本研究將整合光波導及微奈米次波長光學元件方面的研究，利用導波模態共振濾波元件(guide-mode resonance filter, GMR filter)與SOI 脊狀波導的單石積體化，在SOI 基板上發展具備積體化光學濾波元件的平面光路。探討具週期性次波長結構之微奈米光學元件，是否可成為未來積體光學的高密度光路中的標準濾波元件架構。包括：以模態耦合理論設計導波模態共振濾波元件與波導結構、積體光路製作以及積體光路量測。計畫執行項目包括(1) 波導形成的超短平面波寬度對GMR 元件頻譜特性，(2) 波導模態於積體光路演化過程，(3) 光柵輔助式表面耦光結構與SOI 脊狀結構積體化設計，(4) GMR 光學元件與光波導結構積體化製作，(5)光學元件積體化光路量測。本計畫預期探討設計及製作具週期性次波長結構之GMR光學元件結合波導光路結構。將數值模擬與量測數值作比對，用以評估光波光路積體化可行性，並延伸探討GMR 光學元件是否可擴展並應用於任意角度之多通道波導，使積體光學的高密度光路得以實現。藉由本計畫對於具週期性次波長結構之GMR光學元件積體化能於以掌握，並期待計畫執行能幫助建立高密度積體光路的可行技術。This proposal is based on our research achievements in guide-mode resonance (GMR) filter, and silicon-on-insulator-based waveguide. By extending the above technologies to integrate planar lightwave circuits (PLCs) with GMR filters and SOI-based waveguides, we will evaluate and analyze characteristics of such integrated PLCs, including (1) the frequency spectra of GMR filters affected by the ultra-short wavefronts emitting from waveguides, (2) the eigenmode evolution in the light path combined with the GMR filter and waveguide, (3) design of integrated the grating-assistant surface coupler on a SOI-based waveguide, (4) PLCs fabrication integrated with GMR filters and waveguides, (5) optical measurement of integrated PLCs. Integrated PLCs with GMR filter and SOI-based waveguide would be established in this project. The numerical simulation analysis and optical measurement data would be estimated for integrated PLCs. We will also discuss the GMR filter to apply the multichannel of waveguide in the random angle. The achievements of this project include the precise measurement of structural parameters and optical characteristics of integrated PLCs with GMR filter and waveguide. It is expected that the proposed technologies can improve the dense integrated PLC. 研究期間 : 9808 ~ 9907
