石墨烯場效應電晶體應用於DNA生醫感測晶片之元件整合和效能評估的研究

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蕭偉傑(Wei-Jie Xiao) 查詢紙本館藏

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能源工程研究所

論文名稱

石墨烯場效應電晶體應用於DNA生醫感測晶片之元件整合和效能評估的研究
(The integration and performance study on DNA biosensor based on the graphene field effect transistor)

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摘要(中)

本研究主要利用化學氣相沉積(CVD)的石墨烯轉印至二氧化矽的基板並利用蒸鍍的方式製作電極，將石墨烯當作場效應電晶體(FET)的通道製成的生醫晶片平台，特色在於簡單的製作方法，並且以無標籤式且實時性的感測癌症EBV DNA的濃度，透過狄拉克點的電性訊號變化並轉換成濃度區間的趨勢線，感測當前EBV DNA的濃度，相較於醫學的量測法，例如:磁核共振、電腦斷層掃描或聚合酶連鎖反應，石墨烯場效應電晶體GFET的感測時間短且成本耗費低的優勢都比醫學的方法有潛力，但石墨烯感測器目前需要克服的問題，例如:轉印的殘留物或是感測時的專一性都還是研究中的挑戰。
實驗過程分成上閘極式石墨烯場效應電晶體(TG-GFET)和平面式石墨烯場效應電晶體(PG-GFET)，TG-GFET因為其結構簡單較早被提出討論，而PG-GFET則因為電晶體有較多漏電流的問題，後來解決後被廣泛使用。PG-GFET的閘極材料與通道的距離固定，穩定性較高，且根據文獻模擬的結果，電晶體的通道被平面閘極的電場所影響效果比上閘極的高，所以在實驗中，平面式閘極的靈敏度略高約0.1 V/nM。本實驗的感測器可以達到檢測極限(LoD)於1 pM的濃度，而檢測的線性範圍位於1 pM到10 nM ，其中線性回歸率R2=0.99，表示此感測器可以提供有效的平台用於感測癌症DNA。

摘要(英)

Biosensor research has been addressed as an interesting field recently. Within different kinds of developed biosensing technologies, field-effect transistor (FET) based biosensors stand out due to their attractive features, such as ultra-sensitivity detection, mass production capability, and low- cost manufacturing, have exhibited enhanced performance in the sensing of small biomolecules, heavy metals, pH, protein and DNA. In control experiments with mismatched DNA oligomers, the impact of the mismatch position, and the different number of mismatch oligomers on the DNA hybridization strength was confirmed. experimental results demonstrate that our G-FET high selectivity even in the serum environment.
We compare two different ways fabricated FET and tested, both top-gate FET and plane-gate FET can receive a promising result as DNA biosensor, and plane-gate have some attractive features, such as cost-effective fabrication procedure and easy integration into an IC-chip, beneficial for portable and IoT compatible, due to high field effect to graphene channel, plane-gate have higher sensitivity than top-gate. Our biosensor revealed high selectivity and limit of detection receive 1 pM, the detection linear range at 1 pM to 10 nM (R2=0.99) and sensitivity can reach 0.03 V/nM, shows high reliability and characteristic.

關鍵字(中)

★ 石墨烯
★ 電晶體
★ 生物感測器

關鍵字(英)

★ Graphene
★ FET
★ Biosensor

論文目次

目錄
摘要 i
Abstract ii
目錄 iv
圖目錄 vi
表目錄 viii
第一章、緒論 1
第二章、文獻回顧 2
2-1石墨烯簡介 2
2-2 去氧核醣核酸(DNA) 3
2-2-1 癌症 4
2-2-2 臨床評估DNA的方法 4
2-3石墨烯電化學感測器 5
2-4螢光式感測器 7
2-5石墨烯電晶體(Graphene Field Effect Transistor, GFET) 8
2-5-1背閘極電晶體(back-gated FET) 9
2-5-2離子感測式電晶體(ion-sensitive FET,ISFET) 10
2-6德拜長度(Debye screen) 13
2-7石墨烯電荷中性點(charge neutral point, CNP) 14
2-8功能化石墨烯表面 16
2-8-1 共價官能化表面 17
2-8-2 非共價官能化表面 19
2-9 實驗動機 21
第三章、實驗流程與分析方法 23
3-1 試片製作與元件製備 23
3-1-1 合成石墨烯 23
3-1-2 轉印石墨烯 24
3-1-3 元件電極製備 25
3-2 生醫晶片量測 26
3-3 實驗藥品材料介紹 26
3-4 實驗和分析儀器介紹 27
3-4-1常壓化學氣相沉積(atmospheric pressure chemical vapor deposition, AP-CVD) 27
3-4-2旋轉塗佈機(spin coater) 28
3-4-3原子力顯微鏡(atomic force microscope, AFM) 28
3-4-4拉曼光譜儀(raman spectroscopy, Raman) 29
3-4-5半導體直流電性量測系統(IV ststem) 30
第四章、結果與討論 30
4-1石墨烯的特性分析 30
4-2石墨烯電晶體特性 31
4-3功能化石墨烯表面分析 32
4-4利用螢光顯微鏡確認DNA於石墨烯上 33
4-5 Probe DNA固定化對石墨烯電晶體的影響 35
4-5-2上閘極與平面閘極的電晶體特性 35
4-6 Target DNA雜合對轉移特性曲線的影響 36
4-7 PBS濃度和FET結構對靈敏度的影響 38
4-8 感測之選擇性分析 39
4-9 生醫晶片在血清環境的選擇性 40
第五章、結論 42
第六章、未來工作 43
參考文獻 44

參考文獻

參考文獻
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指導教授

蘇清源(Ching-Yuan Su)

審核日期

2020-7-30

推文