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    請使用永久網址來引用或連結此文件: http://ir.lib.ncu.edu.tw/handle/987654321/26896


    題名: The analysis and investigation on the microelectrode fabrication by electrochemical machining
    作者: Fan,ZW;Hourng,LW
    貢獻者: 機械工程研究所
    關鍵詞: N/A
    日期: 2009
    上傳時間: 2010-06-29 18:02:43 (UTC+8)
    出版者: 中央大學
    摘要: Electrochemical machining (ECM), also called the electrolysis machining, has become more and more important in micro-machining in recent years. In this paper, a 510 mu m tungsten rod was used as the anode, and nickel plates were used as the cathode to fabricate the micro-pin used in scanning tunneling microscope (STM) by electrochemical polishing. Different from the needle shape in STM, a cylindrical shape of microelectrode is desired for the application in electrochemical drilling. The influence of working parameters on the electrode shape is investigated. Experimental results show that low applied voltage, high concentration electrolyte and an appropriate rotation of electrode are preferred to fabricate microelectrodes with diameter less than 100 mu m. A higher rotational speed may result in an electrode of conical shape. (C) 2009 Elsevier Ltd. All rights reserved.
    關聯: INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
    顯示於類別:[機械工程研究所] 期刊論文

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