本論文提出並發展一個利用液晶可調相位延遲器對相位延遲調控之相移干涉影像式橢圓儀，其目的在於利用一簡單的相位延遲調控之機制去造成相移干涉術的效果，並測量待測物之橢圓偏極參數。 由於液晶可調相位延遲器可藉由輸入不同振幅大小的方波來改變液晶可調相位延遲器的相位延遲。因此，液晶可調相位延遲器與光彈調變器同樣是屬於相位調制技術，然而，本量測系統之校正步驟相較於利用光彈調變器調控相位延遲以及閃頻照射模式所發展的閃頻影像式橢圓儀簡化許多，因此，本論文將對相移干涉影像式橢圓儀系統的工作原理、架構和校正方法做探討並和閃頻影像式橢圓儀的系統的工作原理和校正方法做比較，最後，以已知橢偏參數的待測樣本對系統準確性進行驗證。 In this thesis, a phase shift interferometric imaging ellipsometer (PSIIE) is developed and set up by utilizing a liquid crystal variable retarder (LCVR) of which the phase retardance is programmable. A LCVR is used and introduces phase modulation in PSIIE working as a phase shifting interferometer. Thus the ellipsometric parameters of specimen are able to be measured accurately. Because the phase retardation of LCVR is modulated by the amplitude of square waveform directly, therefore, PSIE becomes much simplified than conventional photo-elastic modulator (PEM) for phase modulation. As a result, PSIE shows advantage compared with stroboscopic illumination photoelastic modulated imaging ellipsometer. In this thesis, the working principle and calibration procedure of PSIE are described. By testing a given specimen, the experimental verification of PSIE was verified experimentally.
