本論文的主要目的是為了改善單極式電鍍效率不彰的缺點，而著手研究『同時多極電鍍』的可行性，為此目標而開發多極式陽極引導微電鍍系統。此系統是採用模組化的架構，可細分為三大模組：電鍍機構平台、多極式陽極引導微電鍍硬體及監控(程式)系統。當系統運作後，使用者可透過操作監控程式介面對多極式陽極引導微電鍍硬體下達電鍍相關指令，多極式陽極引導微電鍍系統在處理完電鍍指令或完成特定的程序後，即會經由系統的通訊介面將相關資訊回應於監控程式介面。 文中將對系統各模組的規劃與軟體的設計加以說明與介紹，而實驗上主要是進行多極式陽極引導微電鍍系統的功能驗證、研究最佳化的銅鍍液配方與多極式的電鍍成效，最後，以這三方面來討論本系統是否具有改善單極式電鍍效率的功效與『同時多極電鍍』的可行性。 Micro Anode Guided Electro-plating System(MAGE) has been used to fabricate a 3-D micrometer scale nickel column in nickel-containing baths.In order to improve the inefficiency of Micro Anode Guided Electro-plating System,we try to research and develop the Multi-Micro Anode Guided Electro-plating System that have much parallel and switching anode in a MAGE.This new system comprises 3 module：Plating mechine,Control system,User's operating system.In this paper,we will give an outline of the Multi-Micro Anode Guided Electro-plating System and make some experiments on Cu-containing baths and Ni-containing baths to analyze the efficiency of Multi-Micro Anode Guided Electro-plating System.
