P型金屬氧化物與硫化物合金薄膜之研究

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姓名

陳冠宇(Guan-Yu Chen) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

P型金屬氧化物與硫化物合金薄膜之研究
(P-type metal oxide and sulfide alloy film)

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★ 利用火花電漿燒結法製備以矽為基底之奈米材料於熱電特性上之應用研究	★ P型金屬氧化物薄膜的製備應用於軟性電子
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至系統瀏覽論文 ( 永不開放)

摘要(中)

近年來，軟性電子的出現，其具備輕、薄、大面積以及能捲曲等優點，不僅攜帶方便，更能符合人因工程，使得穿戴式電子產品愈來愈普及，而電子元件微型化也變得更為重要，元件朝著輕、薄、透明發展成了一種未來的趨勢，現今常用的透明導電薄膜(如：ITO)仍然存在著一些缺點，開發新的材料成了一項重要的課題。
本論文將著重於p-type氧化鋅靶材的製備及對其薄膜進行探討分析，並同時開發新的p-type導電材料，如(Cu,Zn)S合金靶材，利用冷壓燒結的方式製造其靶材，並對靶材及其薄膜進行量測分析，期望以本實驗之結果對開發新型p-type導電材料做出貢獻。

摘要(英)

In recent years, the emergence of flexible electronics has been accompanied with advantages such as lightness, thinness, large area, and ability to be curled. Flexible electronics is not only portable but also cause to human factors engineering, making wearable electronic products more and more popular and turning the miniaturization of electronic components a lot. It is important that components develop toward light, thin and transparent and become the trend of future. The common transparent conductive films (such as ITO) still have some shortcomings, and the innovation of new materials has become an essential issue.

This study focuses on the preparation of p-type zinc oxide target and thin film as well as the development of other new conductive materials, including (Cu,Zn)S alloy target and thin film. The (Cu,Zn)S alloy target is manufactured by cold-press , and the target and its thin film are measured and analyzed. It is expected that the results of this experiment will serve the new p-type conductive material as the contribution.

關鍵字(中)

★ P型金屬氧化物
★ 硫化物合金
★ 透明導電氧化物薄膜
★ 氧化鋅
★ 硫化鋅
★ 硫化銅

關鍵字(英)

★ P-type metal oxide
★ Sulfide alloy
★ Transparent Conducting Oxide film
★ ZnO
★ ZnS
★ CuS

論文目次

目錄
摘要 i
Abstract ii
致謝 iii
第一章緒論 1
1-1 前言 1
1-2 研究動機 2
第二章理論基礎與實驗方法 3
2-1 氧化鋅摻雜 3
2-2 酸鹼中和與化學共沉澱法 3
2-3 冷壓燒結法 4
2-4 熱壓燒結法 6
2-5 硫化製程 7
第三章實驗流程與實驗儀器介紹 8
3-1 P型氧化鋅靶材製作與鍍膜 8
3-2 (Cu,ZnS)靶材製作與鍍膜 15
3-3 實驗儀器 18
第四章實驗結果分析 27
4-1 P型氧化鋅靶材量測分析 27
4-2 P型氧化鋅濺鍍薄膜量測分析 29
4-3 P型氧化鋅雷射沉積薄膜量測分析 32
4-4 (Cu,Zn)S合金靶材量測分析 33
4-5 (Cu,Zn)S合金濺鍍薄膜量測分析 34
4-6 (Cu,Zn)S合金雷射沉積薄膜量測分析 36
4-7 結論與未來展望 37
參考文獻 39

參考文獻

[1]D. S. Ginley and C. Bright, "Transparent conducting oxides," MRS bulletin, vol. 25, pp. 15-18, 2000.
[2]C. G. Granqvist and A. Hultaker, "Transparent and conducting ITO films: new developments and applications," Thin Solid Films, vol. 411, pp. 1-5, 2002/05/22/ 2002.
[3]B. G. Lewis and D. C. Paine, "Applications and processing of transparent conducting oxides," MRS bulletin, vol. 25, pp. 22-27, 2000.
[4]J. Vossen, "Transparent conducting films," AVS, 1976.
[5]蕭暐翰、邱俊毅、邱國展/工研院材化所. (2014). 透明導電薄膜技術趨勢與應用(上).
[6]K. Baedeker, "Uber die elektrische Leitfahigkeit und die thermoelektrische Kraft einiger Schwermetallverbindungen," Annalen der Physik, vol. 327, pp. 749-766, 1907.
[7]P. S. Patil, "Versatility of chemical spray pyrolysis technique," Materials Chemistry and physics, vol. 59, pp. 185-198, 1999.
[8]K. Minegishi, Y. Koiwai, Y. Kikuchi, K. Yano, M. Kasuga, and A. Shimizu, "Growth of p-type zinc oxide films by chemical vapor deposition," Japanese Journal of Applied Physics, vol. 36, p. L1453, 1997.
[9]B. Reichman and A. J. Bard, "The electrochromic process at WO 3 electrodes prepared by vacuum evaporation and anodic oxidation of W," Journal of The Electrochemical Society, vol. 126, pp. 583-591, 1979.
[10]G. Ayrault, R. S. Averback, and D. N. Seidman, "New approach for the study of transmission sputtering," Scr. Metall.;(United States), vol. 12, 1978.
[11]蔡金津、侯維新. (2008). 國際軟性電子技術最新發展.
[12]I. Hamberg and C. G. Granqvist, "Evaporated Sn?doped In2O3 films: Basic optical properties and applications to energy?efficient windows," Journal of Applied Physics, vol. 60, pp. R123-R160, 1986.
[13]G. Palmer and K. R. Poeppelmeier, "Phase relations, transparency and conductivity in Ga2O3 SnO2 ZnO," Solid state sciences, vol. 4, pp. 317-322, 2002.
[14]黃桂武. (2008). 軟性電子主動元件材料技術發展現況(上).
[15]林偉祺, "水溶液法成長氧化鋅薄膜及其薄膜電晶體製作," 碩士, 工學院碩士在職專班半導體材料與製程設備組, 國立交通大學, 新竹市, 2007.
[16]Y. Okuhara, T. Kato, H. Matsubara, N. Isu, and M. Takata, "Near-infrared reflection from periodically aluminium-doped zinc oxide thin films," Thin Solid Films, vol. 519, pp. 2280-2286, 2011.
[17]R. Das and S. Ray, "Zinc oxide—a transparent, conducting IR-reflector prepared by rf-magnetron sputtering," Journal of Physics D: Applied Physics, vol. 36, p. 152, 2002.
[18]K. Sundaram and A. Khan, "Characterization and optimization of zinc oxide films by rf magnetron sputtering," Thin Solid Films, vol. 295, pp. 87-91, 1997.
[19]J. Mass, P. Bhattacharya, and R. Katiyar, "Effect of high substrate temperature on Al-doped ZnO thin films grown by pulsed laser deposition," Materials Science and Engineering: B, vol. 103, pp. 9-15, 2003.
[20]F. Shan, G. Liu, W. Lee, G. Lee, I. Kim, and B. Shin, "Aging effect and origin of deep-level emission in ZnO thin film deposited by pulsed laser deposition," Applied Physics Letters, vol. 86, p. 221910, 2005.
[21]維基百科編者. (2012-10-17UTC13:06:52+00:00 （UTC）). 氧空位. Available: https://zh.wikipedia.org/w/index.php?title=%E6%B0%A7%E7%A9%BA%E4%BD%8D&oldid=23318005
[22]維基百科編者. (2013-03-17UTC21:44:25+00:00 （UTC）). 間隙缺陷. Available: https://zh.wikipedia.org/w/index.php?title=%E9%96%93%E9%9A%99%E7%BC%BA%E9%99%B7&oldid=25826666
[23]Wikipedia contributors. (17 June 2018 05:58 UTC). Shallow donor. Available: https://en.wikipedia.org/w/index.php?title=Shallow_donor&oldid=808562657
[24]吳金寶/工研院材化所. (2008). AZO透明導電薄膜技術近況發展與應用.
[25]何建志, "摻雜鋁之p-type氧化鋅薄膜特性分析," 碩士, 光電工程系研究所, 國立臺北科技大學, 台北市, 2008.
[26]林鴻明, "奈米材料合成技術," 大同大學工業工程學系,奈米課程材料教材, pp. 1-5, 2003.
[27]光洋應用材料科技股份有限公司. (2008). “粉末冶金”熱壓成形.
[28]蔡岳雲, "二維薄膜及三維塊材Seebeck係數量測," 碩士, 電機工程學系, 國立中央大學, 桃園縣, 2015.
[29]江泰真空. 真空燒結設備. Available: http://www.chinesevacuumcoating.com/Product/show.asp?id=206
[30]陳文斌, "CuInSe2系列硒化薄膜硫化製程及其在太陽電池之應用," 碩士, 材料與光電科學學系研究所, 國立中山大學, 高雄市, 2013.
[31]L. Huang, Y. Liu, and L. Meng, "Pyrite films grown by sulfurizing precursive iron of different crystallizing status," Journal of materials science & technology, vol. 25, p. 237, 2009.
[32]劉修豪, "金屬氧化物製備應用於軟性電子元件," 碩士, 電機工程學系, 國立中央大學, 桃園市, 2016.
[33]X. Xu, J. Bullock, L. T. Schelhas, E. Z. Stutz, J. J. Fonseca, M. Hettick, et al., "Chemical bath deposition of p-type transparent, highly conducting (CuS) x:(ZnS) 1–x nanocomposite thin films and fabrication of Si heterojunction solar cells," Nano letters, vol. 16, pp. 1925-1932, 2016.
[34]吳奇韋, "P型金屬氧化物與硫化物之研究," 碩士, 電機工程學系, 國立中央大學, 桃園縣, 2017.
[35]維基百科編者. (2017-06-14UTC02:46:35+00:00 （UTC）). 球磨機. Available: https://zh.wikipedia.org/w/index.php?title=%E7%90%83%E7%A3%A8%E6%9C%BA&oldid=44758498
[36]P. Sigmund, "Theory of sputtering. I. Sputtering yield of amorphous and polycrystalline targets," Physical review, vol. 184, p. 383, 1969.
[37]維基百科編者. (2018-04-03UTC11:05:29+00:00 （UTC）). 濺射. Available: https://zh.wikipedia.org/w/index.php?title=%E6%BA%85%E5%B0%84&oldid=48956371
[38]胡承維, "E gun機台介紹," 學士, 機械工程學系, 國立台灣大學, 台北市, 2017.
[39]B. Inkson, "Scanning electron microscopy (SEM) and transmission electron microscopy (TEM) for materials characterization," in Materials characterization using nondestructive evaluation (NDE) methods, ed: Elsevier, 2016, pp. 17-43.
[40]維基百科編者. (2018-04-03UTC14:02:43+00:00 （UTC）). 掃描電子顯微鏡. Available: https://zh.wikipedia.org/w/index.php?title=%E6%89%AB%E6%8F%8F%E7%94%B5%E5%AD%90%E6%98%BE%E5%BE%AE%E9%95%9C&oldid=48958674
[41]林麗娟. (1994). “X 光繞射原理及其應用”,工業材料 86 期 p100-p109.
[42]M. M. Can, S. I. Shah, and T. F?rat, "The formation of anomalous Hall effect depending on W atoms in ZnO thin films," Applied Surface Science, vol. 303, pp. 76-83, 2014.
[43]維基百科編者. (2018-06-03UTC16:04:12+00:00 （UTC）). 霍爾效應. Available: https://zh.wikipedia.org/w/index.php?title=%E9%9C%8D%E7%88%BE%E6%95%88%E6%87%89&oldid=49831059
[44]黃俊杰, "鎂矽錫合金熱電特性研究及應用," 碩士, 電機工程學系, 國立中央大學, 桃園縣, 2017.
[45]維基百科編者. (2018-04-27UTC09:19:08+00:00 （UTC）). 透射電子顯微鏡. Available: https://zh.wikipedia.org/w/index.php?title=%E9%80%8F%E5%B0%84%E7%94%B5%E5%AD%90%E6%98%BE%E5%BE%AE%E9%95%9C&oldid=49321532
[46]eaglabs. FIB. Available: http://www.eaglabs.com.tw/fib.html
[47]T. Hirao, M. Furuta, H. Furuta, T. Matsuda, T. Hiramatsu, H. Hokari, et al., "Novel top?gate zinc oxide thin?film transistors (ZnO TFTs) for AMLCDs," Journal of the Society for Information Display, vol. 15, pp. 17-22, 2007.
[48]G. Kaur, A. Mitra, and K. Yadav, "Pulsed laser deposited Al-doped ZnO thin films for optical applications," Progress in Natural Science: Materials International, vol. 25, pp. 12-21, 2015.
[49]A. M. Diamond, L. Corbellini, K. Balasubramaniam, S. Chen, S. Wang, T. S. Matthews, et al., "Copper?alloyed ZnS as ap?type transparent conducting material," physica status solidi (a), vol. 209, pp. 2101-2107, 2012.

指導教授

辛正倫(Cheng-Lun Hsin)

審核日期

2018-7-23

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