磁控濺鍍法製備砷化鎵薄膜之研究

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姓名

林楚健(Chu-Jian Lin) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

磁控濺鍍法製備砷化鎵薄膜之研究
(Investigation of Gallium Arsenide Thin Films deposited by RF Sputtering)

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摘要(中)

III-V族高效率太陽能電池為目前發展的主流之一，克服成本、大面積化、高效率為努力方向，本實驗主要以濺鍍磊晶砷化鎵薄膜於鍺晶圓上降低其製程成本，第一部分中藉由調整濺鍍功率由低功率至高功率下與基板溫度由室溫與加熱至高溫下對於砷化鎵薄膜製程影響；第二部分則是將砷化鎵薄膜放入真空爐管系統中進行熱退火製程改善其薄膜品質，並探討改變熱退火溫度對其影響。
實驗中最後成製程結晶砷化鎵薄膜，藉由熱退火優化使其薄膜中非晶比例大幅下降，本實驗中討論將使用到XRD(X射線繞射光譜)、Raman(拉曼光譜)討論薄膜磊晶的結果，AFM(原子力顯微鏡)瞭解濺鍍磊晶薄膜表面粗糙度品質、光譜儀討論光學特性與TEM(穿透式電子顯微鏡)來解釋薄膜結晶結果。

摘要(英)

In this study the Gallium Arsenide thin films deposited on the Germanium wafer by using sputtering method was discussed. The advantage of sputtering method was its lower costs and nontoxic process. Firstly, the properties of the Gallium Arsenide films were analyzed with varied RF power and the substrate temperature processed .Then , the annealing were developed to optimize the Gallium Arsenide film quality . XRD , Raman , AFM and TEM to analyze the results of grown the Gallium Arsenide thin films to achieve a good crystallize GaAs film .

關鍵字(中)

★ 濺鍍
★ 砷化鎵
★ 薄膜

關鍵字(英)

★ sputter
★ Gallium Arsenide
★ Film

論文目次

目錄
摘要...............................................................................................................................vi
Abstract........................................................................................................................vii
致謝............................................................................................................................ viii
目錄...............................................................................................................................ix
圖目錄..........................................................................................................................xii
表目錄.........................................................................................................................xiv
第一章緒論..................................................................................................................1
1-1 前言................................................................................................................1
1-2 研究動機與目的 ............................................................................................4
1-3 論文架構........................................................................................................6
第二章文獻回顧..........................................................................................................7
2-1 砷化鎵材料特性與應用................................................................................7
2-2 常見砷化鎵薄膜製程與比較.......................................................................10
2-3 相關砷化鎵磊晶薄膜文獻...........................................................................11
2-4 實驗流程簡介 ...............................................................................................14
第三章實驗設備 & 分析工具 ................................................................................15
3-1 濺鍍設備 (RF Sputtering)..........................................................................15
3-2 X 射線繞射儀 ( X-Ray Diffraction , XRD )..............................................18
3-3 二維 X 光射線繞射儀 (2D-XRD)...............................................................20
3-4 拉曼光譜儀 (Raman scattering) ................................................................21
3-5 熱退火製程...................................................................................................23
x
3-6 砷化鎵濺鍍磊晶流程..................................................................................24
第四章砷化鎵薄膜濺鍍磊晶與分析........................................................................25
4-1 改變濺鍍功率 ...............................................................................................25
4-1-1 Raman 量測結果與分析 ..........................................................................26
4-1-2 XRD 量測結果與討論 ..............................................................................30
4-1-3 2D-XRD 量測結果與討論........................................................................31
4-1-4 表面粗糙度結果與分析............................................................................35
4-1-5 UV 反射光譜分析與討論.........................................................................37
4-1-6 TEM 量測結果與分析..............................................................................39
4-1-7 改變濺鍍功率結果討論...........................................................................40
4-2 改變基板溫度對砷化鎵磊晶的影響..........................................................42
4-2-1 Raman 量測結果與分析 ..........................................................................43
4-2-2 2D-XRD 量測與分析................................................................................45
4-2-3 AFM 量測結果與分析..............................................................................49
4-2-4 UV 反射功率分析與討論.........................................................................51
4-2-5 改變基板溫度結論....................................................................................52
第五章熱退火優化砷化鎵薄膜................................................................................54
5-1 熱退火實驗流程 ..........................................................................................54
5-2 不同溫度熱退火對薄膜影響......................................................................55
5-2-1 Raman 量測結果與分析 ..........................................................................56
5-2-2 2D-XRD 量測結果與分析........................................................................59
5-2-3 AFM 量測結果與分析..............................................................................63
5-2-4 UV 反射光譜量測與分析.........................................................................65
5-2-5 改變熱退火溫度結果與討論...................................................................67
第六章結論與未來工作............................................................................................69
xi
6-1 結論..............................................................................................................69
6-2 未來工作......................................................................................................70
參考文獻......................................................................................................................71

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指導教授

陳昇暉、曹昭陽(Sheng-Hui Chen Chao-Yang Tsao)

審核日期

2016-7-27

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