陣列於折射率感測之應用

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姓名

林芳竹(Fang-chu Lin) 查詢紙本館藏

畢業系所

材料科學與工程研究所

論文名稱

週期性銀奈米粒子陣列於折射率感測之應用
(Refractive index chemical sensing with periodic silver nanoparticle arrays)

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摘要(中)

為了探討金屬奈米粒子尺寸變化對環境折射率敏感度之影響，我們以陽極氧化鋁模
板製作不同尺寸之金屬奈米粒子，相對於傳統的微影製程，陽極氧化鋁模板製作方式較為簡便且花費較少，並提供了一個相當大的尺寸範圍。
本研究以1.08 vol. % 磷酸為電解液對鋁片施以185 伏特之偏壓進行陽極處理，以得到具週期性孔洞之陽極氧化鋁模板，其孔洞直徑約為110 nm, 孔洞間距約為470 nm，另外，可藉由化學蝕刻方式將孔洞直徑從110 nm 擴大至360 nm。我們利用不同孔洞直徑之陽極氧化鋁模板製作出週期性皆為470 nm，直徑分別為105, 187 及274 nm 以及高度為48, 100 及176 nm 的銀奈米粒子陣列，並對其光學性質的變化進行探討。隨著銀奈米粒子直徑的增加，表面電漿波長位置會有紅位移的現象，而高度增加則會出現藍位移現象。
在折射率敏感度的量測上可發現銀奈米粒子的直徑變化幾乎對折射率敏感度不具影響，而在直徑相同時，高度越小則具有較佳的折射率敏感度。另外在銀粒子直徑為187nm，高為176 nm 時的兩種共振波，dipole 與quadrupole 共振波，對於折射率敏感度並不相同，分別為252 nm/RIU 及354 nm/RIU，可發現在我們系統中quadrupole 共振波擁有較好的折射率敏感度，且相對於粒子直徑為187 nm，高為48 nm 的折射率敏感度 (321nm/RIU)，雖然高度變高時dipole 共振波的折射率敏感度變差，但quadrupole 共振波的出現提供了一個比dipole 共振波更為靈敏的感測波。

摘要(英)

To characterize the index sensitivities of Ag nanoparticles of various sizes, we fabricate periodic silver nanoparticle arrays on glass substrate with different size. Compared with
e-beam lithography, anodic aluminum oxide lithography is a low cost and simple method. In this study, anodic aluminum oxide which has 110 nm pore diameter and 470 nm interpore distance was prepared in 1.08 vol. % phosphoric acid solution at 185 V. Moreover, pore diameter can be widened by chemical etching. Periodic silver nanoparticle arrays with
different diameter (105, 187, 274 nm) and height (48, 100, 176 nm) were prepared by vapor deposition using anodic aluminum oxide template as a mask.
The optical properties of such silver arrays were examined, Their surface plasmon resonance peaks generally red-shift as the diameter of silver particles is increased, on the other hand, their surface plasmon resonance peaks generally blue-shift as the height of silver particles is increased. While the periodic silver nanoparticle arrays with 187 nm diameter and 180 nm, the electric field leading to plasmon mode hybridization with the appearance of two new bands: dipole resonance and quadrupolar. The refractive index sensitivity of periodic silver nanoparticle arrays shows that the diameter only have a weak effect within the investigated range (105-274 nm), but as the height of silver particles is 48 nm has a better refractive index sensitivity than 180 nm. We found that quadrupole resonance has the best refractive index sensitivity (354 nm), it is due to dipole near the substrate and quadrupolar away from the substrate.

關鍵字(中)

★ 週期性銀奈米粒子陣列
★ 陽極氧化鋁微影
★ 折射率敏感度

關鍵字(英)

★ Periodic silver nanoparticle arrays
★ anodic aluminum oxide lithography
★ refractive index sensitivity

論文目次

目錄
摘要.............................................................................................................................................i
Abstract .....................................................................................................................................ii
致謝...........................................................................................................................................iii
目錄...........................................................................................................................................iv
圖目錄.......................................................................................................................................vi
表目綠.....................................................................................................................................viii
第一章緒論................................................................................................................................1
1-1 前言.............................................................................................................................1
第二章文獻回顧與基礎理論....................................................................................................3
2-1 金屬膜表面電漿子共振原理.....................................................................................3
2-2 金屬奈米粒子侷域性表面電漿共振現象.................................................................4
2-3 金屬奈米粒子之製備..................................................................................................5
2-3-1 自組裝單分子層(Self-assembly monolayer)..................................................6
2-3-2 奈米球微影 (Nanosphere lithography ) ..........................................................7
2-3-3 奈米壓印微影 (Nanoimprint lithography)....................................................10
2-3-3 陽極氧化鋁微影 (Anodic aluminum oxidelithography)............................... 11
2.4 金屬奈米粒子侷域表面電漿子共振特性於感測器之應用...................................12
2-5 陽極氧化鋁................................................................................................................13
2-5-1 陽極氧化鋁成長機制 ....................................................................................14
2-5-2 影響陽極氧化鋁成長之參數 ........................................................................16
第三章實驗流程及研究方法..................................................................................................19
3-1 實驗流程...................................................................................................................19
3-2 實驗藥品及材料.......................................................................................................19
3-3 實驗設備...................................................................................................................20
3-4 實驗步驟...................................................................................................................20
3-4-1 陽極氧化鋁模板之製備 ................................................................................20
3-2-2 週期性銀奈米粒子之製備 ...........................................................................23
3-2-3 週期性銀奈米粒子之光學性質量測 ...........................................................23
3-2-4 以靜電球體理論預測表面電漿共振波長之位置 .......................................24
第四章結果與討論..................................................................................................................25
4-1 陽極氧化鋁模板........................................................................................................25
4-1-1 擴孔時間與孔洞直徑 ...................................................................................25
4-2 銀奈米陣列於基板的沉積........................................................................................26
4-2-1 不同直徑之銀奈米粒子陣列 ........................................................................26
4-2-2 不同厚度之銀奈米粒子陣列 .......................................................................28
4-3 銀奈米粒子陣列之光學性質....................................................................................29
4-3-1 不同直徑之銀奈米粒子陣列 .......................................................................29
4-3-2 不同高度之銀奈米粒子陣列 .......................................................................30v
4-4 1 銀奈米粒子陣列之折射率敏感度........................................................................31
4-3-1 不同直徑之銀奈米粒子陣列 .......................................................................31
4-3-2 不同高度之銀奈米粒子陣列 .......................................................................33
第五章結論..............................................................................................................................37
參考文獻..................................................................................................................................38

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指導教授

陳一塵(I-chen Chen)

審核日期

2014-8-25

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