本研究以射頻磁控濺鍍系統，於FTO導電玻璃上濺鍍1μm鈦薄膜。探討不同氟化銨、水含量及電壓等陽極處理參數，對鈦薄膜轉換成二氧化鈦奈米管陣列型態和性能的影響。並以製備出透明之二氧化鈦奈米管陣列，應用於太陽能光電化學產氫。氟化銨含量的高低會影響二氧化鈦奈米管的長度：當氟化銨含量越高，二氧化鈦奈米管越短。水含量會影響表面二氧化鈦的覆蓋量：水含量越高，二氧化鈦覆蓋程度越低，但卻造成鈦薄膜的殘留。陽極處理電壓會影響剩餘鈦氧化層厚度：電壓越高，鈦氧化層厚度越低，使鈦薄膜轉換成二氧化鈦奈米管之轉換率上升。二氧化鈦奈米管管長和表面二氧化鈦覆蓋，影響了二氧化鈦奈米管的性能：二氧化鈦奈米管長度增加，光穿透度降低，而光電流上升，但光電流會因為奈米管表面覆蓋二氧化鈦，使的電子非垂直方向傳輸到FTO，增加電子移動路徑，造成光電流無法有效提升。 In this study, we prepared transparent TiO2 nanotubes array for application in photo-electrochemical hydrogen generation. Hence we used RF (Radio frequency) magnetic sputter system to deposit 1μm Ti thin film on FTO (Fluorine-doped tin oxide) glass substrates at 300°C, and then anodized in difference NH4F, water content electrolyte, and applied potential to discuss the variation of morphological surface affect to the performance of TiO2 nanotubes. The results indicate that the length of TiO2 nanotubes decreases when the NH4F content increases. When the water content is higher, the TiO2 cover removed is larger but the Ti thin film is remained. The applied potential increases, the thickness of oxide layer decreases and the length of TiO2 nanotubes increases. Higher length of TiO2 nanotubes leads to the optical transmission decreases but the photocurrent increases. The TiO2 cover also affects on the photocurrent in which the electron does not vertical transport to FTO so that the distance of electron transportation might be rise. Therefore, the photocurrent could not enhance available.
