| 參考文獻 |
參考文獻
[1] M. A. Bourouha, M. Bataineh, and M. Guizani, “Advances in Optical Switching and Networking: Past, Present, and Future”, Proceedings IEEE Southeast Conference, p.405-413 (2002)
[2] A. Kar-Roy, and C. S. Tsai, “8 x 8 Symmetric Nonblocking Integrated Acoustooptic Space Switch Module on LiNbO3” IEEE Photonics Technology Letters, Vol.4 (1992)
[3] J.E. Fouquet, S. Venkatesh, M. Troll, D. Chen, H.F. Wong, and P.W. Barth, “A Compact, Scalable Cross-Connect Switch Using Total Internal Reflection Due to Thermally-Generated Bubbles” IEEE, p.169-170 (1998)
[4] I.G. Manolis, T.D. Wilkinson, M.M. Redmond, and W.A. Crossland, “Reconfigurable Multilevel Phase Holograms for Optical Switches” IEEE Photonics Technology Letters, Vol.14 (2002)
[5] S. Sumriddetchkajorn, D. K. Sengupta, and N. A. Riza, “Self-Aligning 2 x 2 Fiber-Optic Switch Using Liquid Crystals” IEEE, p.135-136 (1999)
[6] D. I. Halliday, and A. Agarwal, “The Theoretical and Experimental Behavior of a Thermooptic Bulk Deflector Fiber-optic Circuit Switch” Journal of Lightwave Technology, Vol. LT-5, (1987)
[7] P. D. Dobbelaere, K. Falta, L. Fan, S. Gloeckner, and S. Patra, “Digital MEMS for Optical Switching” IEEE Communications Magazine, p.88-95 (2002)
[8] R. T. Chen, H. Nguyen, and M. C. Wu, “A High-Speed Low-Voltage Stress-Induced Micromachined 2 x 2 Optical Switch” IEEE Photonics Technology Letters, Vol. 11, (1999)
[9] J. Li, Q. X. Zhang, A.Q. Liu, W.D. Zhong, and C. Lu, “MEMS switch based serial reconfigurable OADM” Optics Communications, Vol.230, p.81-89 (2004)
[10] W. H. Juan, and S. W. Pang, “High-Aspect-Ratio Si Vertical Micromirror Arrays for Optical Switching” Journal of Microelectromechanical systems, Vol. 7 (1998)
[11] R. A. Miller, Y. C. Tai, G. Xu, J. Bartha, and F. Lin, “An Electromagnetic MEMS 2 x 2 Fiber Optic Bypass Switch” International Conference on Solid-State Sensors and Actuators, p.89-92 (1997)
[12] T. Matsuura, T. Fukami, M. Chabloz, Y. Sakai, S. I. Izuo, A. Uemura, S. I. Kaneko, K. Tsutsumi, and K. Hamanaka, “Silicon micro optical switching device with an electromagnetically operated cantilever” Sensors and Actuators, Vol.83, p.220-224 (2000)
[13] S. S. Lee, E. Motamedi, and M. C. Wu, “Surface Micromachined Free Space Fiber Optic Switches with Integrated Microactuators for Optical Fiber Communication Systems” International Coference on Solid-State Sensors and Actuators, p.85-88 (1997)
[14] S. S. Lee, L. S. Huang, C. J. Kim, and M. C. Wu, “Free-Space Fiber-Optic Switches Based on MEMS Vertical Torsion Mirrors” Journal of Lightwave Technology, Vol. 17, (1999)
[15] A. A. Yasseen, J. N. Mitchell, J. F. Klemic, D. A. Smith, and M. Mehgregany, “ A Rotary Electrostatic Micromotor 1x8 Optical Switch”, IEEE Journal of Selected Toptics in Quantum Electronics, Vol.5, (1999)
[16] V. A. Aksyuk et al. “Lucent Microstar Micromirror Array Technology for Large Optical Crossconnects,” Proceeding SPIE, Vol. 4178 (2000)
[17] W. S. Rockward, and D. C. O’Shea, “Crossed phase gratins with diffractive optical elements”, Applied Optics, Vol. 37 (1998)
[18] D. C. O’Shea, and W. S. Rockward, ‘Light modulation from crossed phase gratings’, Optics Letters, Vol. 23 (1998)
[19] M.C. Carrozza, P. Dario, B. Hannaford, and A. Menciassi, “4-axis
electromagnetic microgripper,” Robotics and Automation Proceedings, Vol.4, pp 2899 –2904 (1999)
[20] M. C. Carrozza, A. Menciassi, and P. Dario, “The development of a LIGA-microfabricated gripper for micromanipulation tasks,” Journal of Micromechnics and Microengineering, Vol.8, pp.141-143 (1998).
[21] H. Du, C. Su, M. K. Lim. and W. L. Jin, “A micromachined thermally-driven gripper: a numerical and experimental study,” Smart Material Structure, Vol.8, pp 616-622, (1999).
[22] M. Kohl, E. Just, W. Pfleging, S. Miyazaki, “SMA microgripper with integrated antagonism,” Sensors and Actuators, Vol.83, pp208-213, (2000).
[23] P. B. Chu and S. J. Pister, “Analysis of closed-loop control of parallel-plate electrostatic microgrippers ,” Robotics and Automation, Proceedings, San Diego, CA, Vol.1, pp 820 -825, (1994).
[24] W. C. Tang, T. C. Nguyen, and R. T. Howe, “Laterally Driven Polysilicon Resonant Microstructures”, Micro Electro Mechanical Systems, Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'. IEEE, p.53-59(1989)
[25] Y. P. Ho, P. T. Liu, C. C. Lo, and H. Y. Lin, “SMart Design Handbook V3.0”, Walsin Lihwa Corp. MEMS Business Unit(2003)
[26] 莊達人,”VLSI製造技術”, 高立圖書有限公司(2002)
[27] M. Sekimoto, H.Yoshihara, and T. Ohkubo, “Silicon Nitride Single-layer x-ray mask”, Journal of Vacuum and Science Technology, Vol.21, 1017-1021(1982)
[28] J.Y. Kim, and C. J. Kim,”Comparative study of various release methods for polysilicon surface micromachining”, Micro Electro Mechanical Systems, MEMS '97, Proceedings, IEEE., Tenth Annual International Workshop (1997)
[29] Y. Fukuta, H. Fujita, and H. Toshiyoshi, “Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware”, Journal of Applied Physics, Vol.42, p.3690-3694 (2003) |
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