在眾多非傳統特殊微系統加工中，微電化學加工(Electro- chemical Micro-Machining,簡稱 EMM)擁有加工速度快、無表面應力集中及表面光潔度佳的優勢，具有相當的發展潛力和高附加價值。 本研究採用 之微米銅管做為刀具，電解液的流動採用內部流，希望藉由內部流來提升加工的順暢性。本研究採用田口統計方法探討微電化學加工相關參數（操作電壓、進給速度、電解液濃度及電解液流量）對於加工孔徑的影響性程度。並運用穩健設計法加以評估設計最佳參數組合。 由矩陣實驗結果加以分析，發現操作電壓及電解液濃度的改變將嚴重影響加工孔徑的結果，同時從研究中順利取得ㄧ組最佳參數。 In numerous non-traditional, systematical micro-machining, the electrochemical micro-machining (abbreviated as EMM) has the advantage of quick processing speed, good convergence in surface stress, and nice smoothness in workpiece surface with enormous potentialities highly added value. A copper tube with 300-micron meter of diameter is selected as electrode tool. The inner flowing vein is employed for facilitating the processing efficiency of the micron tube. In this research, Taguchi Statistical Method of Quality- engineering is used to analyze the influence level on the final hole’s diameter of workpiece by relevant parameters (Such as : voltage, feed rate, density and flowing volume rate of electrolyte). Robust-Design technique is also used to estimate the best design combination of parameters in our experiment. By analyzing the outcomes of metric experiments, the voltage and electrolyte concentration are found to affect apparently the diameter of processing hole on the workpiece, and the best parameter combination is simultaneously acquired from the research.
