| 摘要(英) |
When a problem occurring on a wafer, it can be divided into two kinds of errors, random or systematic. In this study, we use previously proposed boomerang chart to classify the problem of real wafer (WM-811K).
However, with the advancement of technology, wafer size and quantity are also increasing. Therefore, our simulation must also re-create corresponding results in response to increasing size and quantity of wafer. This situation results in the need to simulate more kinds of random defects when constructing the boomerang chart. When the random defects and the size of the wafer increase at the same time, the simulation time of the previous algorithm will increase nonlinearly. In this study, we hope to use MALAB and C language co-simulation to replace the previous algorithm in MATLAB.
This method not only speeds up the construction of the boomerang chart and the classification of the real wafer (WM-811K), but also solves the time accumulation effect of the for loop in MATLAB, making it possible to simulate bigger or larger numbers of wafers. The results can be obtained more quickly and will not be limited by the simulation environment. |
| 參考文獻 |
參考文獻
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[6] 林正田,“Wafer Map Analysis from a Random-Defect-Source Perspective”,碩士論文﹐中央大學﹐2012.
[7] 曾國銓, “A Non-uniformly Distributed Defect Map Analysis by Quantification Model” , 碩士論文﹐中華大學﹐2013
[8] 蕭寶威,“Wafer Map Analysis from Random Distributed Defects”, 碩士論文﹐中央大學﹐2016.
[9] 葉昱緯,“Application of Boomerang Chart to Real-World Mass Production Wafer Maps”, 碩士論文﹐中央大學﹐2016. |
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