利用液滴沉積及微液滴透鏡進行表面增強拉曼散射

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姓名

楊子頤(Zi-Yi Yang) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

利用液滴沉積及微液滴透鏡進行表面增強拉曼散射
(Droplet deposition and Microdroplet lens for SERS)

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至系統瀏覽論文 (2029-8-5以後開放)

摘要(中)

本論文以無電沉積融合液滴沉積的技術，進行銀金屬粒子沉積在多孔矽(Porous Silicon)基板上之製程，實現更加簡便和高效的區域沉積，提高製程的靈活性，在無電沉積融合液滴的沉積製程中，除了有高覆蓋率以及高拉曼檢測強度外，對於控制液滴沉積銀的面積也有更加深入的討論，沉積面積的大小會直接影響銀的覆蓋率及該面積形成之接觸角，都會影響到後續的檢測結果，因此不論是銀的沉積濃度或是銀的沉積面積進行檢測，針對不同的沉積參數優化其實驗結果。在銀沉積點(LocAg-PS)上利用液滴形成液滴透鏡進行訊號增強時，首先需要對液滴形成的不同接觸角進行模擬，在確定最佳的液滴接觸角後，光線在對準液滴透鏡時，在不同的位置射入光線也產生各種不同的折射效果，經過鏡頭攝像機校正後，便可以將光線校正至液滴透鏡正中心或其附近進行檢測，隨後對不同樣本沉積方式進行分析，分別為直接乾燥、純水透鏡及樣本透鏡，在經過分析發現樣本透鏡可以提供更高的拉曼檢測訊號。因此在本論文中，除了探討銀沉積濃度對拉曼訊號造成的影響，以及光線經液滴折射聚集後產生較小的照射面積以提升光強度，在光線接觸液滴表面時也會將光線引導至銀沉積點上，並對於光線照射到液滴不同位置的影響進行探討。最後從實驗結果顯示，在以純水液滴以及樣本液滴進行拉曼檢測中，拉曼增強因子皆可以達到1.35×106和7.34×106，而與直接乾燥相比，拉曼檢測訊號分別增強了2倍和6倍，並且沒有任何雜訊的產生。

摘要(英)

This paper presents a technique that combines electroless deposition with droplet deposition to deposit silver nanoparticles onto a porous silicon (PS) substrate. This method simplifies and enhances the efficiency of localized deposition, offering greater flexibility in the process. In the deposition process combining electroless deposition with droplet deposition, we achieved high coverage and strong Raman detection intensity. We also delved deeper into controlling the area of silver deposition by the droplet. The size of the deposition area directly affects the coverage rate of silver and the contact angle formed by that area, both of which influence subsequent detection results. Therefore, we optimized experimental results based on different deposition parameters, including silver deposition concentration and area.When using droplet lenses to enhance signals at the silver deposition points (LocAg-PS), we first simulated different contact angles formed by the droplets. After determining the optimal droplet contact angle, we studied the refraction effects of light entering the droplet lens at various positions. Through calibration with a camera lens, we adjusted the light to focus at or near the center of the droplet lens for detection. We then analyzed different sample deposition methods, including direct drying, pure water lenses, and sample lenses. The analysis revealed that sample lenses provided higher Raman detection signals.
In this paper, we discuss not only the impact of silver deposition concentration on Raman signals but also the enhancement of light intensity due to the smaller illuminated area caused by light refraction and focusing through the droplet. Additionally, we investigate the effects of light irradiation at different positions on the droplet surface on the silver deposition points. Experimental results showed that using pure water droplets and sample droplets for Raman detection achieved enhancement factors of 1.35×106 and 7.34×106, respectively. Compared to direct drying, the Raman detection signal was enhanced by 2 times and 6 times, respectively, without any noise generation.

關鍵字(中)

★ 表面增強拉曼散射
★ 金屬輔助化學蝕刻
★ 液滴沉積

關鍵字(英)

論文目次

摘要 v
Abstract vi
目錄 viii
圖目錄 x
第一章前言 1
1-1表面增強拉曼散射及其應用 1
1-2基板材料及結構 1
1-2-1飛秒雷射脈衝 2
1-2-2電子束微影 2
1-2-3金屬輔助化學蝕刻 3
1-3無電沉積 5
1-4光學透鏡及應用 6
1-4-1固體微透鏡 6
1-4-2液滴微透鏡 9
1-5研究動機 12
第二章實驗材料及設備 13
2-1實驗材料及設備 13
2-1-1實驗材料以及化學品 13
2-1-2實驗相關設備與分析儀器 13
2-2實驗方法 13
2-2-1多孔矽(Porous silicon,PS)製備 13
2-2-2局部銀沉積(Localized silver deposition , LocAg - PS)製備 14
2-3表面形貌的檢測 15
2-4接觸角量測 15
2-5拉曼實驗設置 16
2-6光學模擬軟體設置 18
第三章結果與討論 19
3-1銀沉積點晶片製程 19
3-2銀沉積濃度對拉曼檢測的影響 25
3-3液滴大小及接觸角對雷射光源的影響 29
3-4液滴吸收率及蒸發問題 34
3-5 不同沉積方式對拉曼訊號的影響 36
3-6 液滴滴定量影響拉曼增強的程度 42
3-7液滴透鏡對不同儀器和雷射光波長的影響 43
3-8銀沉積點對真實樣本拉曼檢測的影響 45
第四章結論 47
參考文獻 48
附錄 53

參考文獻

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指導教授

曹嘉文(Chia-Wen Tsao)

審核日期

2024-8-19

推文