超親水電漿聚合薄膜之研究

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姓名

林柏毅(Bo-Yi Lin) 查詢紙本館藏

畢業系所

光機電工程研究所

論文名稱

超親水電漿聚合薄膜之研究
(Research of Superhydrophilic film deposited by plasma polymerization)

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摘要(中)

近年來有許多關於表面親疏水特性的研究，其中有一種表面的極端濕潤行為被稱之為超親水特性。當水滴滴在超親水表面上時，其水滴接觸角會小於10°，在此種表面上有利於水滴快速攤平的現象使其具有快速乾燥的優異性能，因此超親水表面具備快速蒸發冷卻、除霧等功能。
在本實驗中所製備之超親水電漿聚合薄膜，使用有機矽烷為製程反應氣體，經由電漿裂解、聚合過程最後沉積於基板上。透過改變製程參數，如陽極電壓，沉積時間等等，使得有機矽烷電漿聚合膜具有超親水特性，並在製程過程中使用光放射光譜儀做動態觀測，在提升陽極電壓情況之參數下，其CN訊號強度上升表示所沉積之薄膜含氮量提升，經水接觸角量測後具有小於10°之超親水特性。經由XPS分析薄膜元素組成比例，其結果為在此參數下之N/Si比例最高表示表面具有最多的含氮官能基，此官能基為有機矽烷電漿聚合薄膜具有超親水特性之主因。
光學特性方面，在玻璃基板上可見光平均穿透率皆大於90.4%，PC塑膠基板皆大於88.9%，具有良好之光學性質。

摘要(英)

In recent years there have been many research of surface hydrophobicity characteristics, in which there is a surface of extreme wet behavior known as super-hydrophilic properties. When the water droplets on the super-hydrophilic surface, the water contact angle is less than 10 °. On this surface is conducive to rapid spread of water so that it has a fast drying of the excellent performance, so super-hydrophilic surface with rapid evaporation cooling, Anti-fog and other functions.
In this research organic silane was used as the process reaction gas, finally organic silane Superhydrophilic thin film deposited on the substrate by plasma polymerization. By changing the process parameters, such as anode voltage, deposition time, etc., making the organic silane plasma polymer film with super-hydrophilic properties, using optical emission spectrometer for dynamic observation in the process. In the case of lifting the anode voltage, the increase in CN signal strength indicates that the nitrogen content of the thin film is increased. The water contact angle is less than 10 ° with super-hydrophilic characteristic measured by the water contact angle. Analysis of membrane element composition ratio by XPS, the results show that the highest N / Si ratio under the high anode voltage parameters indicates that the surface has the most nitrogen-containing functional groups. This functional group is the main reason for the super-hydrophilic properties of organic silane plasma polymer films.
Optical properties, the average visible light transmittance of glass substrates are greater than 90.4%, PC plastic substrates are greater than 88.9%, with good optical properties.

關鍵字(中)

★ 電漿
★ 超親水

關鍵字(英)

★ plasma
★ superhydrophilic

論文目次

摘要 i
Abstract ii
致謝 iv
目錄 vi
圖目錄 ix
表目錄 xi
第一章：緒論 1
1-1 前言 1
1-2 研究動機與目的 2
1-3 研究內容 3
1-4 本文架構 4
第二章：基礎理論與文獻回顧 5
2-1 電漿輔助化學氣相沉積 5
2-1-1 電漿基本原理 5
2-1-2 電漿聚合[12] 8
2-1-3 有機單體碎裂反應 10
2-2 親水性簡介 13
2-2-1 水接觸角 13
2-2-2 親疏水性 16
第三章：實驗方法與實驗儀器設備 17
3-1 實驗方法 17
3-1-1 實驗流程 17
3-1-2 實驗步驟 18
3-2 鍍膜系統 20
3-2-1 實驗有機單體 20
3-2-2 離子源系統 21
3-3 量測與分析之設備儀器 24
3-3-1 接觸角量測儀 24
3-3-2 可見光-近紅外光光譜儀 25
3-3-3 光放射光譜儀(OES) 25
3-3-4 X射線光電子能譜儀 27
3-3-5 原子力顯微鏡原理(AFM) 28
第四章：實驗結果與討論 32
4-1 電漿光譜分析 32
4-2 陽極電壓對有機單體電漿聚合薄膜親水特性之影響 35
4-3 XPS分析 38
4-4 持續性和粗糙度關係 44
4-4-1 鍍製時間和水接觸角維持時間關係 44
4-4-2 粗糙度和水接觸角維持時間關係 46
4-5 光學性質 49
4-6 防霧測試 51
第五章：結論 53
參考文獻 54

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指導教授

郭倩丞、詹佳樺

審核日期

2017-7-27

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