中文摘要 本實驗之研究目的主要是開發一種可隨加工時間而自動調整其流動性與黏滯性的自調性磨料,並利用磨料流動加工法(Abrasive Flow Machining,AFM)對複雜形狀的微細流道表面進行修整之實驗探討。將由實驗中探討磨料流動加工的製程參數,如磨粒粒度、磨料濃度、擠製壓力與加工時間,對磨料黏滯性及表面粗糙度的影響。同時,亦觀察微細流道之外觀上形狀精度經磨料流動加工修整後的改善效果。 由實驗結果得知,初始磨料具有較高黏滯性。尤其在選用較粗粒徑的磨粒與較高濃度的磨料,並於使用較高擠製壓力的加工條件下,對流道表面粗糙度的改善最為明顯。在隨著加工時間的增加,磨料會呈現極佳的流動性,有利於磨削速度,極適合精修微細流道。能有效地改善流道表面的粗糙度,以獲得高品質的微細流道元件。 Abstract This study developed a self-modulating abrasive whose viscosity and fluidity can be adjusted processing period. The complex micro channel was fabricated on the stainless steel (SUS304) by using Wire electrical discharge machining (WEDM) and an experiment of employing Abrasive Flow Machining (AFM) was conducted to evaluate the characteristics of various levels of roughness and finishing of the micro channel surface. In the experiment, the parameters of affecting AFM machining including abrasive particle size, concentration, extrusion pressure and machining time were selected to verify the machining quality of the micro channel. Experimental results reveal that at high viscosity and concentration the surface roughness of abrasive with a coarse particle size is lower than that of abrasive with a fine particle size. Furthermore, the machining quality of the micro channel improves as the extrusion pressure and the machining time increase because there is an increase in the fluidity of the abrasive. Therefore, the self-modulating abrasive-laden media can be used to determine and influence the surface finishing and the precision of the shapes. So we can find the most efficient working conditions to promote industries to consult.