本文製作一微型電滲泵並測試其壓力和流率性能，此種無動件微泵將能做為微電子元件冷卻系統的輸送流體裝置。以燒結的二氧化矽粉末作為多孔介質的作為電滲泵整體尺寸為80×80×50 mm3。以白金線作為電極材料用來提供外加電壓，利用兩種工作流體（氯化鉀與硼酸鹽）以測試電滲泵的性能。兩種工作流體搭配不同濃度(C=0.1-4 mM)配合不同電壓(100-300 V)來測試電滲泵的性能。 在相同工作流體與濃度下，電壓越高則流率與壓力越高；在相同工作流體與電壓下，濃度越高的溶液則流率越高、壓力越低。硼酸鹽溶液的表現比氯化鉀佳 ，因為前者的流率與施加電壓關係為線性，且可得到較高流率。目前製作的電滲泵最大壓力和最大流率分別為Qmax=19.7 ml/min、Pmax=124 kPa。 在高濃度的工作流體高電壓下造成高電流，所以形成顯著的焦耳熱效應，導致電滲泵流體發熱。又以氯化鉀流體影響最為嚴重，其發熱情形會導致工作流體沸騰；硼酸鹽工作流體也有影響但是比較小。焦耳熱效應會使工作流體的溫度升高進而降低流體黏度 ，此點有助於提高電滲泵的流率。 We have fabricated an electroosmotic (EO) micropump and test its pressure and flowrate performance. Such no-moving part pump can be used as the transporting flow device in the microelectronic cooler. The EO pump uses the sintered-silica as the porous media and the pump overall geometry is 80×80×50 mm3. The platinum electrode provides voltage and using the borate (N2B4O7) and KCl solutions as the working fluid. Various range of concentrations (C=0.1-4 mM) and applied voltages (100-300 V) are tested to measure the performance of the EO pump. Under the conditions of same working fluid and concentration the flowrate and pressure magnify as the applied voltage increases. For the same working fluid and apply voltage, those solutions with higher concentration result in higher flowrate and lower pressure. The borate solution performs better than the KCl solution for its relation between the flowrate and applied voltage is linear while the latter has abnormal fluctuation; moreover, its flowrate is higher. The present EO pump achieves a maximum flowrate and pressure of Qmax=19.7 ml/min and Pmax =124 kPa, respectively The operating condition of present EO pump has high concentration and voltage which generate high current and thus prompt significant Joule heating effect. The Joule heating effect actually heats the solution inside the EO pump and even result in boiling of the KCl solution in the chamber of EO pump. The flowrate of the EO pump is enhanced by the Joule heating effect since the solution viscosity is reduced.
