小型鏡片非對稱像差波前量測

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姓名

蘇羿達(Yi-Da Su) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

小型鏡片非對稱像差波前量測
(Asymmetrical aberration wavefront measurement with miniature lens)

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★ 薄型化光展量疊加太陽能集光器	★ A Similarity-Guided Spots Sorting Method to Increase the Dynamic Range of a Shack Hartmann Sensor
★ 雷射微型投影機波前量測技術	★ 旋轉掃描式非球面干涉儀之演算法開發及應用
★ 校準低敏型Shack-Hartmann波前感測器	★ 利用Slanted-edge方法以及相位回復演算法量測光學系統的成像像差

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至系統瀏覽論文 (2026-8-1以後開放)

摘要(中)

隨著對高品質手機鏡頭的需求量提高，如今小型鏡頭的測試變得越來越重要。對於小型的單一光學元件來說，目前所有的計量設備都難以對單透鏡的定心產生穩定且可靠的測量。而我們實驗室開發了一種高速、高通量的自動化波前像差測量系統來克服這些困難。由於所構建的波前具有極高的動態範圍，因此可以在沒有中繼光學元件的情況下測量到各種不同形狀的透鏡。到目前為止成功測量了像厚彎月面、M形、正彎月面、非對稱雙凹面、平凹面等形狀的鏡片，並且根據不同透鏡形狀因素，測量以兩個表面偏心的量化，達到了約 0.02~0.05 um 的測量可重複性記錄。
有別於其他光學檢測設備，此高動態波前像差測量系統具備量測時間一片5~10秒的速度，無論是重複性或是量測速度，均有達到業界商用標準，改善了現在無法大量檢測的需求。

摘要(英)

With the increasing demand of high-quality mobile phone lenses, the testing of miniature lenses is becoming more and more critical nowadays. For miniature optics, all the current metrology devices have difficulties to generate a stable and reliable measurement for the centration of single lens. Our laboratory has developed a high-speed, high-throughput automated wavefront aberration measurement system to overcome these difficulties. Owing to the extereme high dynamic range of the wavefront built, different shapes of lenses can be measured without optical nulling. So far, we have successfully measured lenses with shapes like thick meniscus, M-shaped, positive meniscus, asymmetric biconcave, plano-concave and other shapes. Depending on lens shape factor, the measurement quantified in terms of two surface decentration achieving record of measuerment repeatiblilty about 0.02-0.05 um.
Different from the other metrology devices, this high dynamic wavefront aberration measurement system has a measurement time of 5~10 seconds for single lens. Both the repeatability and the measurement speed have almost reached the industry standard, which has improved the problem of testing volume lens.

關鍵字(中)

★ 小型鏡片
★ 偏心量測
★ 高動態範圍波前檢測器

關鍵字(英)

★ Miniature lens
★ Centration testing
★ HDR Shack Hartmann WFS

論文目次

中文摘要 i
Abstract ii
誌謝 iii
目錄 iv
圖目錄 vi
表目錄 ix
一、緒論 1
1-1 研究背景 1
1-2 文獻回顧 2
1-3 研究動機 5
二、研究內容與方法 6
2-1 光學像差理論 6
2-1-1幾何光學成像公式 6
2-1-2 單色像差介紹 7
2-1-3 Seidel多項式 8
2-1-4 Zernike多項式 12
2-2 Shack-Hartmann波前檢測器 14
2-2-1 原理介紹 14
2-2-2 光點指派計算 15
2-2-3 光點質心演算法 16
2-2-4 高動態範圍Shack-Hartmann波前檢測器 18
2-2-5 波前重建 19
2-3 單一鏡片偏心量測方法 21
2-3-1 偏心誤差介紹 21
2-3-2 穿透式波前偏心量測 23
三、實驗架構及方法 30
3-1 HDR-SHWFS偏心量測系統架構 31
3-1-1 機械手臂 32
3-2 HDR-SHWFS偏心重複性測試 33
3-2-1 厚彎月非球面鏡片重複量測 33
3-2-2 M型非球面鏡片重複量測 35
3-2-3 平凸非球面鏡片重複量測 36
四、實驗結果 38
4-1 HDR-SHWFS快速偏心量測 38
4-1-1 雙凹非球面鏡片快速量測 38
4-1-2 薄彎月非球面鏡片快速量測 40
4-1-3 M型非球面鏡片快速量測 41
4-1-4 平凸非球面鏡片快速量測 42
4-1-5 薄彎月非球面鏡片快速量測 43
4-2 HDR-SHWFS量測穿透波前誤差 44
五、結論 48
參考文獻 49

參考文獻

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指導教授

梁肇文(Chao-Wen Liang)

審核日期

2021-8-11

推文