S型彎曲波導與微米小球共振腔之光耦合效率研究

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姓名

江信東(Hsin-Tung Chiang) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

S型彎曲波導與微米小球共振腔之光耦合效率研究

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摘要(中)

本論文提出一種新的共振器耦合器結構，主要利用S型彎曲波導所造成的彎曲損失將能量耦合進入微米小球共振腔，此結構可積體化構裝於Si晶片上具有較佳的機械強度等優點。
在實驗模擬上我們得到與微米小球的耦合效率最高可達35%以上，而實驗的量測上，S型彎曲波導在彎曲半徑為1500微米且彎曲角度為41度時的彎曲損失約為13dB/cm，而在角度為40度時彎曲損失開始明顯上升的趨勢，與利用光束傳播法模擬所得之結果吻合。

摘要(英)

We have designed and fabricated an S-bend waveguide structure which enables one to excite the Whispering Gallery Modes (WGMs) in microspheres. The highest coupling efficiency found is estimated to be about 35%, and the designed structure has high position and wavelength tolerance. By misplacing the microsphere by 15um only results in 6% coupling efficiency degradation; while 10nm wavelength drift results in 3dB/cm coupling efficiency degradation.
Preliminary experimental result shows that the design is in close agreement with the simulation using beam propagation method (BPM). II

關鍵字(中)

★ S型彎曲波導
★ 彎曲損失
★ 光束傳播法
★ 微米小球
★ 保角轉換

關鍵字(英)

★ microsphere
★ conformal transformation
★ WGMs
★ bending loss
★ BPM
★ Bending waveguide

論文目次

第一章導論
1.1 前言 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧1
1.2 微米小球共振腔耦合器簡介 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧2
1.3 研究動機與目標 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧5
第二章原理
2.1 彎曲波導 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧8
2.2 波導彎曲損失分析 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧13
2.3 球型共振腔模態分析 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧17
2.4 光束傳播法(Beam Propagation Method) ‧‧‧‧‧‧‧‧‧22
第三章元件設計架構與模擬結果分析
3.1 元件設計架構 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧27
3.2 模擬與分析 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧30
第四章元件製作、量測與結果分析
4.1 製作流程 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧38
4.2 波導損失量測與結果分析 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧43
第五章結論與未來努力方向 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧50
參考文獻 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧52
附錄一 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧57
著作列表 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧58

參考文獻

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指導教授

戴朝義(Chao-Yi Tai)

審核日期

2007-1-19

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