博碩士論文 109521113 詳細資訊




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姓名 凌瑋宏(Wei-Hong Lin)  查詢紙本館藏   畢業系所 電機工程學系
論文名稱 1200伏矽基氮化鎵高電子遷移率電晶體緩衝層之研究
(Study of the buffer layer for 1200 V GaN-on-Si HEMTs)
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摘要(中) 近年來,減碳意識抬頭,推動節能技術的發展,其中一項技術便是使用氮化鎵高電子遷移率電晶體建構高能源效率的電源轉換模組,由於它有較高的電子遷移率、電子飽和速度和耐熱性,使其在嚴苛的環境下有良好的表現,且可提高操作頻率,降低電容的需求,大幅縮減設備的體積。然而目前欠缺大尺寸且價格低廉的氮化鎵基板,在矽基板上磊晶即成為選項之一。本論文的研究是以矽基氮化鎵高電子遷移率電晶體為主軸,探討各式緩衝層結構對其垂直崩潰電壓的影響。此研究是使用有機金屬化學汽相沉積系統(Metal-Organic Chemical Vapor Deposition, MOCVD)沉積氮化鎵於矽基板上,在緩衝層中使用碳摻雜氮化鎵、超晶格結構和氮化鋁插入層結構來提高磊晶厚度至6 μm以上。並在磊晶過程中監控晶圓的曲率變化,避免晶圓翹曲或磊晶表面龜裂。經過適當組合,最終完成可承受1200伏垂直崩潰電壓的氮化鎵高電子遷移率電晶體緩衝層。
摘要(英) In recent years, the awareness of carbon emissions reduction has risen and the development of energy-saving technologies has been promoted. One of the technologies is to use gallium nitride high electron mobility transistors (HEMTs) to construct high energy-efficient power conversion modules. Due to its high electron mobility, electron saturation velocity and heat resistance, GaN HEMTs performance well in harsh environments. They can be operated at high frequency, which reduces the need for large capacitors in the switching circuits, and greatly decreases the size of the power conversion modules. However, large-size low-cost GaN substrates are not available currently. The growth of GaN on silicon has become one of the options for GaN HEMTs. The objective of this research focuses on high voltage (1200 V) GaN-on-Si HEMTs, especially the influence of buffer layer structures on their vertical breakdown voltage. In this study, we use a metal-organic chemical vapor deposition system (MOCVD) to deposit gallium nitride on (111) silicon substrates. Carbon doped GaN layers, superlattice structures, and AlN insertion layers in the buffer layer are used to increase the epitaxial thickness to more than 6 μm. The curvature of the wafers during the epitaxy process is closely monitored and controlled to avoid cracks of the films. Using a combination of the aforementioned structures, GaN HEMTs that can withstand a vertical breakdown voltage of 1200 voltage have been achieved.
關鍵字(中) ★ 高電子遷移率電晶體
★ 緩衝層
★ 矽基氮化鎵
★ 高崩潰電壓
關鍵字(英) ★ HEMT
★ Buffer layer
★ GaN-on-Si
★ high breakdown voltage
論文目次 摘要 i
Abstract ii
誌謝 iii
目錄 iv
圖目錄 vi
表目錄 viii
第一章 導論 1
1.1 前言 1
1.2 氮化鎵材料特性與應用 3
1.2.1 氮化鎵極化效應 3
1.2.2 氮化鎵磊晶於不同基板上之優劣 9
1.2.3 氮化鎵功率元件發展現況與問題 11
1.3 研究動機 12
1.4 論文架構 16
第二章 實驗方法及原理 17
2.1 有機金屬氣相磊晶成長法 17
2.1.1即時監控系統 20
2.1.2磊晶過程的曲率變化 23
2.1.3超晶格結構的發展 25
2.1.4碳摻雜氮化鎵的發展 28
2.1.5氮化鋁插入層 31
2.2 X光繞射儀 32
2.3 元件製程流程 35
2.4 電性量測方法 37
第三章 結果與討論 38
3.1 超晶格結構的效果 38
3.2 碳摻雜氮化鎵的效果 41
3.3 提高氮化鎵厚度的效果 43
3.4 組合式緩衝層 46
第四章 結論 49
參考文獻 52
參考文獻 Pushpakaran, B.N., Subburaj, A.S., and Bayne, S.B, "Commercial GaN-Based Power Electronic Systems: A Review," Electron Mater, 6247–6262(2020)
A. J. Wileman, Sohaib Aslam, and Suresh Perinpanayagam, "A road map for reliable power electronics for more electric aircraft," Progress in Aerospace Sciences Volume 127(2021)
B. J. Baliga, "Power semiconductor device figure of merit for high-frequency applications," IEEE Electron Device Letters, vol. 10, no. 10, pp. 455-457(1989)
N. Keshmiri, D. Wang, B. Agrawal, R. Hou, and A. Emadi, "Current Status and Future Trends of GaN HEMTs in Electrified Transportation," IEEE Access, vol. 8, pp. 70553-70571 (2020)
T. P. Chow, "Wide bandgap semiconductor power devices for energy efficient systems," IEEE 3rd Workshop on Wide Bandgap Power Devices and Applications (WiPDA), pp. 402-405 (2015)
Susmita Ghose, Shafiqur Rahman, Liang Hong, Juan Salvador Rojas-Ramirez, Hanbyul Jin, Kibog Park, Robert Klie, and Ravi Droopad, "Growth and characterization of β-Ga2O3 thin films by molecular beam epitaxy for deep-UV photodetectors," Journal of Applied Physics 122, 095302 (2017)
Lu Cheng, Jia-Yue Yang, and Wei Zheng, "Bandgap, Mobility, Dielectric Constant, and Baliga’s Figure of Merit of 4H-SiC, GaN, and β‑Ga2O3 from 300 to 620 K," ACS Appl. Electron. Mater.,8, 4140–4145 (2022)
V.I. Nikolaev, A.I. Pechnikov, S.I. Stepanov, I.P. Nikitina, A.N. Smirnov, A.V. Chikiryaka, S.S. Sharofidinov, V.E. Bougrov, and A.E. Romanov, "Epitaxial growth of (2 ̅01) β-Ga2O3 on (0001) sapphire substrates by halide vapour phase epitaxy," Materials Science in Semiconductor Processing 47, 16–19 (2016)
Yuewei Zhang, Fikadu Alema, Akhil Mauze, Onur S. Koksaldi, Ross Miller, Andrei Osinsky, and James S. Speck, "MOCVD grown epitaxial ?-Ga2O3 thin film with an electron mobility of 176 cm2/V-s at room temperature," APL Materials 7, 022506 (2019)
Krishnendu Ghosha and Uttam Singisetti, "Ab initio velocity-field curves in monoclinic ?-Ga2O3," Journal of Applied Physics 122, 035702 (2017)
Puqing Jiang, Xin Qian, Xiaobo Li, and Ronggui Yang, "Three-dimensional anisotropic thermal conductivity tensor of single crystalline ?-Ga2O3," APPLIED PHYSICS LETTERS 113, 232105 (2018)
Shuji Nakamura, Takashi Mukai and Masayuki Senoh, "High-Power GaN P-N Junction Blue-Light-Emitting Diode," Japanese Journal of Applied Physics, 30 L1998(1991)
Shuji Nakamura, Masayuki Senoh and Takashi Mukai, "P-GaN/N-InGaN/N-GaN Double-Heterostructure Blue-Light-Emitting Diodes," Japanese Journal of Applied Physics, 32 L8(1993)
T. Fujii, Y. Gao, R. Sharma, E. L. Hu, S. P. DenBaars, and S. Nakamuraa, "Increase in the extraction efficiency of GaN-based light-emitting diodes via surface roughening," Appl. Phys. Lett. 84, 855 (2004)
Fabio Bernardini and Vincenzo Fiorentini, "Spontaneous polarization and piezoelectric constants of III-V nitrides," Physical Review B, Volume 56, 16 (1997)
I. Vurgaftman and J. R. Meyer, "Band parameters for nitrogen-containing semiconductors," Journal of Applied Physics, 94, 3675 (2003)
T. Mattila and Alex Zunger, "Predicted bond length variation in wurtzite and zinc-blende InGaN and AlGaN alloys," Journal of Applied Physics, 85, 160 (1999)
O Ambacher, J Majewski, C Miskys, A Link, M Hermann, M Eickhoff, M Stutzmann, F Bernardini, V Fiorentini, V Tilak, B Schaff and L F Eastman, "Pyroelectric properties of Al(In)GaN/GaN hetero- and quantum well structures," J. Phys., Condens. Matter 14, 3399 (2002)
Hadis Morkoç, "Handbook of nitride semiconductors and devices, Materials Properties, Physics and Growth," (2009)
O. Ambacher, J. Smart, J. R. Shealy, N. G. Weimann, K. Chu, M. Murphy, W. J. Schaff, and L. F. Eastman, "Two-dimensional electron gases induced by spontaneous and piezoelectric polarization charges in N- and Ga-face AlGaN/GaN heterostructures," Journal of Applied Physics, 85, 3222(1999)
Agostino Zoroddu, Fabio Bernardini, Paolo Ruggerone, and Vincenzo Fiorentini, "First-principles prediction of structure, energetics, formation enthalpy, elastic constants, polarization, and piezoelectric constants of AlN, GaN, and InN: Comparison of local and gradient-corrected density-functional theory," Physical Review B, Volume 64, 045208(2001)
Hadis Morkoc and Jacob Leach, "Polarization in GaN Based Heterostructures and Heterojunction Field Effect Transistors (HFETs)," pp. 373–466, (2008)
O. Ambacher, B. Christian, M. Yassine, M. Baeumler, S. Leone, and R. Quay, "Polarization induced interface and electron sheet charges of pseudomorphic ScAlN/GaN, GaAlN/GaN, InAlN/GaN, and InAlN/InN heterostructures," J. Appl. Phys. 129, 204501 (2021)
O. Ambacher, R. Dimitrov, M. Stutzmann, B. E. Foutz, M. J. Murphy, J. A. Smart, J. R. Shealy, N. G. Weimann, K. Chu, M. Chumbes, B. Green, A. J. Sierakowski, W. J. Schaff, and L. F. Eastman, "Role of Spontaneous and Piezoelectric Polarization Induced Effects in Group-III Nitride Based Heterostructures and Devices," phys. stat. sol. (b) 216, 381(1999)
Yu-Chih Chen, Indraneel Sanyal, Ting-Yu Hu, Ying-Hao Ju, and Jen-Inn Chyi, "The Influence of Superlattice Structure on the Dynamic Buffer Response of AlInN/GaN-on-Si HEMTs," IEEE Transactions on Nanotechnology, Volume 19 (2020)
Chao Liu, Yuefei Cai, Xinbo Zou, Member, and Kei May Lau, "Low-Leakage High-Breakdown Laterally Integrated HEMT-LED via n-GaN Electrode," IEEE Photonics Technology Letters, VOL. 28, 10 (2016)
Stefano Leone, Fouad Benkhelifa, Lutz Kirste, Christian Manz, Ruediger Quay, and Oliver Ambacher, "Epitaxial growth optimization of AlGaN/GaN high electron mobility transistor structures on 3C-SiC/Si," J. Appl. Phys. 125, 235701 (2019)
S Mizushima, "Determination of gas adsorption on native oxides formed on Si(100), Si(111) and Si(110) surfaces," INSTITUTE OF PHYSICS PUBLISHING, Metrologia 42, 208–214 (2005)
Lei Zhang, Xibo Yuan, Senior Member, Xiaojie Wu, Member, Congcong Shi, Jiahang Zhang, and Yonglei Zhang, "Performance Evaluation of High-Power SiC MOSFET Modules in Comparison to Si IGBT Modules," IEEE TRANSACTIONS ON POWER ELECTRONICS, VOL. 34, NO. 2(2019)
A. O’Neill, F. Arith, J. Urresti, K. Vasilevskiy, N. Wright and S. Olsen, "High Mobility 4H-SiC MOSFET," 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT), pp. 1-4 (2018)
Y. Dora, A. Chakraborty, L. McCarthy, S. Keller, S. P. DenBaars, and U. K. Mishra, "High Breakdown Voltage Achieved on AlGaN/GaN HEMTs With Integrated Slant Field Plates," IEEE Electron Device Letters, VOL. 27, NO. 9, (2006)
Injun Hwang, Hyoji Choi, JaeWon Lee, Hyuk Soon Choi, Jongseob Kim, Jongbong Ha, Chang-Yong Um, Sun-Kyu, Hwang, Jaejoon Oh, Jun-Youn Kim, Jai Kwang Shin, Youngsoo Park, U-in Chung, In-Kyeong Yoo, and Kinam Kim, "1.6kV, 2.9 mΩ cm2 normally-off p-GaN HEMT device," 24th International Symposium on Power Semiconductor Devices and ICs, pp. 41-44(2012)
Jun Ma, Catherine Erine, Minghua Zhu, Nela Luca, Peng Xiang, Kai Cheng, and Elison Matioli, "1200 V Multi-Channel Power Devices with 2.8 Ω•mm ON-Resistance," IEEE International Electron Devices Meeting (IEDM), pp. 4.1.1-4.1.4 (2019)
Xing Wei, Xiaodong Zhang, Chi Sun, Wenxin Tang, Chunhong Zeng, Fu Chen, Tao He, Guohao Yu, Liang Song, Wenkui Lin, Xuan Zhang, Desheng Zhao, Wei Huang, Yong Cai, and Baoshun Zhang, "Improvement of Breakdown Voltage and ON-Resistance in Normally-OFF AlGaN/GaN HEMTs Using Etching-Free p-GaN Stripe Array Gate," IEEE Transactions on Electron Devices, vol. 68, no. 10, pp. 5041-5047 (2021)
H. Jiang, Q. Lyu, R. Zhu, P. Xiang, K. Cheng and K. M. Lau, "1300 V Normally-OFF p-GaN Gate HEMTs on Si With High ON-State Drain Current," IEEE Transactions on Electron Devices, vol. 68, no. 2, pp. 653-657 (2021)
Feng Zhou, Weizong Xu, Fangfang Ren, Yuanyang Xia , Leke Wu, Tinggang Zhu, Dunjun Chen , Rong Zhang, Youdou Zheng, and Hai Lu, "1.2 kV/25 A Normally off P-N Junction/AlGaN/GaN HEMTs With Nanosecond Switching Characteristics and Robust Overvoltage Capability," IEEE Transactions on Power Electronics, vol. 37, no. 1, pp. 26-30 (2022)
J. Liu, M. Xiao, Y. Zhang, S. Pidaparthi, H. Cui, A. Edwards, L. Baubutr, W. Meier, C. Coles, C. Drowley, "1.2 kV Vertical GaN Fin JFETs with Robust Avalanche and Fast Switching Capabilities," IEEE International Electron Devices Meeting (IEDM), pp. 23.2.1-23.2.4 (2020)
Srabanti Chowdhury, Brian L Swenson, Man Hoi Wong, and Umesh K Mishra, "Current status and scope of gallium nitride-based vertical transistors for high-power electronics application," Semicond. Sci. Technol. 28 (2013)
S. Chowdhury and U. K. Mishra, "Lateral and Vertical Transistors Using the AlGaN/GaN Heterostructure," IEEE Transactions on Electron Devices, vol. 60, no. 10, pp. 3060-3066 (2013)
Bernard Gil, "III-Nitride Semiconductors and their Modern Devices," (2013)
Daisuke Shibata, Ryo Kajitani, Masahiro Ogawa, Kenichiro Tanaka, Satoshi Tamura, Tsuguyasu Hatsuda, Masahiro Ishida, and Tetsuzo Ueda, "1.7 kV/1.0 mΩcm2 normally-off vertical GaN transistor on GaN substrate with regrown p-GaN/AlGaN/GaN semipolar gate structure," IEEE International Electron Devices Meeting (IEDM), pp. 10.1.1-10.1.4 (2016)
Hui Nie, Quentin Diduck, Brian Alvarez, Andrew P. Edwards, Brendan M. Kayes, Ming Zhang, Gangfeng Ye, Thomas Prunty, Dave Bour, and Isik C. Kizilyalli, "1.5-kV and 2.2-mΩ-cm2 Vertical GaN Transistors on Bulk-GaN Substrates," IEEE Electron Device Letters, vol. 35, no. 9, pp. 939-941, (2014)
D. Ji and S. Chowdhury, "Design of 1.2 kV Power Switches with Low RON Using GaN-Based Vertical JFET," IEEE Transactions on Electron Devices, vol. 62, no. 8, pp. 2571-2578, (2015)
Yuhao Zhang, Min Sun, Josh Perozek, Zhihong Liu, Ahmad Zubair, Daniel Piedra, Nadim Chowdhury, and Xiang Gao, "Large-Area 1.2-kV GaN Vertical Power FinFETs With a Record Switching Figure of Merit," IEEE Electron Device Letters, vol. 40, no. 1, pp. 75-78 (2019)
Miao Zhang, Zhiyou Guo, Yong Huang, Yuan Li, Jiancheng Ma, Xiaoyu Xia, Xiuyang Tan, Fan Xia, and Huiqing Sun, "Study of AlGaN/GaN Vertical Superjunction HEMT for Improvement of Breakdown Voltage and Specific On-Resistance," IEEE Access, vol. 9, pp. 9895-9902 (2021)
Cui Lei, Yin Haibo, Jiang Lijuan, Wang Quan, Feng Chun, Xiao Hongling, Wang Cuimei, Gong Jiamin, Zhang Bo, Li Baiquan, Wang Xiaoliang, and Wang Zhanguo, "The influence of Fe doping on the surface topography of GaN epitaxial material," Journal of Semiconductors, 36 103002 (2015)
Yuuki Kawada, Hideyuki Hanawa, and Kazushige Horio, "Effects of acceptors in a Fe-doped buffer layer on breakdown characteristics of AlGaN/GaN high electron mobility transistors with a high-k passivation layer," Japanese Journal of Applied Physics 56, 108003 (2017)
C. Yuan, T. Salagaj, A. Gurary, R Zawadzki, C. S. Chern, W. Kroll, and R. A. Stall, "High Quality P-Type GaN Deposition on c-Sapphire Substrates in a Multiwafer Rotating-Disk Reactor," Journal of The Electrochemical Society, Volume 142, Number 9 (1995)
Jin-Ji Dai, Thi Thu Mai, Ssu-Kuan Wu, Jing-Rong Peng, Cheng-Wei Liu, Hua-Chiang Wen, Wu-Ching Chou, Han-Chieh Ho, and Wei-Fan Wang, "High Hole Concentration and Diffusion Suppression of Heavily Mg-Doped p-GaN for Application in Enhanced-Mode GaN HEMT," Nanomaterials, 11, 1766 (2021)
Sadahiro Kato, Yoshihiro Satoh, Hitoshi Sasaki, Iwami Masayuki, Seikoh Yoshida, "C-doped GaN buffer layers with high breakdown voltages for high power operation AlGaN/GaN HFETs on 4-in Si substrates by MOVPE," Journal of Crystal Growth, 298, 831–834 (2007)
Kiyotaka Miyano, Masayuki Tsukui, Hajime Nago, Yasushi Iyechika, Takehiko Kobayashi, Yoshitaka Ishikawa, Hideshi Takahashi, Shinichi Mitani, and Takashi Yoda, "Origin and suppression of critical deep pit in high-electron-mobility transistor structure using GaN on Si technology with strained-layer superlattice," Japanese Journal of Applied Physics 57, (2018)
L. Heuken, M. Kortemeyer, A. Ottaviani, M. Schröder, M. Alomari, D. Fahle, M. Marx, M. Heuken, H. Kalisch, A. Vescan, and J. N. Burghartz, "Analysis of an AlGaN/AlN Super-Lattice Buffer Concept for 650-V Low-Dispersion and High-Reliability GaN HEMTs," IEEE Transactions on Electron Devices, vol. 67, no. 3, pp. 1113-1119 (2020)
Idriss Abid, Youssef Hamdaoui, Jash Mehta, Joff Derluyn, and Farid Medjdoub, "Low Buffer Trapping Effects above 1200 V in Normally off GaN-on-Silicon Field Effect Transistors," Micromachines, 13, 1519 (2022)
Ran Zuo, Haiqun Yu, Nan Xu, and Xiaokun He, "Influence of Gas Mixing and Heating on Gas-Phase Reactions in GaN MOCVD Growth," ECS Journal of Solid State Science and Technology, 1, P46-P53 (2012)
ZHANG Jian-Li, LIU Jun-Lin, PU Yong, FANG Wen-Qing, ZHANG Meng, JIANG Feng-Yi, "Effects of Carrier Gas on Carbon Incorporation in GaN," Chinese Physics Letters, Vol. 31, No. 3 (2014)
WC Young, RG Budynas, and AM Sadegh, "Roark’s Formulas for Stress and Strain," (2012)
Yiqiang Ni, Zhiyuan He, Fan Yang, Deqiu Zhou, Yao Yao, Guilin Zhou, Zhen Shen, Jian Zhong, Yue Zhen, Zhisheng Wu, Baijun Zhang, and Yang Liu, "Effect of AlN/GaN superlattice buffer on the strain state in GaN-on-Si(111) system," Japanese Journal of Applied Physics 54, 015505 (2015)
Susai Lawrence Selvaraj, Takaaki Suzue, and Takashi Egawa, "Breakdown Enhancement of AlGaN/GaN HEMTs on 4-in Silicon by Improving the GaN Quality on Thick Buffer Layers," IEEE Electron Device Letters, VOL. 30, NO. 6 (2009)
Jie Su, Eric A. Armour, Balakrishnan Krishnan, Soo Min Lee, and George D. Papasouliotis, "Stress engineering with AlN/GaN superlattices for epitaxial GaN on 200 mm silicon substrates using a single wafer rotating disk MOCVD reactor," Materials Research Society, Vol. 30, No. 19 (2015)
Eric Feltin, B. Beaumont, M. Laügt, P. de Mierry, P. Vennéguès, H. Lahrèche, M. Leroux, and P. Gibart, "Stress control in GaN grown on silicon (111) by metalorganic vapor phase epitaxy," Appl. Phys. Lett., 79, 3230 (2001)
Tomoya SUGAHARA, Jeong-Sik LEE and Kohji OHTSUKA, "Role of AlN/GaN Multilayer in Crack-Free GaN Layer Growth on 5′′φ Si (111) Substrate," Japanese Journal of Applied Physics, Vol. 43, No. 12B, pp. 1595–1597 (2004)
Yiqiang Ni, Zhiyuan He, Deqiu Zhou, Yao Yao, Fan Yang, Guilin Zhou, Zhen Shen, Jian Zhong, Yue Zhen, Baijun Zhang, Yang Liu, "The influences of AlN/GaN superlattices buffer on the characteristics of AlGaN/GaN-on-Si (111) template," Superlattices and Microstructures, 83, pp. 811–818 (2015)
Po-JungLin, Shih-Yung Huang, Wei-Kai Wang, Che-Lin Chen, Bu Chin Chung, Dong-Sing Wuu, "Controlling the stress of growing GaN on 150-mm Si (111) in an AlN/GaN strained layer superlattice," Applied Surface Science, Volume 362, pp. 434-440 (2016)
Yuya Yamaoka, Ken Kakamu, Akinori Ubukata, Yoshiki Yano, Toshiya Tabuchi, Koh Matsumoto, and Takashi Egawa, "Influence of the Al content of the AlGaN buffer layer in AlGaN/GaN high-electron-mobility transistor structures on a Si substrate," Phys. Status Solidi A 214, No. 3, 1600618 (2017)
Alaleh Tajalli, Matteo Meneghini, Sven Besendörfer, Riad Kabouche, Idriss Abid, Roland Püsche, Jo Derluyn, Stefan Degroote, Marianne Germain, Elke Meissner, Enrico Zanoni, Farid Medjdoub, and Gaudenzio Meneghesso, "High Breakdown Voltage and Low Buffer Trapping in Superlattice GaN-on-Silicon Heterostructures for High Voltage Applications," Materials, 13, 4271 (2020)
Lei Pan, Xun Dong, Jinyu Ni, Zhonghui Li, Qiankun Yang, Daqing Peng, and Chuanhao Li, "Growth of compressively-strained GaN films on Si(111) substrates with thick AlGaN transition and AlGaN superlattice buffer layers," P hys. Status Solidi C 13, No. 5–6, 181–185 (2016)
Qiankun Yang, Zhonghui Li, Lei Pan, Weike Luo, Xun Dong, "Role of different kinds of superlattices on the strain engineering of GaN films grown on Si (111)," Superlattices and Microstructures, Volume 109, Pages 249-253 (2017)
鄭儒宇,「磊晶成長氮化鎵高電子遷移率電晶體結構於矽基板過程晶圓翹曲之研析」,國立中央大學,碩士論文,民國110年。
G. PARISH, S. KELLER, S.P. DENBAARS, and U.K. MISHRA, "SIMS Investigations into the Effect of Growth Conditions on Residual Impurity and Silicon Incorporation in GaN and AlxGa1–xN," Journal of Electronic Materials, volume 29, pp. 15–20 (2000)
D.D. Koleske, A.E. Wickenden, R.L. Henry, M.E. Twigg, "Influence of MOVPE growth conditions on carbon and silicon concentrations in GaN," Journal of Crystal Growth, 242, pp. 55–69 (2003)
Jr-Tai Chen, Urban Forsberg, and Erik Janzén, "Impact of residual carbon on two-dimensional electron gas properties in AlxGa1–xN /GaN heterostructure," Appl. Phys. Lett. 102, 193506 (2013)
X.G. He, D.G. Zhao, D.S. Jiang, Z.S. Liu, P. Chen, L.C. Le, J. Yang, X.J. Li, S.M. Zhang, J.J. Zhu, H.Wang b, H. Yang, "Control of residual carbon concentration in GaN high electron mobility transistor and realization of high-resistance GaN grown by metal-organic chemical vapor deposition," Thin Solid Films, Volume 564, pp. 135-139 (2014)
Yiqiang Ni, Liuan Lia, Liang He, Taotao Que, Zhenxing Liu, Lei He, Zhisheng Wu, Yang Liu, "Dependence of carbon doping concentration on the strain-state and properties of GaN grown on Si substrate," Superlattices and Microstructures, Volume 120, pp. 720-726 (2018)
Weizhen Yao, Lianshan Wang, Fangzheng Li, Yulin Meng, Shaoyan Yang and Zhanguo Wang, "Effect of C-doped GaN film thickness on the structural and electrical properties of AlGaN/GaN-based high electron mobility transistors," Semicond. Sci. Technol., 34, 125006 (2019)
M.E. ZVANUT, SUBASH PAUDEL, E.R. GLASER, M. IWINSKA, T. SOCHACKI, and M. BOCKOWSKI, "Incorporation of Carbon in Free-Standing HVPE-Grown GaN Substrates," Journal of Electronic Materials, volume 48, pp. 2226–2232 (2019)
S. Besendörfer, E. Meissner, T. Zweipfennig, H. Yacoub, D. Fahle, H. Behmenburg, H. Kalisch, A. Vescan, J. Friedrich, and T. Erlbacher, "Interplay between C-doping, threading dislocations, breakdown, and leakage in GaN on Si HEMT structures," AIP Advances 10, 045028 (2020)
Michael J. Uren and Martin Kuball, "Impact of carbon in the buffer on power switching GaN-on-Si and RF GaN-on-SiC HEMTs," Japanese Journal of Applied Physics, 60 SB0802 (2021)
John L. Lyons, Evan R. Glaser, Mary Ellen Zvanut, Subash Paudel, Malgorzata Iwinska, Tomasz Sochacki, and Michal Bockowski, "Carbon complexes in highly C-doped GaN," Phys. Rev. B, 104, 075201 (2021)
A. Reiher, J. Bla ̈sing, A. Dadgar, A. Diez, A. Krost, "Efficient Stress Relief in GaN heteroepitaxy on Si(111) using low-temperature AlN interlayers," Journal of Crystal Growth, Volume 248, pp. 563-567 (2003)
Ruihong Luo, Peng Xiang, Minggang Liu, Tufu Chen, Zhiyuan He, Bingfeng Fan, Yu Zhao1, Yulun Xian, Shanjin Huang, Zhiyuan Zheng, Zhisheng Wu, Hao Jiang, Gang Wang, Yang Liu, and Baijun Zhang, "Influence of V/III Ratio of Low Temperature Grown AlN Interlayer on the Growth of GaN on Si(111) Substrate," Japanese Journal of Applied Physics, 50, 105501 (2011)
A. Dadgar, T. Hempel1, J. Bläsing, O. Schulz, S. Fritze, J. Christen, and A. Krost, "Improving GaN-on-silicon properties for GaN device epitaxy," P hys. Status Solidi C 8, No. 5, 1503–1508 (2011)
Po-Jung Lin, Ching-Ho Tien, Tzu-Yu Wang, Che-Lin Chen, Sin-Liang Ou, Bu-Chin Chung, and Dong-Sing Wuu, "On the Role of AlN Insertion Layer in Stress Control of GaN on 150-mm Si (111) Substrate," Crystals, 7, 134 (2017)
J. Epp, "X-ray diffraction (XRD) techniques for materials characterization," Materials Characterization Using Nondestructive Evaluation (NDE) Methods, pp. 81-124 (2016)
Cengiz M. Balkas, Cem Basceri, and Robert F. Davis, "Synthesis and characterization of high purity, single phase GaN powder," Powder Diffraction, 10, 4 (1995)
P. Gay, P. B. Hirsch, and A. Kelly, "The Estimation of Dislocation Densities in Metals From X-Ray Data, " Acta Metallurgica, Volume 1, Issue 3, pp. 315-319 (1953)
C. G Dunn, and E.F Kogh, "Comparison of dislocation densities of primary and secondary recrystallization grains of Si-Fe," Acta Metallurgica, Volume 5, Issue 10, pp. 548-554 (1957)
M A Moram and M E Vickers, "X-ray diffraction of III-nitrides," Rep. Prog. Phys., 72, 036502 (2009)
指導教授 綦振瀛(Jen-Inn Chyi) 審核日期 2023-3-24
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