表面電漿金微米環之彎曲波導特性研究

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姓名

殷亞群(Ya-Cyun Yin) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

表面電漿金微米環之彎曲波導特性研究

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摘要(中)

在本論文中，我們將電磁波打入滑軌式波導金屬微米環結構，研究如何能使電磁波透過滑軌式彎曲波導，在金屬微米環上激發出最多的表面電漿。

我們提出一種分析方法，能夠得知表面電漿有效的激發條件為何，進而節省製成成本、省去實驗上嘗試錯誤的時間。我們以保角映射法結合亥姆霍茲方程式，計算在不同激發條件下，電磁波在彎曲波導內的等效入射角，得到不同模態電磁波之等效入射角與波導寬關係圖。並利用色散曲線圖去預測表面電漿的共振角。當等效入射角等於表面電漿共振角時，則能在金屬微米環上激發出最多的表面電漿。

對於理論分析結果的準確性，我們使用COMSOL數值分析軟體來做結構模擬，驗證出理論分析的結果具有相當的準確性。本論文的滑軌型波導表面電漿偏極子金微米環結構，其表面電漿共振角在色散曲線的預測下為17.1度，而在我們所提出的分析方法中為17.2度，誤差為0.5%，可有效預測並節省製成上的嘗試時間。

摘要(英)

In this paper, we study the condition to excite the surface plasmon in the pulley-type metallic microring structure. Helmholtz equation is applied to determine the equivalent incidence angle of the curved waveguide with different-order in the TM modes by the conformal transformation method. The surface plasmon excitation angle is confirmed by the finite-element method. The pulley-type metallic microring structure is analyzed for different structures to obtain stronger surface plasmon excitation.

關鍵字(中)

★ 表面電漿
★ 彎曲波導
★ 金屬微米環
★ 保角轉換

關鍵字(英)

★ Surface Plasmon
★ Curved waveguide
★ micro-ring
★ conformal transformation

論文目次

中文摘要 I
Abstract II
致謝 III
圖目錄 List of Figures VII
表目錄 List of Tables XI
第一章緒論 1
1-1前言 1
1-2 積體式表面電漿子共振腔感測器發展回顧 2
1-3 表面電漿偏極子激發架構介紹-稜鏡耦合 6
1-4 波導耦合表面電漿波 9
1-5 研究動機 12
1-6 論文架構 13
1-7 結論 14
第二章基礎理論與分析方法 15
2-1 表面電漿理論 15
2-1-1表面電漿簡介 15
2-1-2 金屬的光學反應 16
2-1-3 金屬介面與介電物質的表面電漿模態 19
2-2 保角轉換理論 25
2-3 COMSOL數值分析方法–有限元素法 31
2-4 結論 34
第三章表面電漿偏極子微米環之設計 35
3-1 滑軌型波導表面電漿偏極子微米環結構設計 35
3-1-1 滑軌型波導表面電漿偏極子微米環之結構說明 35
3-1-2 滑軌型波導表面電漿偏極子微米環之金折射率計算 36
3-1-3 滑軌型波導表面電漿偏極子微米環之波導傳輸條件 38
3-2 滑軌型波導表面電漿偏極子微米環結構優化 45
3-3 結論 50
第四章彎曲波導等效入射角的理論與驗證 51
4-1 彎曲波導等效入射角的理論 51
4-2彎曲波導等效入射角的驗證 57
4-2-1在COMSOL上產生表面電漿 57
4-2-2 對彎曲波導等效入射角理論進行驗證 59
4-3 結論 64
第五章結論與未來工作 65
5-1 本論文總結 65
5-2 未來工作 66
參考文獻 67

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指導教授

陳啟昌(Chii-Chang Chen)

審核日期

2018-7-24

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