設計、製作與量測具二維掃描功能之微機電內視鏡頭

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姓名

陳景宜(Jingyi Chen) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

設計、製作與量測具二維掃描功能之微機電內視鏡頭
(Design, Fabrication and Testing of a Two-axis MEMS Scanner of OCT Endoscope)

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摘要(中)

本論文設計並展示了一個嶄新的二維透鏡掃描系統，以作為光學同調斷層術的內視鏡頭之用。基本上初始版本的掃描系統包含三個主要部份：橫向運動驅動器，縱向運動驅動器與收光耦合光纖。利用微機電製程技術，我們在SOI基板上製作梳狀結構作為驅動器的基本設計。之後，我們將兩顆相同的非球面玻璃透鏡置放於驅動器的框架上成為掃描透鏡組，以作為日後光學同調斷層術所需的循序掃描功能。在位移正負50 um的範圍內，掃描角度最大可達5度。而聚光光點最小可以達1.6 um，整個循序掃描的面積為150 um x 150 um。由此可得知，此系統具備相當良好的光學及機械特性。在未來可以廣泛應用於前視型光學同調斷層術之內視鏡頭。

摘要(英)

In this thesis, a new two-axis lens scanning system as an optical coherence tomography endoscope is presented. Basically, the system consisted of three main parts in initial design: a lateral motion actuator, a vertical motion actuator and a collimator fiber. By using MEMS technology, the comb fingers structure on SOI wafer was took as a basic actuator. Then two same aspherical glass lenses were mounted on each frame of actuators as a pair for raster scanning in optical coherence tomography based endoscopic imaging. The maximum scanning angle is ± 5° at the lens displacement of ± 50 μm and the minimum beam spot size is 1.6 μm. The size of raster scanned image is 150 μm x 150 μm. The scanning characterization as well as the optical and mechanical designs of MEMS scanners is included. This new two-axis MEMS lens scanner is very functional for developing forward OCT imaging system capable of fitting in an endoscopic capsule.

關鍵字(中)

★ 光學同調斷層影像
★ 內視鏡
★ 微機電
★ 掃描探針

關鍵字(英)

★ Endoscope
★ MEMS
★ Sc
★ OCT
★ Optical Coherence Tomography

論文目次

摘要 i
Abstract ii
Acknowledgements iii
Table of Contents iv
List of Figures vi
Chapter 1:Introduction to the thesis 1
1.1 Motivation 1
1.2 Scope of the thesis 4
Chapter 2:Optical Coherence Tomography 5
2.1 Introduction 5
2.2 Coherence 6
2.3 Interference 6
Chapter 3:MEMS Devices 11
3.1 Introduction 11
3.2 Scanning probe nanolithography 11
3.2.1 Surface micromachining 11
3.2.2 Scanning probe nanolithography 12
3.2.3 Simulation results 14
3.2.4 Fabrication Process 15
3.3 Variable Optical Attenuator 18
3.3.1 Introduction 18
3.3.2. Principle and chip fabrication 19
3.3.3 Experimental Results 20
3.3.4 Conclusion 20
Chapter 4:2D MEMS Lens Scanner for OCT endoscope 21
4.1 Introduction 21
4.2 Optical Design of 2D Lens Scanner 21
4.3 Mechanical Design of 2D Lens Scanner 22
Chapter 5:Fabrication, Integration and Package 24
5.1 Micoractuator fabrication 24
5.2 Lenses integration 25
5.3 Device package with a print circuit board 26
Chapter 6: Static and Dynamic Testing 27
6.1 Optical characterizations 27
6.2 Mechanical characterizations 28
Chapter 7: Discussion and Conclusion 30
Reference 44
Publication lists 47

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指導教授

紀國鐘(G. C. Chi)

審核日期

2009-7-10

推文