陽極氧化鋁奈米模板法製備可撓式規則有序高分子奈米結構陣列之研究

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陳以燈(YI-DENG CHEN) 查詢紙本館藏

畢業系所

化學工程與材料工程學系

論文名稱

陽極氧化鋁奈米模板法製備可撓式規則有序高分子奈米結構陣列之研究

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摘要(中)

具微奈米的高分子薄膜，由於其具有透明度，重量輕，柔性和堅固性的特性，使其廣泛被用於化學傳感、熱障、光子器件、顯示器和低成本光伏器件電子元件等領域，傳統製備微奈米結構，常使用PMMA模板輔助法、離子束光刻法及奈米壓印技術法等方法，但相關製程常遭遇製程時間漫長、昂貴、複雜、成本高等缺點。為克服相關製程限制，本研究首度提出一種結合自組裝奈米球微影術(nanosphere lithography)之製程技術，其主要是利用粒徑均勻的高分子微奈米球，透過其彼此的交互作用力在基材上自組裝鋪排形成六方最密堆積排列之微奈米球陣列結構作為遮罩模板，調控奈米球的直徑再結合薄膜鍍製製程及陽極氧化蝕刻條件，成功地製備出具孔徑及間距可調變之薄型陽極氧化鋁奈米通道模板，再利用熱壓法將所需高分子填入奈米通道，成功地製備出具有可撓曲之高長寬比規則有序準直排列一維高分子結構，而所製備規則有序奈米結構，其結構表面形貌具有疏水及超疏水性質，此結構也可以用於微機電工程、微流體工程領域水滴轉寄技術；本研究所開發之新穎製程，相信將可應於製備各式可撓曲液晶顯示器（Liquid Crystal Display, LCD）和等離子顯示面板（PDP）的平板顯示器。

摘要(英)

Recently, the nanoporous anodic aluminum oxide (AAO) have widely used as templates in nanotechnology. On account of their features continuous, well-organized nanostructure, they can easily adjustable morphological properties and wide range of applications such as drug delivery, membrane filtration, antireflection coating, catalysis and synthesis of various nanostructures. To fabricate thin AAO template with regular nanopores arrays, a variety of patterning techniques have been developed such as nanoimprint lithography, polymer template assisted method and e-beam lithography. However, the above-mentioned processed are high cost, operational complexity and low processing speed make them challenging to use. In this work, we fabricated the thin polymer micro/nanostructures to combine of nanosphere lithography, anodizing and hot-embossing process approach to fabricate thin AAO templates, which is based on the nanosphere lithography with multistep anodizing and etching pore-widening process. The pore diameters, pore lengths can be varied by changing the anodization parameters such as the type of the electrolyte, the electrolyte concentration, the working temperature, the applied voltage and the working time. To fabricate the double-sized diameters template for producing double-sized polymer nanocones. The polymer nanostructure has a hydrophobicity and superhydrophobicity. Wettability of the solid surface is an important property because controlling the surface wettability is significant in many functional applications in MEMS, micro-fluid, and biomaterials. The polymer nanostructures had the potential of liquid transportation. In addition, the polymer micro/nanostructure are widely used in liquid-crystal display and plasma display panel because it has the characteristics of transparency, light weight, small size, flexibility and robustness.

關鍵字(中)

★ 可撓式高分子奈米結構陣列
★ 陽極氧化鋁模板
★ 水滴搬運

關鍵字(英)

論文目次

第一章、前言及文獻回顧 1
1-1 前言 1
1-2 奈米材料 3
1.3 一維奈米結構 4
1-3-1 一維高分子奈米結構之應用 4
1-4 陽極氧化鋁膜 4
1-4-1 陽極氧化鋁膜之發展背景 4
1-4-2 陽極氧化鋁膜成長機制 6
1-4-3 陽極氧化鋁膜成長控制變因 8
1-4-4 陽極氧化鋁膜規則化孔洞製程 9
1-5 自組裝奈米球微影術 11
1-5-1 奈米球自組裝機制 11
1-5-2 奈米球微影術之發展 12
1-5-3 奈米球微影術製備規則有序之奈米結構 13
1-6 水滴接觸角之相關理論 13
1-7 研究動機 15
第二章、實驗步驟及實驗設備 17
2-1 實驗步驟 17
2-1-1 高純度金屬鋁片前處理 17
2-1-2 金屬鋁片表面進行電化學之表面平坦化處理 18
2-1-3 奈米球模板之製備 18
2-1-4 氧氣電漿蝕刻均勻可調控奈米球模板尺寸 19
2-1-5 電子槍蒸鍍二氧化矽薄膜 19
2-1-6 舉離奈米球模板 19
2-1-7 製備陽極氧化試片工作電極 20
2-1-8 製備規則有序陽極氧化鋁模板 20
2-2 熱壓法製備規則有序高分子奈米結構 21
2-2-1 填充聚苯乙烯高分子製備一維高分子奈米結構陣列 21
2-3 實驗設備 22
2-3-1 反應性離子蝕刻機 22
2-3-2 電子槍蒸鍍系統 22
2-3-3 陽極氧化鋁膜製備系統 22
2-3-4 空氣烘箱系統 23
2-3-5 pH meter 23
2-4 儀器分析實驗 24
2-4-1 掃描式電子顯微鏡 24
2-4-2 影像式接觸角量測儀 24
第三章結果與討論 26
3-1 金屬鋁片表面進行電化學之表面平坦化形貌及分析 26
3-2 未定義凹槽之大面積隨機排列之陽極氧化鋁模板製程分析 27
3-3 金屬鋁片上製備單層自組裝奈米球模板陣列之結構與分析 28
3-4 奈米球微影術結合陽極氧化處理製備具規則有序且準直之陽極氧化鋁模板 31
3-4-1 不同陽極處理時間對陽極氧化鋁膜生成之速率影響 32
3-4-2 調控陽極氧化鋁模板奈米通道之孔徑尺寸 34
3-4-3 製備具有雙尺寸奈米通道之陽極氧化鋁模板 35
3-5 奈米球微影術結合陽極氧化及熱壓法製備高分子奈米陣列結構 37
3-5-1 一維聚苯乙烯高分子規則有序之奈米柱結構分析 38
3-5-2 一維聚苯乙烯高分子規則有序之奈米錐結構分析 39
3-5-3 一維可撓曲式聚苯乙烯高分子奈米結構分析 39
3-6 高分子薄膜與一維高分子奈米結構之水滴接觸角量測 40
第四章結論及未來展望 42
4-1 結論 42
4-2 未來展望 42
參考文獻 44
表目錄 52
圖目錄 54

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指導教授

鄭紹良

審核日期

2021-10-29

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