氧化鋁奈米模板法製備一維規則準直銅金屬奈米錐及其特性之研究

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姓名

蔡嘉豪(Jia-Hao Cai) 查詢紙本館藏

畢業系所

化學工程與材料工程學系

論文名稱

氧化鋁奈米模板法製備一維規則準直銅金屬奈米錐及其特性之研究

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摘要(中)

陽極氧化鋁由於其具備準直孔洞通道結構，可應用於過濾、抗反射塗層和奈米結構材料的模板等領域，近年來受到廣泛的研究。目前已有多種製造錐狀陽極氧化鋁膜之技術被開發出來，例如：PMMA模板輔助法、離子束光刻法以及模板奈米壓印法等。然而這些製備之步驟繁瑣耗時長、無法製備大面積模板及製備成本昂貴，使得在實際應用上受到很大的限制。為克服相關製程限制，本研究利用單層奈米球陣列微影技術，藉由調控奈米球的直徑和陽極氧化蝕刻、擴孔條件，成功地製備出孔徑和間距可調變之規則有序錐狀陽極氧化鋁奈米模板。此外，銅金屬奈米錐，因其結構具有高準直性與高表面積之優點，被廣泛應用於光電元件、場發射、觸媒催化、水解產氫等領域上，然而如何精準控制所製備一維銅奈米結構之尺寸、形貌、排列週期性等，一直是急需克服的挑戰。因此，本研究也利用上述製程所製備之規則氧化鋁奈米模板進一步結合電化學沉積製程，可在具有導電性的各式基材上製備出一系列準直有序排列且內外徑可調變之一維銅金屬奈米錐陣列。而此所開發之新穎製程技術，相信將可應用於製備其他各式一維金屬或半導體奈米結構陣列。另外由於銅金屬奈米錐的有序排列、高深寬比結構等，具有極低啟動電場的優異電子場發射特性。這裡所提出的新方法將提供在製備一維銅金屬奈米錐陣列結構基電子場發射源有序陣列的能力。

摘要(英)

The anodic aluminum oxide (AAO) have been widely used as templates in nanotechnology. Due to their characteristic continuous, highly ordered pore structures, they have been utilized extensively in the fabrication of nanomaterials leading to various applications, such as separating, antireflection coating, and a template for synthesis of various nanostructures. To fabricate cone-shaped AAO templates with well-ordered nanopore arrays, a variety of patterning techniques have been developed. However, the low processing speed, high-cost, and operational complexity make them challenging to use. In this study, we propose a high throughput and low-cost nanopatterning approach to fabricate thin AAO templates, which is based on the nanosphere lithography with three-step anodization and two-step widen process. The pore diameter and inter-pore spacing can be readily controlled by adjusting the diameter of the nanospheres and the anodic etching conditions. In addition, copper metal nanocones are widely used in optoelectronic devices, field emission, catalyst catalysis and hydrogen evolution reaction due to their well-ordered and high surface area. However, how to accurately control the size, cone-shaped and periodicity of the prepared one-dimensional copper nanostructure has been a challenge. Herein we report a novel way to fabricate high ﬁlling, large-area, and uniform copper metal nanocones arrays by nanosphere lithography combined with electrochemical deposition technology. In addition, the copper metal nanotubes owing to their well-ordered arrangement, high aspect ratio, and hollow structure, exhibit excellent field-emission properties with a very low turn-on field. The obtained results present the exciting prospect that the new approach proposed here will provide the capability to fabricate well-ordered arrays of copper metal nanotubes-based field emitters.

關鍵字(中)

★ 氧化鋁奈米模板
★ 規則準直
★ 奈米錐

關鍵字(英)

論文目次

目錄
第一章前言及文獻回顧 1
1-1 前言 1
1-2一維金屬奈米結構 3
1-2-1一維金屬奈米結構之應用 3
1-2-1 一維金屬奈米結構之製備 3
1-3 場發射電極元件 4
1-3-1 場發射理論 4
1-3-2 場發射應用 5
1-4陽極氧化鋁膜 7
1-4-1陽極氧化鋁膜成長機制 7
1-4-2 陽極氧化鋁膜成長控制變因 8
1-4-3 陽極氧化鋁膜規則化孔洞製程 10
1-5自組裝奈米球微影術 11
1-5-1 奈米球自組裝機制 11
1-5-2奈米球微影術之發展 12
1-5-3奈米球微影術之製備規則有序之奈米結構 12
1-6研究目標及動機 13
第二章實驗步驟及實驗設備 15
2-1 尖錐狀陽極氧化鋁奈米球模板之製程 15
2-1-1 金屬鋁片前處理 15
2-1-2自組裝奈米球陣列模板製備 15
2-1-3氧氣電漿蝕刻均勻調控奈米球模板尺寸 16
2-1-4蒸鍍二氧化矽薄膜 16
2-1-5舉離奈米球模板及製備工作電極 17
2-1-6製備規則有序尖錐狀陽極氧化奈米模板 17
2-2電化學沉積法製備一維銅金屬奈米尖錐陣列 19
2-3 填充聚苯乙烯高分子製備一維奈米結構陣列 19
2-4實驗設備 20
2-4-1電漿蝕刻反應器 20
2-4-2電子槍蒸鍍系統 20
2-4-3陽極氧化鋁膜製備系統 20
2-4-4電化學沉積系統 21
2-5儀器分析實驗 21
2-5-1掃描式電子顯微鏡 21
2-5-2影像式接觸角量測儀 22
第三章結果與討論 23
3-1未定義凹槽之陽極氧化鋁膜製程分析 23
3-2 聚苯乙烯奈米球模板製備 24
3-3製備出具有規則有序之陽極氧化鋁奈米模板 25
3-3-1金屬鋁片上製備奈米球模板結構與分析 26
3-3-2二氧化矽薄膜對於尖錐狀陽極氧化鋁模板之影響 28
3-3-3不同擴孔時間對錐狀陽極氧化鋁模生成之影響 29
3-3-2不同電解液濃度對錐狀陽極氧化鋁模生成之影響 30
3-3-3移除陽極氧化鋁膜阻障層尺寸之製程 31
3-4陽極氧化鋁奈米球模板結合電化學沉積法製備金屬銅奈米錐陣列 33
3-4-1 一維銅金屬奈米錐之結構分析 33
3-4-2一維銅金屬奈米錐成長機制探討 34
3-6一維聚苯乙烯高分子奈米錐陣列 34
3-6-1 一維聚苯乙烯高分子奈米結構陣列之製備 34
3-6-2一維聚苯乙烯高分子奈米結構陣列之水滴接觸角量測 35
第四章結論及未來展望 36
4-1結論 36
4-2未來展望 36
參考文獻 37
圖目錄 42

參考文獻

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指導教授

鄭紹良

審核日期

2020-8-19

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