自我複製結構膜光學性質之研究

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姓名

葉渝雯(Yu-Wen Yeh) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

自我複製結構膜光學性質之研究
(Research on the Optical Properties of Structural Films Using Autocloning Technique)

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摘要(中)

本篇論文主要探討自我複製技術(autocloning technique)週期性結構膜(periodic structural films)的表面結構形成模擬，以及利用等效折射率(effective refractive index)的計算與向量繞射理論(vector diffraction theory)為基礎來模擬單層與多層週期性結構膜的反射率(reflectance)之光學特性。
其中，以自我複製技術製作週期性結構膜是利用電子束蒸鍍(E-beam gun evaporation)與離子源助鍍(ion-assisted deposition)高低折射率材料Ta2O5與SiO2於週期性矽基板上，維持週期性表面的結構，形成鋸齒狀表面結構的二維光子晶體(photonic crystal)，而表面鋸齒狀結構形成的變化，我們利用蝕刻與再沉積技術的模擬方法(simulation method for etching and redeposition technologies)來觀察並模擬單層週期性結構膜(adjusting layer)表面曲線的變化，用來調整控制自我複製技術週期性結構膜的表面結構，得到我們所預期的單層週期性結構膜。
由於電磁波在週期性結構膜傳遞時，具有複雜的干涉與色散現象，以及特殊的光子能隙現象，本研究以向量繞射理論為基礎的嚴格耦合波分析(rigorous coupled-wave analysis; RCWA)以及等效折射率(effective refractive index)計算方法來分析電磁波在週期性結構層膜的傳遞現象與其光學特性。

摘要(英)

In this paper, one of the main researches is the mechanism of the periodic structural films using autocloning technique. And the other one is the theoretical analysis of the optical properties of the single-layer and multilayer structural films based on the calculation of the effective refractive index and the vector diffraction theory.
Autocloning technique is one of the fabrication methods to produce the photonic crystals and periodic structural films. The process began with the periodic corrugation pattern on a substrate. We fabricated the photonic crystals after the deposition of stacks by using an E-beam gun evaporation with ion-assisted deposition on the periodic corrugation patterns of substrates. Two kinds of dielectric films, such as Ta2O5 and SiO2, are stacked alternately on the substrate by thin-film deposition and sputter etching to form a zigzag multilayer coating. The surface evolution of the first layer, adjusting layer, depended on the etching and redeposition effects. The numerical simulation of the etching and redeposition processes was used to regulate and control the shape of the adjusting layer of the photonic crystals.
There are some complicated interference and dispersion phenomena when an electromagnetic wave propagates through the media with periodic structural films. And the particular photonic band gap is observed simultaneously. In our research, we use the rigorous coupled-wave analysis which is based on the vector diffraction theory and the model of the effective refractive index to analyze the optical properties of the autocloning structural films.

關鍵字(中)

★ 自我複製
★ 嚴格耦合波分析
★ 等效折射率

關鍵字(英)

★ rigorous coupled-wave analysis
★ autocloning
★ effective refractive index

論文目次

目錄
摘要 I
ABSTRACT II
圖目錄 V
表目錄 VII
第一章緒論 1
1-1 研究目的 1
1-2 本文架構 6
第二章自我複製結構膜的光學性質模擬之理論 8
2-1 週期性結構膜的成膜機制理論 8
2-1-1 蝕刻作用於結構膜表面之機制 9
2-1-2 沉積作用於結構膜表面之機制 11
2-2 光學性質模擬之理論 16
2-2-1 Clausius-Mossotti關係式 16
2-2-2 等效介質理論(effective-medium theory) 18
2-2-3 嚴格耦合波分析 19
第三章實驗儀器與架構 24
3-1 自我複製結構多層膜的鍍製 24
3-2 量測儀器 25
第四章實驗結果與模擬分析 28
4-1 週期性結構膜的成膜機制模擬分析 28
4-1-1 蝕刻作用於結構膜表面之模擬分析 28
4-1-2 沉積作用於結構膜表面之模擬分析 36
4-2 週期性結構膜的光學性質之模擬 40
4-2-1 週期性矽基板的光學性質模擬 41
4-2-2 週期性單層結構膜的光學性質模擬 48
4-2-3 週期性多層結構膜的光學性質模擬 58
第五章結論 62
CONCLUSION 63
第六章未來工作 64
參考資料 65

參考文獻

參考資料
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指導教授

李正中、陳昇暉
(Cheng-Chung Lee、Sheng-Hui Chen)

審核日期

2008-7-16

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