| 摘要(英) |
If the optical system includes a plurality of apertures, and the test surface cannot be perfect imaging on the detector. Therefore, the aberration wave front will continue propagating and changing its wave front shape by aperture diffraction effect at the same time. In order to measure the test surface quality, there is always a Field Lens placed in front of the sensor to relay the test beam. The Field Lens is not perfect, thus additional aberrations and measurement uncertainties will be introduce into the system.
To investigate the necessity for the Field Lens to the measurement system, and the system is able to quantify the effect of diffraction measurement uncertainty. We construct a wave front propagation model affected by aperture diffraction. By the wave optics theory to explore phase edge diffraction effect by the system stop. The beginning of the analysis of phase function of optical system in the field of Fourier optics and this phase function is also calling the imaging aberrations. Firstly, the experiment is by mean of the angular spectrum method so that the measured transfer function to the observation plane can be obtain, and calculates the phase variation of the diffraction wave front. To quantify difference between the ray optics and wave optics predicted aberrations. We simulated the lenses with different f-number then compare the results with finite raytracing method.
In this thesis, we simulate a Shack Hartmann wave front sensor that is free of Field Lens and investigate the impact of edge diffraction error. Simulated the number of lenses, compared the results with commercial Code V software, and analyzed the simulator performance. |
| 參考文獻 |
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