本論文的主要目的是希望析鍍出3D微結構(像微彈簧、空心管等三度空間微小元件)，而著手研究『3D微電鍍』的可行性，為此目標而開發3D陽極引導微電鍍系統。本系統是採用模組化的架構，可細分為三大模組：三軸電鍍機構平台、陽極引導微電鍍模組、及監控(程式)系統。當系統運作後，使用者可透過操作監控程式介面對3D陽極引導微電鍍硬體下達電鍍相關指令，3D陽極引導微電鍍系統在處理完電鍍指令或完成特定的程序後，即會經由系統的通訊介面將相關資訊回應於監控程式介面。 文中將對系統各模組的規劃、機構設計與軟體編寫加以說明與介紹，而實驗上主要是進行3D陽極引導微電鍍系統的功能驗證並以伺服電流模式或伺服電壓模式析鍍微結構進行各種實驗，最後，驗證『析鍍3D微結構』的可行性。 The main purpose of this thesis is to hope to electro-plating 3D micro-structure (like small components of three-dimensional space , such as little spring , in charge of hollowly ,etc.), and set about studying the feasibility that " 3D micro electro-plating " , develop anode guided 3D micro electro-plating system for this goal. This system use the structure of the module , can subdivide into three major module : Three axles electroplate mechanic-platform , anode guided micro electro-plating module , and control program . After the operation of the system, the user can give electroplate instructions to anode guided 3D micro electro-plating hardware through interface of control program, the anode guided 3D micro electro-plating the system after finishing electroplate instructions or finishing the specific procedure , communication interface of the system will receive electroplate- information and show on control program interface . It is explain and introduced how every module of the system is designed、planned and program is coded . On electroplating-experiment that the anode guided 3D micro electro-plating function is verified and proves server current mode or server voltage mode to electroplating micro-structure , finally , verify the feasibility of " electroplate 3D micro-structure ".
