自從奈米碳管發現以來，一維奈米結構逐漸受到重視，其中氧化鋅為最近熱門的應用例子。特性為多樣化的奈米結構，好的化學與熱穩定性，獨特的發光性質等等，因此有寬廣的應用範圍和潛力。 本論文採用Ar+離子轟擊鋅箔，產生粗糙化效果，配合大氣下熱氧化，產生氧化鋅奈米結構。參數方面使用5、7、10keV的離子束能量與1、4、8、16小時的轟擊時間，加上氮離子佈植8小時。然後使用SEM及XPS探討形成氧化鋅的表面型態與成分分析。 實驗結果方面，離子束濺射會在鋅箔上形成波浪狀有規則的起伏結構。其中凸起的位置在氧化時會生長出線狀的氧化鋅奈米結構。SEM觀察發現不同的轟擊時間會有不同類型的氧化鋅奈米結構。其中當轟擊離子數目越低時，越能顯示提高轟擊能量對於生長氧化鋅奈米結構的幫助。在XPS檢測方面，提高轟擊離子數與轟擊能量，都會造成增加氧化鋅產量的效果，同時提升氧化鋅結構的品質。關於氮離子轟擊後的試片，生長出來的氧化鋅奈米結構較細緻但整體產量較少。 Since carbon nanotube has been found, the one dimension of nanostructures has attracted great attention gradually, Among them that zinc oxide is one of the hot applications recently. Zinc oxide has broad range of applications and potentiality because of its variety of nanostructures、chemical and thermal stability and light emission. In this thesis, we use Ar+ ion beam bombard zinc foil. Make zinc surface rough, and cooperate with thermal oxidation in the air. Produce zinc oxide nanostructures. We use 5、7、10keV ion beam energy and bombard 1、4、8、16 hours. After fabrication, the morphology of the sample is examined by scanning electron microscopy(SEM), and the component analysis is by X-ray photoelectron spectroscopy(XPS) About the experiment results, the raised positions of rough surface after ion beam sputter will grown zinc oxide nanostructures, and different bombard hours induce different morphology types. When bombardment ions reduces, the bombardment energy will become more important of grown Zinc oxide nanostructures. In XPS, rise bombardment ions and energy also enhance the yield and the quality of Zinc oxide. Final, after N2+ions bombard, Zinc oxide nanostructures will grown more thin, but the yield will reduce.
