微小化是現今微電子及微光電系統的趨勢，然而隨著尺寸越來越小，其散熱之問題亦相形重要之。但是目前可應用於微熱點冷卻之各種冷卻方法，因受限於尺寸或是材質而難有理想之冷卻效率。 本研究乃採用微液滴主動冷卻微熱點的方式，即利用冷卻介質之相變化，直接帶走微熱點上的熱而達到冷卻目的，以期能在高效能的微小光機電元件之冷卻工程上有更新的突破。 由本實驗室之實驗結果顯示，當微熱點在80 ℃以下，使用單一微液滴冷卻時，微液滴皆可達到不錯的冷卻效果。但當微熱點在80 ℃以上，則會因為汽泡環(Bubble ring)造成冷卻效果下降。幸而一般的微小光電元件也很少會有如此的高溫，因此本實驗使用50 μm直徑之純水微液滴冷卻微熱點(尺寸為75 μm × 75 μm及50 μm × 50 μm)確是一可行的冷卻方法。 It is the current trend of the micro-electronic and micro-optical systems to minimize the size. As the size of these micro-devices become smaller, the problem of heat dissipation would be more important. Although several methods have been applied for the Micro-hot-spot, such as Thermoelectric Cooling, Micro Heat Pipe, and Micro channel, these systems do not really get the cooling efficiency because of their limitation of size or material. The goal of our research, called Active micro-droplet cooling method, is going to make use the characters of phase change in our cooling liquid, to take heat away from the Micro-hot-spot directly. We hope this system could provide a higher efficiency in cooling engineering for the micro-electronic and micro-optical systems.
