利用角度偏折量測法之成像系統Abbe正弦條件量測

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姓名

詹皓勛(Hao-Xun Zhan) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

利用角度偏折量測法之成像系統Abbe正弦條件量測
(Sine Condition Test by Angular Deflectometry)

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摘要(中)

本篇論文有兩大主題，第一為提出使用線掃描法取代相移法之角度偏折量測法，第二為應用角度偏折量測法於成像系統Abbe正弦條件之量測。
在2015年本實驗室曾提出使用相移法之角度偏折量測法，其使用現成的雷射投影機檢測成像系統之橫向像差，本篇論文則提出以權重重心理論及線掃描的方式取代原本的相移量測，此量測方式以較多的量測時間，解決了前者量測結果誤差受雷射投影機之有限灰階值影響的問題。
本篇論文的第二部分探討成像系統其違反Abbe正弦條件的誤差量，和與物場呈線性之離軸像差，兩者之間的關係，並引入前一部分探討之角度偏折量測法，以角解析度達角秒等級精確度量測物空間及像空間各光線向量，並探討系統之校準誤差和計算之與物場呈線性之離軸像差關係。

摘要(英)

There are two main topics in this paper: the advanced angular deflectometry with line scanning and centroid method and the application of angular deflectometry to the Abbe sine condition test.
In our previous publications, we successfully made a deflectometry measurement using a portable laser projector. In this study, we propose the beam weighting centroid method instead of the phase-shifting method to quantify the angular direction of the testing beam in the tested optics entrance pupil. By projecting the angular sequential lines on the tested optics entrance pupil, the wavefront aberration is reconstructed from two orthogonal direction measurements similarly to the line-scanning deflectometry. Therefore, the limited grayscale problem of the laser projector during the phase-shifting measurement is eliminated. The reconstructed wavefront is proven to yield a more accurate result than the phase-shifting methods at the cost of more image frames and acquisition time.
With the on-axis deflectometry measurement using a laser projector, which is called angular deflectometry, we discuss the relation between the Abbe sine condition violation and the linear field dependent aberrations because of the pupil mapping error of the image system. Then, we apply the angular deflectometry measurement to the sine condition test, which can measure the ray angles in the object and image space with arc-second order precision. Finally, we examine the relation between linear field dependent aberrations and the system misalignment.

關鍵字(中)

★ 光學元件檢測
★ Abbe正弦條件
★ 角度偏折量測法

關鍵字(英)

★ optical testing
★ Abbe sine condition
★ angular deflectometry

論文目次

摘要 I
English Abstract II
Table of Contents III
List of Figures V
List of Tables VIII
1 Introduction 1
1-1 Deflectometry history 1
1-2 Sine condition test history 2
1-3 Research motivation 3
2 Aberration and measurement theory 5
2-1 Focal plane measurement methods and principle 5
2-2 Zernike polynomials and gradient Zernike polynomials 7
2-3 Laser projector system 9
2-4 Gaussian beam propagation 9
2-5 Angular line-scanning deflectometry 11
2-6 Deference between angular and spatial deflectometry 13
2-7 Abbe sine condition and offense against the sine condition 15
2-8 Vector form of the OSC and pupil mapping error 16
2-9 Sine condition test prior art 20
IV
3 Multiple-line-scanning deflectometry experiment 22
3-1 Limited grayscale capability of the laser projector 22
3-2 Elements in the measurement system 24
3-3 Line-scanning measurement process 25
3-4 Building the four-dimensional ray data 27
3-5 Multiple-line-scanning deflectometry 31
3-6 Comparison of the test result with the simulation 34
3-7 Test results of PSD, single LSD and multiple LSD 35
4 Sine condition test experiment 37
4-1 Angular deflectometry system 37
4-2 Measurement processing 38
4-3 Testing result for the misalignment system 46
4-4 CodeV simulation for the misalignment system 49
5 Discussion and summary 56
5-1 Angular line-scanning deflectometry 56
5-2 Sine condition test by angular deflectometry 57
REFERENCE 58

參考文獻

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指導教授

梁肇文(Chao-Wen Liang)

審核日期

2017-8-16

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