Experiment and simulation of the recirculation flow in a CVD reactor for monolithic materials

NCUIR > Engineering College > Graduate Institute of Mechanical Engineering > journal & Dissertation > Item 987654321/27036

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Title:	Experiment and simulation of the recirculation flow in a CVD reactor for monolithic materials
Authors:	Gong,SC;Liu,RG;Chou,FC;Chiang,AST
Contributors:	機械工程研究所
Keywords:	CHEMICAL VAPOR-DEPOSITION;FACING STEP FLOW;HEAT-TRANSFER;DOWNSTREAM;EXPANSION;CHANNEL;ABRUPT
Date:	1996
Issue Date:	2010-06-29 18:06:08 (UTC+8)
Publisher:	中央大學
Abstract:	The length of the recirculation zone (reattachment length) of a central jet flowing into an enlarged chamber is studied both experimentally and theoretically. Unlike conventional studies of flow over a backward-facing step or abrupt circular channel expansion flows, the expansion ratio in this study is much greater than 2. This is the condition observed in the CVD reactor for producing bulk monolithic materials. A correlation equation is found to predict the length of the recirculation zone when the expansion ratio is greater than 2. This correlation equation has been confirmed by the present experimental data with an expansion ratio of 15.3 and agrees with the existing data for an expansion ratio of 2.6.
Relation:	EXPERIMENTAL THERMAL AND FLUID SCIENCE
Appears in Collections:	[Graduate Institute of Mechanical Engineering] journal & Dissertation

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