3C導光板成形模具、生醫微流道、微射出模具與精密機械等複雜曲面，由於放電加工後易殘留毛邊，所形成的再鑄層散佈著微細裂紋或氣孔等缺陷，使得加工面品質變差。本論文研究重點針對複雜曲面提出改善表面品質的精拋方法。 首先開發一經濟且實用的黏彈性磨料，其次是結合磨料特性應用於往復式磨料流動研拋法進行表面精修，遂而發展一種新型螺旋式磨料流動研拋技術，藉著高速旋轉螺桿傳遞磨料，對試件表面產生極微研拋的去除效果，而獲得精細加工表面的一種超精密加工方法。經由實驗結果分析顯示，確實能有效去除放電加工所造成的毛邊或殘留不潔物，而獲得較佳的形狀精度。最後是針對內孔表面再進行螺旋式磨料流動研拋，表面粗糙度由0.23μm 大幅降至0.05μm Ra，表面有極微量的材料去除，達到快速精拋的效果。 For the complex surface products of the formed mold of 3C guide light board, the micro channel, micro inject mold of bio-medicine and the screw of precision mechanism, the deburring and recast layer in EDMed work-piece decreases the surface quality. The tiny fragments from the recast layer are likely to spread tiny cracks and produce micro blowholes. In this study, three techniques are proposed to improve the surface roughness and to achieve a high surface quality. First, an economical and practical abrasive with visco-elastic abrasive for fine polishing was developed. A fine processed surface can be obtained and the effect of the removal of the tiny fragments can be achieved through this technique. The second technique applies the method of reciprocating abrasive flow machining to the surface, creating more characteristics of visco-elastic abrasive. Thus, the surface of the micro orifice of complex surface can be quickly and effectively polished and improved. Finally, this study develops a new method of spiral abrasive flow machining with elastic abrasive, especially suited for the complex surface. The abrasive medium removes tiny fragments and debris. It improves the initial surface roughness from 0.23µm to 0.05µm Ra. This spiral abrasive flow machining method also homogenously polishes the work-piece surface, and clearly improves the quality of finished surfaces. This technology is low cost and highly efficient. Keywords：Bio-medicine、micro channel、electric discharge machining、recast layer、visco-elastic abrasive、reciprocating abrasive flow machining、spiral abrasive flow machining、surface roughness.