Effect of axisymmetric magnetic fields on radial dopant segregation of floating-zone silicon growth in a mirror furnace

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题名:	Effect of axisymmetric magnetic fields on radial dopant segregation of floating-zone silicon growth in a mirror furnace
作者:	Lan,CW
贡献者:	化學工程與材料工程學系
关键词:	SI CRYSTAL-GROWTH
日期:	1996
上传时间:	2010-06-29 17:32:01 (UTC+8)
出版者:	中央大學
摘要:	The effect of axisymmetric magnetic fields on radial dopant segregation of floating-zone silicon growth in a mirror furnace is studied through computer simulation. The mirror furnace is modeled by a point lamp model, and the magnetic fields are generated by wire coils carrying different currents. Heat and mass transfer, fluid flow, melt/solid interfaces, and the free surface are solved globally by a robust finite-volume/Newton's method. Both axial and cusp fields are considered. It is observed that the magnetic fields suppress the convection in the core region effectively, and squeeze the thermocapillary flow toward the free surface. However, due to poor mixing in the core region, large radial segregation is induced by strong magnetic fields, particularly by the cusp field. With a higher heat input, multiple steady states are also observed in weak magnetic fields.
關聯:	JOURNAL OF CRYSTAL GROWTH
显示于类别:	[化學工程與材料工程研究所] 期刊論文

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