摘 要 在眾多非傳統特殊微加工中，微電化學（Electrochemical Micro-Machining，簡稱EMM）擁有加工速度快、無表面應力集中及表面粗糙度佳的優勢，具有相當的發展潛力和高附加價值。 本研究採用300μm之中空銅管作為刀具，電解液流動採內部流，希望藉由脈衝式直流電源，提供有規律的間歇供電進行間歇加工，配合橫向水流，以改善成品精度以及增加深寬比。本文採用單一因子法探討微電化學加工相關參數（操作電壓、加工能率、脈衝週期、電解液濃度、進給速率）對加工孔徑的影響程度。 本文最後以最佳參數進行5600μm之深孔加工，得到加工孔徑約900μm，深寬比約為6.2。 Abstract In numerous non-traditional, micro-machining, the electrochemical micro-machining ( abbreviated as EMM ) has the advantage of quick processing speed, good convergence in surface stress , and nice smoothness in workpiece surface with enormous potentialities and highly added value. A copper tube with 300 - micron meter of diameter is selected as electrode tool. The inner flowing vein, pulse power supply which supplies a regular intermittent power to machine the product intermittently, and with the water flowing sidelong are employed for improving the precision of products and increasing the depth –width ratio. In this research, Single Variable Method is used to analyze the influence level on the hole diameter of workpiece by relevant parameters ( such as voltage, duty, pulse period, density of the electrolyte, and feed rate). Finally, we take the best parameters to machine the depth of 5600 micron - meter then we obtain about 900 micron - meter of hole diameter and 6.2 depth-width ratio.
