新型修正式柵欄軌跡結合擴增狀態估測 滑模回授與多自由度Bouc-Wen遲滯前饋補償 控制器給予壓電平台快速精確追蹤

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姓名

簡士豪(Shih-Hao Chien) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

新型修正式柵欄軌跡結合擴增狀態估測滑模回授與多自由度Bouc-Wen遲滯前饋補償控制器給予壓電平台快速精確追蹤
(ESO-based Sliding Mode Feedback Control with Multi-DoF Bouc-Wen Hysteresis Feedforward Compensation for Modified Raster Scan Trajectory for Fast and Precise Tracking of Piezoelectric Stage)

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至系統瀏覽論文 (2029-7-1以後開放)

摘要(中)

壓電平台已被廣泛地使用在高解析度的量測儀器系統，其可以達到微米或奈米級別的定位精度。然而壓電平台所使用的致動器是由壓電材料所構成，此材料特性可以對電壓變化量做出形變或對形變量產生電壓，但它具有高度非線性的特徵(如遲滯、耦合等)，進而導致控制上的困難。除此之外，壓電平台的追蹤軌跡設計也是影響最終控制成效的一大關鍵。為了解決上述提到的困難，本篇論文提出了一個複合式的控制架構，由多自由度Bouc-Wen前饋控制器及擴增狀態估測有限時間滑模回授所組成，意在解決非線性及干擾相關的難題，並透過穩定性證明展示其有效性。此外，傳統的柵欄式掃描軌跡設計，其成分包含三角波的訊號源，此訊號容易引起機械系統的高頻共振。有鑑於此，本篇論文提出一種修正式的柵欄式軌跡，將原先的三角波替換為順滑轉換的路徑形式，來避免不必要的高頻訊號產生，藉此減緩高頻共振問題。
最後，透過對系統一系列的模擬與實驗結果進行比較，可展現本論文提出的控制架構及軌跡設計的優異性。

摘要(英)

The piezoelectric stage is widely used in high-resolution measurement systems for exploring and manipulating the micro-/nano- scales world. The stage’s actuator is made of piezoelectric material, which can deform its shape when a voltage is applied (and vice versa). However, this material suffers from nonlinearities, such as hysteresis and cross-coupling. Besides, the tracking trajectory design affects the overall performance and output image qualities of the AFM system. To overcome the problem, first, we combine a Bouc-Wen feedforward control scheme with an extended state observer-based finite-time dynamics sliding mode feedback control to address these nonlinearities. Second, we proposed a modified raster trajectory that replaces a sharp turning point with a smooth-out transition to minimize the unwanted high-frequency oscillation phenomenon as much as possible. A series of simulation and experimental results were compared to demonstrate the performance of the proposed trajectory and control method.

關鍵字(中)

★ 壓電平台
★ 修正式柵欄軌跡
★ Bouc-Wen模型
★ 擴增狀態估測器
★ 滑模控制

關鍵字(英)

★ High-precision measurement system
★ Piezoelectric stage
★ Modified raster trajectory
★ Bouc-Wen model
★ Extended state observer
★ Finite-time sliding mode control

論文目次

摘要…………………………………………………………………………………….....i
致謝……………………………………………………………………………………...iii
List of Figures …………………………………………………………………….……..vi
List of TABLES xii
Explanation of Symbols xiii
Chapter 1 Introduction 1
1.1 Motivation 1
1.2 Literature Review 2
1.2.1 Scanning Trajectory Categories 3
1.2.2 Control Strategies for Piezoelectric Actuator 7
1.3 Contribution 13
1.4 Thesis Organization 14
Chapter 2 Preliminary 16
2.1 Characteristics of Piezoelectric Actuator 16
2.1.1 Piezoelectric Effect 16
2.1.2 Hysteresis Phenomenon 17
2.1.3 Cross-Coupling Phenomenon 19
2.2 Particle Swarm Optimization (PSO) 21
2.3 Feedforward Control 23
2.3.1 Bouc-Wen Model 24
2.4 Feedback Control 25
2.4.1 Sliding Mode Control 25
2.4.2 Extended State Observer 27
Chapter 3 Modified Raster Scan Trajectory 29
3.1 Modified Raster Algorithm 29
3.1.1 Conventional Raster Scan Trajectory 29
3.1.2 Modified Raster Scan Trajectory 31
3.2 Comparison of Mapping Methods 40
Chapter 4 Controller Design 42
4.1 Scanning Trajectory of X- and Y-axis 42
4.2 ESO-Based FTDSMC with Bouc-Wen Model Hysteresis Compensator 43
4.2.1 Problem Formulation 44
4.2.2 Control Algorithm 47
4.2.3 Stability Analysis 52
Chapter 5 Simulation Results 59
5.1 Simulation Setting 59
5.2 Simulation of Bouc-Wen Compensation 66
5.3 Modified Raster Trajectory Tracking Results 69
5.4 Sine Wave Trajectory Tracking Results 80
Chapter 6 Experimental Results 91
6.1 Experiment Setup 91
6.2 Bouc-Wen Hysteresis Compensation 94
6.3 Proposed Trajectory Tracking Results 97
Chapter 7 Conclusion 117
Reference ………………………………………………………………………….119
Appendix ………………………………………………………………………….123

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指導教授

吳俊緯(Jim-Wei Wu)

審核日期

2024-7-26

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