高分子微波鍵合製作微流道元件

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姓名

陳建叡(Jian-Ruei,Chen) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

高分子微波鍵合製作微流道元件
(Polymer Microwave Bonding for Microfluidic Components)

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摘要(中)

本研究使用雷射雕刻後的 PMMA 試片,並將一側均勻塗佈有機溶劑
(異丙醇)進行鍵合,並放入微波腔體中,待鍵合完成後,觀察微流道鍵合
狀況。由於 PMMA 對有機溶劑的溶解度隨溫度變化而改變,微波時間長
短也將影響材料吸收微波的程度。使用拉伸試驗機對試片鍵和強度進行檢
測,再以 XPS 和 AFM 對試片表面結構進行分析,說明其鍵合原理,最後
注入液體觀察液體在微流道中的狀況,液體在流道中維持穩定層流狀態。
經過實驗測試發現微波時間的增加,促進異丙醇與 PMMA 表面反應,使
試片表面產生足夠的溶脹層,將利於增加鍵合強度,也因溫度的變化讓試
片鍵合時的氣泡減少,而拉伸強度也隨微波時間增加而提升。

摘要(英)

In this study, PMMA specimens were laser engraved, and one side was evenly coated with an organic solvent (isopropyl alcohol) for bonding process. The specimens then placed in a microwave chamber for bonding, and the microfluidic bonding condition was observed after the bonding was completed. Since the solubility of PMMA to the organic solvent changes with temperature, the microwave processing time of will also affect the degree of microwave absorption of the material. The bonding strength of the specimens was examined using a tensile tester, and the surface structure of the specimens was analyzed by XPS and AFM to illustrate the bonding principle. Finally the liquid was injected to observe the condition of the liquid in the microfluidic channel, and the liquid maintained a stable laminar flow in the channel. After the experimental test, it was found that the increase of microwave time promoted the reaction between isopropyl alcohol and PMMA surface to produce enough dissolved layer on the surface of the specimen, which would be favorable for the increase of bonding strength, and the change of temperature would reduce the air bubbles during the bonding of the specimen, and the tensile strength also increased with the increase of microwave time.

關鍵字(中)

★ PMMA鍵合
★ 微流道試片
★ XPS分析

關鍵字(英)

★ PMMA bonding
★ microfluidic specimen
★ XPS analysis

論文目次

第一章緒論................................................................................................ 1
1-1 研究背景: .......................................................................................... 1
1-2 研究動機與目的:............................................................................... 2
第二章原理與文獻回顧 ............................................................................ 4
2-1 鍵合技術 ........................................................................................... 4
2-1-1 直接鍵合法(Direct bonding)......................................................... 5
2-1-2 間接鍵合法(Indirect bonding) .................................................... 10
2-2 微波理論(Microwave) ..................................................................... 12
2-2-1 材料吸收微波後反應................................................................. 12
2-2-2 與傳統加熱方式比較................................................................. 12
2-3 PMMA 拉伸試片設計..................................................................... 14
2-4 微流道設計模型.............................................................................. 15
第三章實驗步驟與方法........................................................................... 18
3-1 試片規格與清洗流程....................................................................... 18
3-2 實驗器材 ......................................................................................... 19
3-2-1 鍵合實驗用具 ............................................................................ 19
3-2-2 實驗材料 .................................................................................... 22
3-2-3 拉伸試驗設備 ............................................................................ 23
3-2-4 光學顯微鏡 ................................................................................ 23
3-3 實驗步驟 .......................................................................................... 23
3-3-1 檢測材料表面試片製作............................................................. 24
3-3-1 拉伸試驗試片製作..................................................................... 24
3-3-2 微流道鍵合製作 ........................................................................ 25
3-4 AFM 分析檢測原理 ......................................................................... 26
3-5 XPS 分析檢測原理.......................................................................... 27
第四章結果與討論.................................................................................. 29

vi

4-1 AFM 材料表面檢測 ......................................................................... 29
4-2 XPS 檢測分析 .................................................................................. 35
4-2-1 僅清洗後的試片 XPS 分析........................................................ 35
4-2-2 滴上異丙醇 120 秒後的試片 XPS 分析 .................................... 36
4-2-3 滴上異丙醇微波 120 秒後的試片 XPS 分析............................. 36
4-3 拉伸試片 ......................................................................................... 44
4-2 顯微鏡下微流道試片....................................................................... 48
4-3 液體注入微流道結果....................................................................... 51
第五章結論與未來展望........................................................................... 54
5-1 結論.................................................................................................. 54
5-2 未來展望 .......................................................................................... 55
第六章參考資料....................................................................................... 56

參考文獻

[1] Grayson, A. C. R., et al. "A BioMEMS review: MEMS technology for physiologically integrated devices." Proceedings of the IEEE 92(1): pp.6-21,2004.
[2] Donald M Kenney, “Method of Isolating Chips of a Wafer of Semiconductor Material,” U.S.Pat.3332137,1967.
[3] M. Shimbo, K. Furukawa, K. Fukuda, and K. Tanzawa, “Silicon-to‐silicon direct bonding method,” Journal of Applied Physics, pp.2987-2989,1986.
[4] Schultz J, Nardin M Theories and mechanisms of adhesion. In: Mittal APAKL (ed) Handbook of adhesive technology. Marcel Dekker, New York, pp.19–33,1994.
[5] Pocius AV Adhesion and adhesives technology: an introduction. Hanser/Gardner Publications, Cincinnati,2002.
[6] 薛敬和,高分子化學,台北,高立圖書出版社,2000.
[7] Shah JJ, Geist J, Locascio LE, Gaitan M, Rao MV, Vreeland WN Capillarity induced solvent-actuated bonding of polymeric microfluidic devices. Anal Chem 78(10): pp.3348–3353,2006.
[8] Hsu YC, Chen TY Applying Taguchi methods for solvent- assisted PMMA bonding technique for static and dynamic mu- TAS devices.Biomed Microdevices 9(4): pp.513–522,2007.
[9] Chia-Yi, Y. 藉由熱接合表面改質與溶劑處理方法封閉於環狀嵌段共聚物與環烯烴共聚物材料上微流道之研究, National Central
University,2017.
[10] Tran, H. H., et al.. "Ethanol and UV-assisted instantaneous bonding of PMMA assemblies and tuning in bonding reversibility." Sensors and Actuators B: Chemical 181: pp.955-962,2013.
[11] Tsai, Y.-S.. 應用 PMMA 樣板鍵合技術實施類積層製造方法製作微流道系統晶片之研究, National Central University,2020.
[12] 林建中,周宗華,高分子材料,新文京開發出版公司,2002.
[13] J. M. Osepchuk, “A History of Microwave Heating Applications”, Microwave Theory and Techniques, IEEE Transactions on, Vol. 32, Issue 9, pp.1200-1224, Sep 1984.
[14] A. C. Metaxas, “Microwave heating”, IEE Power Engineering Journal 5, 1991.
[15] David E. Clark and Willard H. Sutton, “Microwave Processing of Materials”, Annu. Rev. Mater. Sci., Vol. 26, pp.299-331,1996.
[16] Andersson, H. and A. Van den Berg. "Microfluidic devices for cellomics: a review." Sensors and Actuators B: Chemical 92(3): pp.315-325,2003.
[17] Alessandrini, A. and P. Facci. "AFM: a versatile tool in biophysics." Measurement science and technology 16(6): R65,2005.
[18] Seah, M. "The quantitative analysis of surfaces by XPS: a review." Surface and Interface Analysis 2(6): pp.222-239,1980.
[19] Miller-Chou, B. A. and J. L. Koenig. "A review of polymer dissolution." Progress in Polymer Science 28(8): pp.1223-1270,2003.
[20] Girardeaux, C. and J.-J. Pireaux. "Analysis of Poly(methyl methacrylate) (PMMA) by XPS." Surface Science Spectra 4(2): pp.134-137,1996.

指導教授

李天錫(Lee, Benjamin Tien-Hsi)

審核日期

2021-6-18

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