本論文提出一套毫米級移動距離且具有奈米級定位能力之定位平台-「複合式長行程精密定位平台」。以整合微步進馬達平移台與壓電平移台，建構出具有長移動距離與高精密定位能力之定位平台，配合外差干涉儀及二值化相位演算法，提供具有高解析度與高速量測能力之光學式位置回授系統，再加上位置控制器進行閉迴路控制，完成本研究之定位平台。 本研究所設計之精密定位平台在閉迴路控制下定位誤差小於5nm，運動速度約為0.1mm/s，穩定度為4nm。所提出之相位演算法解析頻率為信號頻率的兩倍。 本論文亦對所提出之相位演算法的誤差容忍度進行分析，討論電源品質對微步進馬達平移台穩定性所造成的影響，並針對壓電平移台位移需求超出平移台所能提供之位移極限時提出應對的方法。 本論文所開發之定位平台有長移動距離與高穩定度的特性，將是一套高應用潛力的系統。 In this thesis, the Compound Large-Scale Precision Positioning Stage (CLSP2S) which can reach to millimeter scale moving distance and possesses ability of nanometer scale positioning is developed. This system is based on compound stage, which is consist of piezoelectric stage and stepping motor stage and provides abilities of long moving distance and high precision positioning, optical feedback system, which is consisted of heterodyne interferometer system and phase calculation algorithm that developed in the thesis, and proportional controller which perform close-loop control. The positioning error of this system in close-loop control mode is less than 5nm. The speed limit of this system is about 0.1mm/s, and the stability of presented system is 4nm. The resolvable frequency of phase calculation algorithm proposed in this thesis is two times of frequency of signal. The tolerance of phase calculation algorithm proposed and the effect of power stability for micro stepping motor stage will be discussed in this thesis. The dealing method for the movement of compound stage over the limit moving range of piezoelectric stage will be presented. The system developed possesses the characteristics of long moving distance, high stability, and is high potential system for many applications.
