| 摘要: | 近年來生醫晶片技術與一般微機電產品的製程技術常採用沈積、光微影、蝕刻、雷射加工、LIGA等製程，製造成本昂貴。利用高分子材料製造微流道生醫晶片之載具，以取代玻璃、矽晶片之基板，可達到大量生產及降低生產成本之目的。 本實驗則利用雕刻機，製作寬度200μm及深100μm的微流道之模具，再運用電解拋光技術使表面粗度0.139μmRa降至0.043μmRa，並利用熱壓成型機，對非結晶性透明塑膠材料ABS、PMMA、PC，以粒重約為0.01g~0.016g，進行微流道結構之熱壓塑膠成型。 近年來由於光學產業包括、光學元件、導光板、背光模組、LCD等各式樣的光學產品，其所使用的透明塑膠材質大都以PMMA、PC為主軸ABS為輔搭配ABS樹脂混成複合材料，開發業界所需要的新物性。因此本實驗將以ABS、PMMA、PC三種塑膠材料為實驗材料，探討其成型時，溫度、壓力、時間等對塑膠成型之影響。 經由熱壓實驗結果獲知，ABS、PMMA、PC等材料之高精度成型，除上述參數外，冷卻溫度的掌控、微流道面模具的粗糙度及電解拋光製程的改善等，對塑膠微流道面結構之產品，有極大的影響。實驗結果顯示適當的加工參數組合，微流道之表面粗糙度可達0.043μmRa，且其微流道面之寬度僅約200μm，本研究所使用之方法雖然相當簡易，但其微流道面的成型精度良好，將對生醫晶片產業技術的提昇有所助益。 In recent years ,Biochip technology and general mems products make technology often to use, lithography, etching, laser processing, LIGA,etc, So the production cost is expensive.to use polymer material fabrication carrier of microchannel Biochip,to replace the base plate of glass and silicon, Can achieve the purpose of the large amount production and to reduce production cost. This experiment utilizes the carving machine, to Make width 200μm and depth 100μm model of microchannel, Use electropolishing technology make surface roughness 0.139μm Ra to 0.073μm Ra, using the hot embossing machine formation, and processed has material amorphous resin ABS, PMMA, PC, the grain weight approximately is 0.01g~0.016g, then for microchannel use hot embossing formation. In recent years the optics industry including: digital camera, traditional camera, photographic equipment, optics part, lens, back light mold, and LCD optics of concave convex, almost uses PMMA, PC transparent material. ABS is auxiliary and matches the resin to mix the compound material. Therefore this experiment by ABS, PMMA and PC three kind of plastic materials discusses the formation’s the temperature, the pressure, and time etc, to forming influence the precision. According to the hot embossing experimental results show that, ABS, PMMA, and PC etc, was high precision material to form , with besides the above parameters, control the cooling temperature , and the microchannel quality selects, and electropolishing the system the improvement etc, to product of the microchannel structure, was important influence parameter. The experimental result demonstration suitable processing parameter combination, surface roughness of the microchannel may reach 0.073μm Ra, and width of microchannel approximately 200 μm, Although the experimentation method was simple, but microchannel shape precision forming to promotion for Biochip technology development. |
