四面體外心模組開發與其在三維半導體元件模擬

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姓名

洪筠荃(Yun -Quan Hong) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

四面體外心模組開發與其在三維半導體元件模擬
(Development of tetrahedron circumcenter element and its applications to 3-D semiconductor device simulation)

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摘要(中)

本論文中，為了使模擬程式能夠更精確於實際製程，我們開發出以外心法四面體等效電路模型，來滿足邊緣效應所造成的誤差。為了實現網格準確度，我們分別對每個節點通入電壓來測試電流密度、特殊電阻及PN二極體進行驗證，與估算值及理論值做比較，驗證無誤後，希望可以開發由四面體模組拼湊成六面體結構，但不幸於直角四面體處外心外露，造成包覆體積重疊引起之誤差，因此在六面體結構為可惜之處，此外我們開發出環狀及球狀結構，希望可以增進建立點數最少三維立體網格。

摘要(英)

In this thesis, in order to obtain an accurate simulation in the production process, we developed the 3-D tetrahedron circumcenter element to correct the error caused by the edge effect. So as to achieve the accuracy of mesh, we tested and verified the result by using the current density, special resistors and p-n diode. We also compared the estimated value with theoretical value to obtain the correct result from verification. We hope that we can develop the tetrahedral after this experiment. Unfortunately, the exposed right angle tetrahedron of circumcenter caused the error of the volume overlap. The hexahedral structure is a pity. Additionally, we developed a circular and spherical structure to obtain a 3-D mesh with a minimum grid points.

關鍵字(中)

★ 四面體
★ 三維半導體
★ 外心模組
★ 元件模擬

關鍵字(英)

論文目次

摘要 I
Abstract II
目錄 III
圖目錄 IV
表目錄 VI
第一章簡介 1
第二章三維網格等效模型分析 3
2.1 二維銳角網格等效模型分析 3
2.2三維四面體網格結構定義 6
2.3 三維連續方程式等效模型建立 16
第三章三維網格四面體網格等效模型驗證 19
3-1 電子流電洞流密度驗證 19
3-2 電阻模擬與驗證 25
3-3 多顆四面體串接成PN之討論 29
第四章四面體網格問題探討與應用 31
4-1直角四面體分析 32
4-2四面體微調之環狀應用與分析 36
4-3 球狀分析與問題探討 39
第五章結論 40
參考文獻 41

參考文獻

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指導教授

蔡曜聰(Yao-Tsung Tsai)

審核日期

2017-7-3

推文