摘 要 在微細加工的領域中，微細放電加工法可有效地用來製造孔徑小於100μm的微細孔，但以微細放電加工法在金屬板上製作微細孔時，因孔壁的表面會形成再鑄層，其包含了微裂痕與放電坑等缺陷，孔壁表面粗度不佳，嚴重影響微細孔的品質。 因此，本研究擬以高鎳合金為工件材料，結合微細放電與電解拋光兩種加工法，進行微細孔加工，期能改善在放電後的高鎳合金微細孔的孔壁表面品質，使其符合精密工業的需求。 由實驗結果顯示，採用電解拋光法加工微細孔時，孔壁表面可獲得顯著的拋光效果。以放電電流500mA加工後的微細孔為例，在輸入電解電壓2V、電極不轉動、電解液濃度比例1：10、電解液不流動、加工時間約5分鐘時，即可獲得孔壁表面平整光滑的微細孔。此法亦可應用於各式微細異形孔的孔壁表面之改善。 Abstract Micro-holes with diameter less than 100μm can be effectively fabricate by micro-EDM in micro-machining. But using micro-EDM to manufacture micro-holes on metal plate, the recast layer include micro-crack and crater was formed on the hole-wall will lead to poor surface roughness to affect quality of micro-hole seriously. For this reason, the Hymu-80 was chosen as the workpiece material in this study, using micro-EDM combined with electropolishing to machine micro-holes. It expected to improve the quality of micro-holes after EDM to satisfy the precision engineering. The results showed that, using electropolishing to machine the surface of the hole-wall could obtain obviously improvement.
