奈米矽晶片於葡萄糖電化學檢測分析研究與電極應用

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姓名

高宗民(Tsung-Min Gao) 查詢紙本館藏

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能源工程研究所

論文名稱

奈米矽晶片於葡萄糖電化學檢測分析研究與電極應用

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摘要(中)

近年來生物感測器(biosensor)的應用越來越多，舉凡食品工業、環境監控與醫療保健都有其應用的例子，生物感測器有許多種檢測方式，而其中電化學分析(electrochemistry)因為有高靈敏度與良好的準確率等優勢，是最常被用來分析檢測的方式，本研究利用奈米矽結構作為電化學分析中工作電極的使用，並結合奈米金粒子用於葡萄糖的檢測，由於奈米金粒子能作為葡萄糖氧化還原反應的觸媒使用，以這個特點取代葡萄糖氧化?使用而製成無?電極，減少了氧化?活性影響電極壽命的限制，並且由於奈米矽結構擁有高表面積的特性，可以提高葡萄糖氧化還原反應的反應面積，藉此提升檢測分析的靈敏度。
本研究改變工作電極的製程參數，分析比較參數與檢測效果間的相關性，在結果中得知電極表面結構孔洞越大所能捕捉的奈米金粒子越多，電化學分析結果也越好，而另一方面電極表面的金含量多寡並不完全影響電化學分析結果的好壞，還有電極表面結構與奈米金粒子粒徑等影響因素。
由於無?電極無氧化?活性的限制，在檢測分析應用上較為廣泛，另外電化學分析工作電極欲檢測分析不同分析物時僅須改變反應平台，而奈米矽晶片所擁有的高表面積特性非常適合與不同反應平台結合，本研究將利用這些特點將奈米矽工作電極應用於微流道系統，未來將設計一多分析物連續長時間檢測系統。

摘要(英)

Biosensor is a fully developed technology and used in many subject such as Medicine, Food engineering, and Environmental engineering. There are many detection ways for biosensing. Electrochemistry is the most common way because of the high sensitivity and accurate. In this study we used silicon nanostructure chip (nSi chip) for working electrode in electrochemistry. The high surface area of nSi chip can increase the sensitivity. And used gold nanoparticles (GNPs) for glucose sensing. GNPs can be the catalyst for glucose redox reactions. We used GNPs to replace the glucose oxidase (GOx) and made into non-enzymatic biosensor.
In this study we change the process parameters to change the chip structure and analyze the effect of electrochemistry. We found the pore size of the surface structure and the size of GNPs will affect the electrochemistry result.
Enzymatic sensors have some restrictions because of the enzyme activity but non-enzymatic sensors are not. And nSi chips are good for detect other sample. So we will used the microfluidic system for multi-analytic and long-term detection system.

關鍵字(中)

★ 奈米矽
★ 電化學晶片
★ 葡萄糖感測器

關鍵字(英)

論文目次

目錄
摘要………………………………………………………………………………i
Abstract……………………………………………………………...…………..ii
目錄…………………………………………………………………………..…iv
圖目錄……………………………………………………………………….....vii
表目錄…………………………………………………………………………..xi
第一章簡介…………………………………………………………………….1
1-1生物感測器與葡萄糖感測器發展現況………………………………..1
1-1-1光學………………………………………………………………2
1-1-2光聲技術…………………………………………………………4
1-1-3比色法……………………………………………………………6
1-1-4表面等離子共振…………………………………………………8
1-1-5電化學……………………………………………………………9
1-2多孔矽工作電極………………………………………………………15
1-2-1電極材料………………………………………………………..16
1-2-2多孔金電極……………………………………………………..18
1-2-3多孔矽電極……………………........…………………………..21
1-2-4金粒子工作電極..........................................................................23
1-2-5平面式電極……………………………………………………..31
第二章材料與方法…………………………………………………………...34
2-1實驗設備與材料………………………………………………………34
2-1-1實驗材料與藥品………………………………………………..34
2-1-2實驗設備與分析儀器…………………………………………..35
2-2實驗流程……………………………………………………………....36
2-3工作電極製程…………………………………………………………36
2-3-1前處理…………………………………………………………..37
2-3-2一次沉積………………………………………………………..38
2-3-3金屬輔助蝕刻…………………………………………………..39
2-3-4氧電漿表面處理………………………………………………..41
2-3-5二次沉積………………………………………………………..41
2-3-6晶片保存………………………………………………………..42
2-3-7氧化?電極……………………………………………………..43
2-4電化學分析……………………………………………………………43
2-4-1三極式系統……………………………………………………..43
2-4-2循環伏安法……………………………………………………..45
第三章結果與討論…………………………………………………………...48
3-1金粒子催化機制………………………………………………………48
3-2工作電極接觸角量測…………………………………………………52
3-3晶片製程參數對電化學檢測之影響…………………………………53
3-3-1蝕刻時間對葡萄糖檢測之影響………………………………..53
3-3-2二次沉積時間對葡萄糖檢測之影響…………………………..62
3-3-3沉積金粉克數對葡萄糖檢測之影響…………………………..69
3-4工作電極反應平台……………………………………………………71
3-4-1葡萄糖氧化?電極……………………………………………..72
3-4-2硝酸銀蝕刻製程工作電極……………………………………..73
3-5微流道檢測系統設計…………………………………………………78
3-5-1平面式電極設計………………………………………………..78
3-5-2微流道檢測系統設計…………………………………………..81
第四章結論與未來展望……………………………………………………...84
4-1結論……………………………………………………………………84
4-2未來展望………………………………………………………………85
附錄循環伏安圖……………………………………………………………...86
第五章文獻回顧…………………………………………………………….109

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指導教授

曹嘉文(Chia-Wen Tsao)

審核日期

2017-1-25

推文